US5108778A
Expired / Lapsed
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Surface treatment method
Assignee: Hitachi Ltd
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Filing: 1990-04-16
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Granted: 1992-04-28
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Expires: 2010-04-16
Abstract
Abstract Disclosed are a surface treatment method and apparatus in which an active species beam that contains active species having translational energy in a range of 0.01-100 eV as at least a partial constituent thereof constructs at least a part of treatment means.
Inventors
- 👤 Keizo Suzuki
- 👤 Susumu Hiraoka
- 👤 Tatsumi Mizutani
- 👤 Shigeru Nishimatsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 11:37
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23F; C23F4/00; C30; C30B; C30B33/00
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
92 words
A surface treatment method comprising the steps of heating gases which contain first species and second species differing in mass from said first species, and spurting the heated gases into vacuum and causing said first species to collide with said second species, thereby to change translational energy of said second species, whereby said second species are formed into a species beam whose translational energy is greater than 1 eV and not more than 100 eV, and irradiating a sample with said species beam so as to treat a surface of said sample.
Claim 2
Dependent Claim
92 words
A surface treatment method comprising the steps of heating gases which contain first species and second species differing in mass from said first species, and spurting the heated gases into vacuum and causing said first species to collide with said second species, thereby to change translational energy of said second species, whereby said second species are formed into a species beam whose translational energy is greater than 1 eV and not more than 100 eV, and irradiating a sample with said species beam so as to treat a surface of said sample.
Claim 3
Dependent Claim
24 words
A surface treatment method according to claim 1, wherein said first species are chemically inactive species, and said second species are electrically neutral species.
Claim 4
Dependent Claim
33 words
A surface treatment method according to claim 1, wherein said second species are greater in mass than said first species, and the translational energy of said second species is increased by the collisions.
Claim 5
Dependent Claim
36 words
A surface treatment method according to claim 1, wherein the translational energy of said species beam is controlled by changing a ratio between the mass of said first species and the mass of said second species.
Claim 6
Dependent Claim
24 words
A surface treatment method according to claim 4, wherein vibrational energy of said species beam is controlled by controlling a temperature of the heating.
Claim 7
Dependent Claim
20 words
A surface treatment method according to claim 1, wherein the gas formed of said first species is a rare gas.
Claim 8
Dependent Claim
19 words
A surface treatment method according to claim 1, wherein said second species are species which contain a halogen element.
Claim 9
Dependent Claim
19 words
A surface treatment method according to claim 1, wherein said second species are species which contain the hydrogen element.
Claim 10
Dependent Claim
19 words
A surface treatment method according to claim 1, wherein said second species are species which contain the oxygen element.
Claim 11
Dependent Claim
19 words
A surface treatment method according to claim 1, wherein said second species are species which contain the nitrogen element.
Claim 12
Dependent Claim
40 words
A surface treatment method according to claim 1, wherein a gas containing said second species is mixed into a gas containing said first species not earlier than a time immediately before the spurt of said gas containing said first species.
Claim 13
Dependent Claim
20 words
A surface treatment method according to claim 11, wherein said second species removes substances of said surface of said sample.
Claim 14
Dependent Claim
23 words
A surface treatment method according to claim 11, wherein a component of said second species is deposited on said surface of said sample.
Claim 15
Dependent Claim
23 words
A surface treatment method according to claim 11, wherein said second species chemically reacts with a substance of said surface of said sample.
Claim 16
Dependent Claim
16 words
A surface treatment method according to claim 14, wherein said surface of said sample undergoes oxidation.
Claim 17
Dependent Claim
16 words
A surface treatment method according to claim 14, wherein said surface of said sample undergoes nitridation.
Claim 18
Dependent Claim
120 words
A surface treatment method comprising the steps of heating a first species of gas, spurting said first species of gas into vacuum, mixing a second species of gas into said first gas at a time which is not earlier than a time immediately before the spurt of said first species of gas and thus causing said first species of gas and said second species of gas to collide, thereby to form said second species of gas into an activated gas beam which contains activated second species of gas whose translational energy is greater than 1 eV and not more than 100 eV, and irradiating a sample with said activated gas beam so as to treat a surface of said sample.
Claim 19
Dependent Claim
120 words
A surface treatment method comprising the steps of heating a first species of gas, spurting said first species of gas into vacuum, mixing a second species of gas into said first gas at a time which is not earlier than a time immediately before the spurt of said first species of gas and thus causing said first species of gas and said second species of gas to collide, thereby to form said second species of gas into an activated gas beam which contains activated second species of gas whose translational energy is greater than 1 eV and not more than 100 eV, and irradiating a sample with said activated gas beam so as to treat a surface of said sample.
Claim 20
Dependent Claim
16 words
A surface treatment method according to claim 17, wherein said first gas is a rare gas.
Claim 21
Dependent Claim
20 words
A surface treatment method according to claim 17, wherein said second gas is composed of species containing a halogen element.
Claim 22
Dependent Claim
20 words
A surface treatment method according to claim 17, wherein said second gas is composed of species containing the hydrogen element.
Claim 23
Dependent Claim
20 words
A surface treatment method according to claim 17, wherein said second gas is composed of species containing the oxygen element.
Claim 24
Dependent Claim
20 words
A surface treatment method according to claim 17, wherein said second gas is composed of species containing the nitrogen element.
Claim 25
Dependent Claim
37 words
A surface treatment method according to claim 17, wherein said second species of gas is mixed into said heated first species of gas at a time immediately before the spurting of said heated first species of gas.
Claim 26
Dependent Claim
36 words
A surface treatment method according to claim 17, wherein said second species of gas is mixed into said heated first species of gas at a time amidst the spurting of said heated first species of gas.
Claim 27
Dependent Claim
37 words
A surface treatment method according to claim 17, wherein said second species of gas is mixed into said heated first species of gas at a time immediately after the spurting of said heated first species of gas.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1995-04-28 | 1995-10-28 | 1996-04-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-04-28 | 1999-10-28 | 2000-04-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-04-28 | 2003-10-28 | 2004-04-28 | $7700.00 | Window Closed / Lapsed |