US5096534A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for improving the reactant gas flow in a reaction chamber
Assignee: ASM America Inc
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Filing: 1989-03-28
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Granted: 1992-03-17
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Expires: 2009-03-28
Abstract
Abstract An epitaxial deposition method for processing a single wafer and a reaction chamber for conducting the method. The chamber has a substantially rectangular cross section reduced for increased system efficiency. Because the reduced cross section has insufficient room for a susceptor, the susceptor, in one embodiment, is mounted within a second portion of a dual height chamber having a greater cross sectional area. Purge gas supplied through an aperture in the chamber prevents undesirable deposits beneath the susceptor from reactant gas. The velocity profile and flow of reactant gas beneath the susceptor are controlled, for example, by a quartz plate which narrows and simultaneously shapes the gap between the susceptor and the input end of the chamber. Two types of reactant gas injectors can be used for controlling the velocity profile of injected gases.
Inventors
- 👤 Albert E. Ozias
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 13:16
CPC Classifications
C; C30; C30B; C30B29/00; C30B29/02; C30B29/06; C30B25/00; C30B25/02; C30B25/10
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
288 words
A method for processing a wafer within a reaction chamber, said method comprising in combination: a) receiving and exhausting a reactant gas through an inlet and an outlet, respectively, of the reaction chamber, which reactions chamber includes a bottom panel extending downstream of the inlet and terminating at a terminal edge; b) supporting the wafer upon a susceptor assembly, which susceptor assembly is downstream of the terminal edge of the bottom panel; c) locating the susceptor assembly in a wall disposed proximate the terminal edge of the bottom panel to prevent the susceptor assembly from being in the mainstream of reactant gas flow between the inlet and the outlet; and d) shaping the velocity profile of the flow of reactant gas flowing the supported wafer to assist in carrying out the vapor deposition process more uniformly across the wafer, said step of shaping including the step of providing a varying flow rate of reactant gas through a gap, which gap is defined between the terminal edge and the adjacent susceptor assembly perimeter, and into the well, the gap being of a predetermined width at a central segment of the gap adjacent the susceptor assembly perimeter upstream of the center of the susceptor assembly and increasing in width in opposed directions along the terminal edge, the varying reactant gas flow rate having a first value at the central segment of the gap and ranging along the gap in opposed directions to a second value at the opposed extremities of the gap, whereby the velocity profile of the reactant gas flow laterally across the wafer supported on the susceptor assembly is a function of and modified by the reactant gas flow through the varying width gap upstream of the water.
Claim 2
Independent Claim
288 words
A method for processing a wafer within a reaction chamber, said method comprising in combination: a) receiving and exhausting a reactant gas through an inlet and an outlet, respectively, of the reaction chamber, which reactions chamber includes a bottom panel extending downstream of the inlet and terminating at a terminal edge; b) supporting the wafer upon a susceptor assembly, which susceptor assembly is downstream of the terminal edge of the bottom panel; c) locating the susceptor assembly in a wall disposed proximate the terminal edge of the bottom panel to prevent the susceptor assembly from being in the mainstream of reactant gas flow between the inlet and the outlet; and d) shaping the velocity profile of the flow of reactant gas flowing the supported wafer to assist in carrying out the vapor deposition process more uniformly across the wafer, said step of shaping including the step of providing a varying flow rate of reactant gas through a gap, which gap is defined between the terminal edge and the adjacent susceptor assembly perimeter, and into the well, the gap being of a predetermined width at a central segment of the gap adjacent the susceptor assembly perimeter upstream of the center of the susceptor assembly and increasing in width in opposed directions along the terminal edge, the varying reactant gas flow rate having a first value at the central segment of the gap and ranging along the gap in opposed directions to a second value at the opposed extremities of the gap, whereby the velocity profile of the reactant gas flow laterally across the wafer supported on the susceptor assembly is a function of and modified by the reactant gas flow through the varying width gap upstream of the water.
Claim 3
Dependent Claim
39 words
The method for processing a wafer within a reaction chamber as set forth in claim 1, including the step of increasing the cross sectional area of the reaction chamber downstream of the susceptor assembly by a factor of two.
Claim 4
Dependent Claim
31 words
The method for processing a wafer within a reaction chamber as set forth in claim 2 including the step of accessing the wafer from a location downstream of the susceptor assembly.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-03-17 | 1995-09-16 | 1996-03-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-03-17 | 1999-09-16 | 2000-03-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-03-17 | 2003-09-16 | 2004-03-17 | $7700.00 | Window Closed / Lapsed |