US5139825A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for chemical vapor deposition of transition metal nitrides
Assignee: Harvard University
•
Filing: 1989-11-30
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Granted: 1992-08-18
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Expires: 2009-11-30
Abstract
Abstract A process for depositing a thin film of a transition metal nitride, e.g., titanium nitride, on a substrate is provided. The vapors of a transition metal organometallic coompound or a transition metal amido compound are mixed with ammonia gas and allowed to react near a substrate heated to a temperature in the range of 100° C. to 400° C., resulting in deposition of a film on the substrate.
Inventors
- 👤 Roy G. Gordon
- 👤 Renaud Fix
- 👤 David Hoffman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 14:41
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/34
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
58 words
A process for making a transition metal nitride coating comprising: forming a vaporous mixture of ammonia gas and a vapor of transition metal amido compound; and exposing said vaporous mixture to a substrate, said substrate heated to a temperature in the range of 100° C. to 400° C., to deposit a transition metal nitride coating on said substrate.
Claim 2
Dependent Claim
58 words
A process for making a transition metal nitride coating comprising: forming a vaporous mixture of ammonia gas and a vapor of transition metal amido compound; and exposing said vaporous mixture to a substrate, said substrate heated to a temperature in the range of 100° C. to 400° C., to deposit a transition metal nitride coating on said substrate.
Claim 3
Dependent Claim
24 words
The process of claim 1 wherein said transition metal is a transition metal selected from a group consisting of titanium, zirconium, hafnium or vanadium.
Claim 4
Dependent Claim
16 words
The process of claim 1 wherein said transition metal amido compound includes a dialkylamide functional group.
Claim 5
Dependent Claim
15 words
The process of claim 3 wherein said dialkylamide functional group includes a dimethylamide functional group.
Claim 6
Dependent Claim
18 words
The process of claim 3 wherein said dialkylamide functional group is replaced by a cyclic amide functional group.
Claim 7
Dependent Claim
25 words
The process of claim 5 wherein said cyclic amido group is a cyclic amido group selected from a group consisting of piperidino or pyrolidino groups.
Claim 8
Dependent Claim
17 words
The process of claim 3 wherein said dialkylamide functional group is replaced by an alkyl functional group.
Claim 9
Dependent Claim
16 words
The process of claim 2 wherein said transition metal amido compound includes a tertiary butyl group.
Claim 10
Dependent Claim
32 words
The process of claim 1 wherein said ammonia gas and said transition metal compound are individually diluted with an inert carrier gas before they are combined in close proximity to said substrate.
Claim 11
Dependent Claim
23 words
The process of claim 9 wherein said inert carrier gas is a gas selected from the group consisting of helium, argon, or neon.
Claim 12
Dependent Claim
22 words
The process of claim 2 wherein said substrate is heated to a temperature in the range of 150° C. to 300° C.
Claim 13
Dependent Claim
21 words
The process of claim 2 wherein said substrate is heated to a temperature in the range 200° C. to 250° C.
Claim 14
Dependent Claim
16 words
The process of claim 2 wherein said substrate is silicon, vitreous carbon, glass, steel, or polyester.
Claim 15
Dependent Claim
15 words
The process of claim 2 wherein said transition metal amido compound is tetrakis (dimethylamido) titanium.
Claim 16
Dependent Claim
13 words
Process of claim 2 wherein said process is operated at a reduced pressure.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-08-18 | 1996-02-17 | 1996-08-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-08-18 | 2000-02-17 | 2000-08-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-08-18 | 2004-02-17 | 2004-08-18 | $7700.00 | Window Closed / Lapsed |