US5138169A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for irradiating low-energy electrons
Assignee: Toshiba Corp
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Filing: 1991-07-26
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Granted: 1992-08-11
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Expires: 2011-07-26
Abstract
Abstract There is disclosed a method of irradiating low-energy electrons that has the steps of irradiating a primary electron beam from a primary electron beam irradiation portion onto a secondary electron emission portion to emit a secondary electron beam, accelerating the emitted secondary electron beam, removing high-energy components from that accelerated secondary beam, and decelerating the secondary electron beam without the high-energy components into a focus. And there is also disclosed an apparatus for irradiating low-energy electron that has a primary electron beam irradiating section, a secondary electron emitting section which receives the primary electron beam and emits a secondary electron beam, a secondary electron beam accelerating section, energy analyzing section which removes high-energy components from the accelerated secondary electron beam, to obtain low-energy secondary electrons, and deceleration section for decelerating the low-energy secondary electrons into a focus.
Inventors
- 👤 Yuichiro Yamazaki
- 👤 Motosuke Miyoshi
- 👤 Katsuya Okumura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 22:41
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/05; H01J37/026; H01J37/06; H01J37/073
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
61 words
A method of irradiating low-energy electrons comprising the steps of: irradiating a primary electron beam from a primary electron beam irradiation portion onto a secondary electron emission portion to emit a secondary electron beam; accelerating said emitted secondary electron beam; removing high-energy components from said accelerated secondary beam; and decelerating said secondary electron beam without said high-energy components into a focus.
Claim 2
Independent Claim
61 words
A method of irradiating low-energy electrons comprising the steps of: irradiating a primary electron beam from a primary electron beam irradiation portion onto a secondary electron emission portion to emit a secondary electron beam; accelerating said emitted secondary electron beam; removing high-energy components from said accelerated secondary beam; and decelerating said secondary electron beam without said high-energy components into a focus.
Claim 3
Dependent Claim
45 words
A method of irradiating low-energy electrons according to claim 1, wherein the method further comprises a step of controlling the energy distribution of said low-energy beam by varying a voltage applied to said secondary electron emission portion or means for decelerating said secondary electron beam.
Claim 4
Dependent Claim
26 words
The method of irradiating low-energy electrons according to claim 1, wherein said low-energy electrons are irradiated onto a charged sample in order to relieve the charge.
Claim 5
Dependent Claim
28 words
The method of irradiating low-energy electrons according to claim 1, wherein negative ions are formed by irradiating said low-energy electrons onto atoms or molecules in the radical state.
Claim 6
Independent Claim
80 words
An apparatus for irradiating low-energy electrons, comprising: means for irradiating a primary electron beam; means for emitting a secondary electron, said means receiving a primary electron beam generated from said means for irradiating a primary electron beam and emitting a secondary electron beam; means for accelerating said secondary electron beam; energy analyzing means which removes high-energy components from said accelerated secondary electron beam, to obtain low-energy secondary electrons; and deceleration means for decelerating said low-energy secondary electrons into a focus.
Claim 7
Independent Claim
80 words
An apparatus for irradiating low-energy electrons, comprising: means for irradiating a primary electron beam; means for emitting a secondary electron, said means receiving a primary electron beam generated from said means for irradiating a primary electron beam and emitting a secondary electron beam; means for accelerating said secondary electron beam; energy analyzing means which removes high-energy components from said accelerated secondary electron beam, to obtain low-energy secondary electrons; and deceleration means for decelerating said low-energy secondary electrons into a focus.
Claim 8
Dependent Claim
32 words
The apparatus for irradiating low-energy electrons according to claim 5, wherein said means for emitting secondary electron or said means for decelerating means is provided with a variable bias application power source.
Claim 9
Dependent Claim
31 words
The apparatus for irradiating low-energy electrons according to claim 5, wherein a surface of said means for emitting secondary electron is inclined to the optical axis of said primary electron beam.
Claim 10
Dependent Claim
27 words
The apparatus for irradiating low-energy electrons according to claim 5, wherein said energy analyzing means is provided with an energy filter using a parallel flat-plate energy analyzer.
Claim 11
Dependent Claim
27 words
The apparatus for irradiating low-energy electrons according to claim 5, wherein said energy analyzing means is provided with an energy filter using a cylindrical mirror energy analyzer.
Claim 12
Dependent Claim
27 words
The apparatus for irradiating low-energy electrons according to claim 5, wherein said energy analyzing means is provided with an energy filter using a sector magnetic field analyzer.
Claim 13
Dependent Claim
45 words
The apparatus for irradiating low-energy electrons according to claim 5, wherein said means for accelerating said secondary electron is provided with an extraction electrode for the purpose of further focusing said secondary electrons on a side opposite to that of said secondary electron emission portion.
Claim 14
Dependent Claim
20 words
The apparatus for irradiating low-energy electrons according to claim 5, wherein said deceleration means is a series of deceleration lenses.
Claim 15
Dependent Claim
55 words
The apparatus for irradiating low-energy electrons according to claim 12, wherein said series of deceleration lenses comprises a first electrode maintained at a specific potential in order to provide a drift region with respect to said low-energy electrons, and a second electrode provided to decelerate said low-energy electrons that have passed through said first electrode.
Claim 16
Dependent Claim
39 words
The apparatus device for irradiating low-energy electrons according to claim 5, wherein said secondary electron beam is controlled by a difference between a voltage applied to said secondary electron emission portion and a voltage applied to said deceleration lens.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-08-11 | 1996-02-10 | 1996-08-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-08-11 | 2000-02-10 | 2000-08-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-08-11 | 2004-02-10 | 2004-08-11 | $7700.00 | Window Closed / Lapsed |