US5083757A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Rotational flexure stage
Assignee: SAC Corp
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Filing: 1990-07-05
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Granted: 1992-01-28
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Expires: 2010-07-05
Abstract
Abstract The flexure stage disclosed herein is useful in aligning a semiconductor wafer during microlithographic exposure to define circuit elements on the surface of the wafer. The stage is a unitary structure which permits essentially lossless small angle relative rotation of a central portion of the stage with respect to an outer, annular portion of the stage. Three pairs of slots define three links extending radially with respect to the axis of rotation and, radially outwardly from each pair of slots, a respective transverse slot in the outer portion provides radial compliance for the outer end of the respective link.
Inventors
- 👤 Samuel M. Barsky
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 22:36
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716; B; B23; B23Q; B23Q1/00; B23Q1/25; B23Q1/26; B23Q1/34; B23Q1/36; F; F16; F16F; F16F1/00; F16F1/02; F16F1/32; H; H10; H10P; H10P72/00; H10P72/50; H10P72/57
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
167 words
A unitary flexure stage permitting essentially lossless relative small angle rotation around a central axis, said stage comprising a body of elastic material having therein: three pairs of parallel slots defining three links extending radially with respect to said axis from respective points of attachment to a central portion of said body; cylindrical bores at each end of each of the slots of said pairs, the adjacent bores at corresponding ends of each pair being closely adjacent thereby providing a necked down region at the respective end of the link establishing a compliant region; located radially outwardly from each pair of slots in an outer, annular portion of said body, a respective relief slot, said relief slot extending transversely of the respective pair of radial slots and closely adjacent the respective pair of bores at substantially radially outer ends of said slots thereby to provide radial compliance for the respective link; and peripheral slot segments separating said central portion from said outer annular portion between said links.
Claim 2
Dependent Claim
167 words
A unitary flexure stage permitting essentially lossless relative small angle rotation around a central axis, said stage comprising a body of elastic material having therein: three pairs of parallel slots defining three links extending radially with respect to said axis from respective points of attachment to a central portion of said body; cylindrical bores at each end of each of the slots of said pairs, the adjacent bores at corresponding ends of each pair being closely adjacent thereby providing a necked down region at the respective end of the link establishing a compliant region; located radially outwardly from each pair of slots in an outer, annular portion of said body, a respective relief slot, said relief slot extending transversely of the respective pair of radial slots and closely adjacent the respective pair of bores at substantially radially outer ends of said slots thereby to provide radial compliance for the respective link; and peripheral slot segments separating said central portion from said outer annular portion between said links.
Claim 3
Dependent Claim
23 words
A stage as set forth in claim 1 further including a cylindrical bore at each end of each of said transverse relief slots.
Claim 4
Dependent Claim
164 words
A unitary flexure stage permitting essentially lossless relative small angle rotation of a central portion of the stage with respect to an outer, annular portion of the stage around a central axis, said stage comprising a generally flat metal body having therein: three pairs of parallel slots defining three links extending radially with respect to said axis from respective points of attachment to said central portion; at each end of each of said slots, a cylindrical bore, the adjacent bores at corresponding ends of each pair being closely adjacent thereby providing a necked down region at the respective end of the respective link; radially outwardly from the bores at an outer end of each pair of slots, a respective transverse slot in said outer portion passing closely adjacent the respective pair of bores at substantially radially outer ends of said slots providing radial compliance for the respective link; and peripheral slot segments separating said central portion from said outer annular portion between said links.
Claim 5
Dependent Claim
164 words
A unitary flexure stage permitting essentially lossless relative small angle rotation of a central portion of the stage with respect to an outer, annular portion of the stage around a central axis, said stage comprising a generally flat metal body having therein: three pairs of parallel slots defining three links extending radially with respect to said axis from respective points of attachment to said central portion; at each end of each of said slots, a cylindrical bore, the adjacent bores at corresponding ends of each pair being closely adjacent thereby providing a necked down region at the respective end of the respective link; radially outwardly from the bores at an outer end of each pair of slots, a respective transverse slot in said outer portion passing closely adjacent the respective pair of bores at substantially radially outer ends of said slots providing radial compliance for the respective link; and peripheral slot segments separating said central portion from said outer annular portion between said links.
Claim 6
Dependent Claim
13 words
A stage as set forth in claim 3 wherein said metal is aluminum.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-01-27 | 1995-07-29 | 1996-01-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-01-27 | 1999-07-29 | 2000-01-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-01-27 | 2003-07-29 | 2004-01-28 | $7700.00 | Window Closed / Lapsed |