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US5113203A Expired / Lapsed US ⏱️ 0.0 years remaining

Liquid jet head, substrate for said head and liquid jet apparatus having said head

Assignee: Canon Inc
•
Filing: 1991-08-06
•
Granted: 1992-05-12
•
Expires: 2011-08-06
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Abstract

Abstract A liquid jet head comprises, an electrothermal transducer having a heat-generating resistor formed using an amorphous alloy containing at least one selected from the group consisting of Ti, Zn, Hf, Nb, Ta and W as well as Fe, Ni and Cr, and a pair of electrodes connected electrically to said heat-generating resistor, a support for supporting said electrothermal transducer and a liquid path formed on said support corresponding to the heat generating portion of said electrothermal transducer formed between said pair of electrodes and communicated to a discharge opening for discharging ink.

Inventors

  • 👤 Hiroshi Takagi
  • 👤 Atsushi Shiozaki

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 21:34
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/14; B41J2/14016; B41J2/14088; B41J2/14112; B41J2/14129; B41J2002/14379; B41J2202/00; B41J2202/01; B41J2202/03

Claims Analysis

Total Claims: 128
Claim 1
Independent Claim 126 words
An ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed by said heat generating resistor between said pair of electrodes wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and x is 10-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 2
Dependent Claim 126 words
An ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed by said heat generating resistor between said pair of electrodes wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and x is 10-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 3
Dependent Claim 38 words
An ink jet head according to claim 1, wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and x is 20-70.
Claim 4
Dependent Claim 24 words
An ink jet head according to claim 1, wherein said amorphous alloy is Ta 50 (Fe 73 Ni 10 Cr 17 ) 50 .
Claim 5
Dependent Claim 24 words
An ink jet head according to claim 1, wherein said amorphous alloy is Ti 25 (Fe 73 Ni 10 Cr 17 ) 75 .
Claim 6
Dependent Claim 24 words
An ink jet head according to claim 1, wherein said amorphous alloy is Zr 28 (Fe 73 Ni 10 Cr 17 ) 72 .
Claim 7
Dependent Claim 24 words
An ink jet head according to claim 1, wherein said amorphous alloy is Hf 28 (Fe 73 Ni 10 Cr 17 ) 72 .
Claim 8
Dependent Claim 24 words
An ink jet heat according to claim 1, wherein said amorphous alloy is Nb 56 (Fe 68 Ni 11 Cr 21 ) 44 .
Claim 9
Dependent Claim 24 words
An ink jet head according to claim 1, wherein said amorphous alloy is W 31 (Fe 68 N 11 Cr 21 ) 69 .
Claim 10
Dependent Claim 26 words
An ink jet head according to claim 1, wherein said amorphous alloy is Ta 32 Ti 18 (Fe 73 Ni 10 Cr 17 ) 50 .
Claim 11
Dependent Claim 26 words
An ink jet head according to claim 1, wherein said amorphous alloy is Nb 28 Zr 20 (Fe 73 Ni 10 Cr 17 ) 52 .
Claim 12
Dependent Claim 26 words
An ink jet head according to claim 1, wherein said amorphous alloy is Hf 35 W 22 (Fe 73 Ni 10 Cr 17 ) 43 .
Claim 13
Dependent Claim 28 words
An ink jet head according to claim 1, wherein said amorphous alloy is Ta 40 Ti 13 Nb 11 (Fe 73 Ni 10 Cr 17 ) 36 .
Claim 14
Dependent Claim 19 words
An ink jet head according to claim 1, wherein the specific resistance of said heat-generating resistor is 150-300 μohm.cm.
Claim 15
Dependent Claim 20 words
An ink jet head according to claim 1, wherein said heat-generating resistor is formed between said support and said electrode.
Claim 16
Dependent Claim 20 words
An ink jet head according to claim 1, wherein said electrode is formed between said support and said heat-generating resistor.
Claim 17
Dependent Claim 19 words
An ink jet head according to claim 1, wherein said electrothermal transducer generates heat energy used for discharging liquid.
Claim 18
Dependent Claim 31 words
An ink jet head according to claim 1, wherein the direction of liquid discharge from said discharge opening is substantially same as the direction of ink supply to said heat-generating portion.
Claim 19
Dependent Claim 30 words
An ink jet head according to claim 1, wherein the direction of liquid discharge from said discharge opening is different from the direction of ink supply to said heat-generating portion.
Claim 20
Dependent Claim 16 words
An ink jet head according to claim 18, wherein said two directions form substantially right angle.
Claim 21
Dependent Claim 18 words
An ink jet head according to claim 1, wherein said discharge opening is provided in a plural number.
Claim 22
Dependent Claim 25 words
An ink jet head according to claim 1, wherein said discharge opening is provided in a plural number corresponding to the width of recording medium.
Claim 23
Dependent Claim 31 words
An ink jet head according to claim 1, wherein the member for forming said liquid path on said support is a covering member having a groove for forming said liquid path.
Claim 24
Dependent Claim 39 words
An ink jet head according to claim 1, wherein the member for forming said liquid path on said support comprises a wall-forming member forming the wall of said liquid path and a top plate bonded to said wall-forming member.
Claim 25
Dependent Claim 18 words
An ink jet head according to claim 23, wherein said wall-forming member is formed using a photosensitive resin.
Claim 26
Dependent Claim 18 words
An ink jet head according to claim 1, wherein said protective layer is formed on said electrothermal transducer.
Claim 27
Dependent Claim 20 words
An ink jet head according to claim 25, wherein said protective layer is formed by use of SiO 2 .
Claim 28
Dependent Claim 18 words
An ink jet head according to claim 25, wherein said protective layer is formed by use of SiN.
Claim 29
Dependent Claim 126 words
An ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and y is 5-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 30
Dependent Claim 126 words
An ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and y is 5-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 31
Dependent Claim 126 words
An ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and z is 10-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 32
Dependent Claim 126 words
An ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and z is 10-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 33
Dependent Claim 85 words
An ink jet head substrate comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and x is 10-70; and a support for said electrothermal transducer.
Claim 34
Dependent Claim 85 words
An ink jet head substrate comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and x is 10-70; and a support for said electrothermal transducer.
Claim 35
Dependent Claim 40 words
A substrate for ink jet head according to claim 30, wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W and x is 20-70.
Claim 36
Dependent Claim 26 words
A substrate for ink jet head according to claim 30, wherein said amorphous alloy is Ta 50 (Fe 73 Ni 10 Cr 17 ) 50 .
Claim 37
Dependent Claim 26 words
A substrate for ink jet head according to claim 30, wherein said amorphous alloy is Ti 25 (Fe 73 Ni 10 Cr 17 ) 75 .
Claim 38
Dependent Claim 26 words
A substrate for ink jet head according to claim 30, wherein said amorphous alloy is Zr 28 (Fe 73 Ni 10 Cr 17 ) 72 .
Claim 39
Dependent Claim 26 words
A substrate for ink jet head according to claim 30, wherein said amorphous alloy is Hf 28 (Fe 73 Ni 10 Cr 17 ) 72 .
Claim 40
Dependent Claim 26 words
A substrate for ink jet head according to claim 30, wherein said amorphous alloy is Nb 56 (Fe 68 Ni 11 Cr 21 ) 44 .
Claim 41
Dependent Claim 26 words
A substrate for ink jet head according to claim 30, wherein said amorphous alloy is W 31 (Fe 68 Ni 11 Cr 21 ) 69 .
Claim 42
Dependent Claim 28 words
A substrate for ink jet head according to claim 30, wherein said amorphous alloy is Ta 32 Ti 18 (Fe 73 Ni 10 Cr 17 ) 50 .
Claim 43
Dependent Claim 28 words
A substrate for ink jet head according to claim 30, wherein said amorphous alloy is Nb 28 Zr 20 (Fe 73 Ni 10 Cr 17 ) 52 .
Claim 44
Dependent Claim 28 words
A substrate for ink jet head according to claim 30, wherein said amorphous alloy is Hf 35 W 22 (Fe 73 Ni 10 Cr 17 ) 43 .
Claim 45
Dependent Claim 30 words
A substrate for ink jet head according to claim 30, wherein said amorphous alloy is Ta 40 Ti 13 Nb 11 (Fe 73 N 10 Cr 17 ) 36 .
Claim 46
Dependent Claim 21 words
A substrate for ink jet head according to claim 30, wherein the specific resistance of said amorphous alloy is 150˜300 μohm.cm.
Claim 47
Dependent Claim 22 words
A substrate for ink jet head according to claim 30, wherein said heat-generating resistor is formed between said support and said electrode.
Claim 48
Dependent Claim 22 words
A substrate for ink jet head according to claim 30, wherein said electrode is formed between said support and said heat-generating resistor.
Claim 49
Dependent Claim 20 words
A substrate for ink jet head according to claim 30, wherein said protective layer is formed on said electrothermal transducer.
Claim 50
Dependent Claim 22 words
A substrate for ink jet head according to claim 45, wherein said protective layer is formed by use of SiO 2 .
Claim 51
Dependent Claim 20 words
A substrate for ink jet head according to claim 45, wherein said protective layer is formed by use of SiN.
Claim 52
Dependent Claim 85 words
An ink jet head substrate comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and y is 5-30; and a support for said electrothermal transducer.
Claim 53
Dependent Claim 85 words
An ink jet head substrate comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and y is 5-30; and a support for said electrothermal transducer.
Claim 54
Dependent Claim 85 words
An ink jet head substrate comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and z is 10-30; and a support for said electrothermal transducer.
Claim 55
Dependent Claim 85 words
An ink jet head substrate comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and z is 10-30; and a support for said electrothermal transducer.
Claim 56
Dependent Claim 135 words
An ink jet apparatus comprising an ink jet head, said ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and x is 10-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 57
Dependent Claim 135 words
An ink jet apparatus comprising an ink jet head, said ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and x is 10-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 58
Dependent Claim 13 words
An ink jet apparatus according to claim 50, further comprising a power switch.
Claim 59
Dependent Claim 130 words
An ink jet apparatus comprising ink jet head, said ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, said heat generating portion being formed between said pair of electrodes wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and y is 5-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 60
Dependent Claim 130 words
An ink jet apparatus comprising ink jet head, said ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, said heat generating portion being formed between said pair of electrodes wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and y is 5-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 61
Dependent Claim 13 words
An ink jet apparatus according to claim 52, further comprising a power switch.
Claim 62
Dependent Claim 143 words
An ink jet apparatus comprising an ink jet head, said ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat generating resistor being formed in said heat generating resistor said pair of electrodes wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and z is 10-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path being formed between said pair of electrodes and communicating with a discharge opening for discharging liquid.
Claim 63
Dependent Claim 143 words
An ink jet apparatus comprising an ink jet head, said ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an amorphous alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat generating resistor being formed in said heat generating resistor said pair of electrodes wherein said amorphous alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and z is 10-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path being formed between said pair of electrodes and communicating with a discharge opening for discharging liquid.
Claim 64
Dependent Claim 13 words
An ink jet apparatus according to claim 54, further comprising a power switch.
Claim 65
Dependent Claim 18 words
An ink jet head according to claim 54, wherein said protective layer is formed on said electrothermal transducer.
Claim 66
Dependent Claim 20 words
An ink jet head according to claim 56, wherein said protective layer is formed by use of SiO 2 .
Claim 67
Dependent Claim 18 words
An ink jet head according to claim 56, wherein said protective layer is formed by use of SiN.
Claim 68
Dependent Claim 124 words
An ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and x is 10-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 69
Dependent Claim 124 words
An ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and x is 10-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 70
Dependent Claim 37 words
An ink jet head according to claim 59, wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and x is 20-70.
Claim 71
Dependent Claim 23 words
An ink jet head according to claim 59, wherein said alloy is Ta 50 (Fe 73 Ni 10 Cr 17 ) 50 .
Claim 72
Dependent Claim 23 words
An ink jet head according to claim 59, wherein said alloy is Ti 25 (Fe 73 Ni 10 Cr 17 ) 75 .
Claim 73
Dependent Claim 23 words
An ink jet head according to claim 59, wherein said alloy is Zr 28 (Fe 73 Ni 10 Cr 17 ) 72 .
Claim 74
Dependent Claim 23 words
An ink jet head according to claim 59, wherein said alloy is Hf 28 (Fe 73 Ni 10 Cr 17 ) 72 .
Claim 75
Dependent Claim 23 words
An ink jet head according to claim 59, wherein said alloy is Nb 56 (Fe 68 Ni 11 Cr 21 ) 44 .
Claim 76
Dependent Claim 23 words
An ink jet head according to claim 59, wherein said alloy is W 31 (Fe 68 Ni 11 Cr 21 ) 69 .
Claim 77
Dependent Claim 25 words
An ink jet head according to claim 59, wherein said alloy is Ta 32 Ti 18 (Fe 73 Ni 10 Cr 17 ) 50 .
Claim 78
Dependent Claim 25 words
An ink jet head according to claim 59, wherein said alloy is Nb 28 Zr 20 (Fe 73 Ni 10 Cr 17 ) 52 .
Claim 79
Dependent Claim 25 words
An ink jet head according to claim 59, wherein said alloy is Hf 35 W 22 (Fe 73 Ni 10 Cr 17 ) 43 .
Claim 80
Dependent Claim 27 words
An ink jet head according to claim 59, wherein said alloy is Ta 40 Ti 13 Nb 11 (Fe 73 Ni 10 Cr 17 ) 36 .
Claim 81
Dependent Claim 19 words
An ink jet head according to claim 59, wherein the specific resistance of said heat-generating resistor is 150-300 μohm.cm.
Claim 82
Dependent Claim 20 words
An ink jet head according to claim 59, wherein said heat-generating resistor is formed between said support and said electrode.
Claim 83
Dependent Claim 20 words
An ink jet head according to claim 59, wherein said electrode is formed between said support and said heat-generating resistor.
Claim 84
Dependent Claim 19 words
An ink jet head according to claim 59, wherein said electrothermal transducer generates heat energy used for discharging liquid.
Claim 85
Dependent Claim 31 words
An ink jet head according to claim 59, wherein the direction of liquid discharge from said discharge opening is substantially same as the direction of ink supply to said heat-generating portion.
Claim 86
Dependent Claim 30 words
An ink jet head according to claim 59, wherein the direction of liquid discharge from said discharge opening is different from the direction of ink supply to said heat-generating portion.
Claim 87
Dependent Claim 16 words
An ink jet head according to claim 76, wherein said two direction form substantially right angle.
Claim 88
Dependent Claim 18 words
An ink jet head according to claim 59, wherein said discharge opening is provided in a plural number.
Claim 89
Dependent Claim 25 words
An ink jet head according to claim 59, wherein said discharge opening is provided in a plurality number corresponding to the width of recording medium.
Claim 90
Dependent Claim 31 words
An ink jet head according to claim 59, wherein the member for forming said liquid path on said support is a covering member having a groove for forming said liquid path.
Claim 91
Dependent Claim 39 words
An ink jet head according to claim 59, wherein the member for forming said liquid path on said support comprises a wall-forming member forming the wall of said liquid path and a top plate bonded to said wall-forming member.
Claim 92
Dependent Claim 18 words
An ink jet head according to claim 81, wherein said wall-forming member is formed using a photosensitive resin.
Claim 93
Dependent Claim 20 words
A substrate for ink jet head according to claim 59, wherein said protective layer is formed by use of SiN.
Claim 94
Dependent Claim 124 words
An ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and y is 5-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 95
Dependent Claim 124 words
An ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and y is 5-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 96
Dependent Claim 124 words
An ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and z is 10-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 97
Dependent Claim 124 words
An ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and z is 10-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 98
Dependent Claim 83 words
An ink jet head substrate comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and x is 10-70; and a support for said electrothermal transducer.
Claim 99
Dependent Claim 83 words
An ink jet head substrate comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and x is 10-70; and a support for said electrothermal transducer.
Claim 100
Dependent Claim 39 words
A substrate for liquid jet head according to claim 86, wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W and x is 20-70.
Claim 101
Dependent Claim 25 words
A substrate for ink jet head according to claim 86, wherein said alloy is Ta 50 (Fe 73 Ni 10 Cr 17 ) 50 .
Claim 102
Dependent Claim 25 words
A substrate for ink jet head according to claim 86, wherein said alloy is Ti 25 (Fe 73 Ni 10 Cr 17 ) 75 .
Claim 103
Dependent Claim 25 words
A substrate for ink jet head according to claim 86, wherein said alloy is Zr 28 (Fe 73 Ni 10 Cr 17 ) 72 .
Claim 104
Dependent Claim 25 words
A substrate for ink jet head according to claim 86, wherein said alloy is Hf 28 (Fe 73 Ni 10 Cr 17 ) 72 .
Claim 105
Dependent Claim 25 words
A substrate for ink jet head according to claim 86, wherein said alloy is Nb 56 (Fe 68 Ni 11 Cr 21 ) 44 .
Claim 106
Dependent Claim 25 words
A substrate for ink jet head according to claim 86, wherein said alloy is W 31 (Fe 68 Ni 11 Cr 21 ) 69 .
Claim 107
Dependent Claim 27 words
A substrate for ink jet head according to claim 86, wherein said alloy is Ta 32 Ti 18 (Fe 73 Ni 10 Cr 17 ) 50 .
Claim 108
Dependent Claim 27 words
A substrate for ink jet head according to claim 86, wherein said alloy is Nb 28 Zr 20 (Fe 73 Ni 10 Cr 17 ) 52 .
Claim 109
Dependent Claim 27 words
A substrate for ink jet head according to claim 86, wherein said alloy is Hf 35 W 22 (Fe 73 Ni 10 Cr 17 ) 43 .
Claim 110
Dependent Claim 29 words
A substrate for ink jet head according to claim 86, wherein said alloy is Ta 40 Ti 13 Nb 11 (Fe 73 Ni 10 Cr 17 ) 36 .
Claim 111
Dependent Claim 20 words
A substrate for ink jet head according to claim 86, wherein the specific resistance of said alloy is 150˜300 μohm.cm.
Claim 112
Dependent Claim 22 words
A substrate for ink jet head according to claim 86, wherein said heat-generating resistor is formed between said support and said electrode.
Claim 113
Dependent Claim 22 words
A substrate for ink jet head according to claim 86, wherein said electrode is formed between said support and said heat-generating resistor.
Claim 114
Dependent Claim 20 words
A substrate for ink jet head according to claim 86, wherein said protective layer is formed on said electrothermal transducer.
Claim 115
Dependent Claim 22 words
A substrate for ink jet head according to claim 101, wherein said protective layer is formed by use of SiO 2 .
Claim 116
Dependent Claim 83 words
An ink jet head substrate comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and y is 5-30; and a support for said electrothermal transducer.
Claim 117
Dependent Claim 83 words
An ink jet head substrate comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and y is 5-30; and a support for said electrothermal transducer.
Claim 118
Dependent Claim 83 words
An ink jet head substrate comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and z is 10-30; and a support for said electrothermal transducer.
Claim 119
Dependent Claim 83 words
An ink jet head substrate comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and z is 10-30; and a support for said electrothermal transducer.
Claim 120
Dependent Claim 133 words
An ink jet apparatus comprising an ink jet head, said ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and x is 10-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 121
Dependent Claim 133 words
An ink jet apparatus comprising an ink jet head, said ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and x is 10-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 122
Dependent Claim 13 words
An ink jet apparatus according to claim 105, further comprising a power switch.
Claim 123
Dependent Claim 132 words
An ink jet apparatus comprising ink jet head, said ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and y is 5-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 124
Dependent Claim 132 words
An ink jet apparatus comprising ink jet head, said ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and y is 5-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 125
Dependent Claim 13 words
An ink jet apparatus according to claim 107, further comprising a power switch.
Claim 126
Dependent Claim 133 words
An ink jet apparatus comprising an ink jet head, said ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and z is 10-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 127
Dependent Claim 133 words
An ink jet apparatus comprising an ink jet head, said ink jet head comprising: an electrothermal transducer having a heat-generating resistor of an alloy containing at least one selected from the group consisting of Ti, Zr, Hf, Nb, Ta, W, Fe, Ni and Cr and a pair of electrodes connected electrically to said heat-generating resistor, a heat-generating portion being formed in said heat generating resistor between said pair of electrodes wherein said alloy is represented by M.sub.x (Fe.sub.100-y-z Ni.sub.y Cr.sub.z).sub.100-x wherein M is at least one selected from Ti, Zr, Hf, Nb, Ta and W, and z is 10-30; a support for said electrothermal transducer; and a liquid path formed on said support corresponding to the heat-generating portion of said electrothermal transducer, said liquid path communicating with a discharge opening for discharging liquid.
Claim 128
Dependent Claim 13 words
An ink jet apparatus according to claim 109, further comprising a power switch.

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