US5159946A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Over-flow tank for a semiconductor wafer washing apparatus
Assignee: Individual
•
Filing: 1990-05-02
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Granted: 1992-11-03
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Expires: 2010-05-02
Abstract
Abstract An over-flow tank for a semiconductor wafer washing apparatus includes a pair of opposed extensions integrally formed on a pair of opposed side walls of the tank. One of the extensions is provided with pipes and/or other devices. This form of attachment prevents formation of a stepped portion on which dust may accumulate. The extensions also act to guide the flow of clean air over the tanks, so that vapor formed in a chemical liquid tank in one row of such tanks is prevented from entering a pure water tank in an adjacent row.
Inventors
- 👤 Aigo Seiichiro
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 14:10
CPC Classifications
H; H10; H10P; H10P70/00; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0416; Y; Y10; Y10S; Y10S134/00; Y10S134/902; Y10T; Y10T137/00; Y10T137/8593; Y10T137/86187; Y10T137/86212; Y10T137/86348; Y10T137/86372
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
161 words
An over-flow tank for use in a semiconductor wafer washing apparatus wherein clean air is forced over the tank to remove vapor formed therein, said over-flow tank comprising: a bottom surface; a first pair of opposed side walls having a first height; a second pair of opposed side walls having the first height, wherein said bottom surface, said first pair of opposed side walls, and said second pair of opposed side walls define a cavity; means for guiding the clean air over the over-flow tank in a direction parallel to said first pair of opposed side walls, said means comprising a pair of vertical extensions formed integrally and coplanar with said first pair of opposed side walls and each extending to a height greater than said first height; and at least one washing tank disposed within said cavity and formed integrally with said bottom surface, wherein said at least one washing tank has a height no greater than said first height.
Claim 2
Dependent Claim
161 words
An over-flow tank for use in a semiconductor wafer washing apparatus wherein clean air is forced over the tank to remove vapor formed therein, said over-flow tank comprising: a bottom surface; a first pair of opposed side walls having a first height; a second pair of opposed side walls having the first height, wherein said bottom surface, said first pair of opposed side walls, and said second pair of opposed side walls define a cavity; means for guiding the clean air over the over-flow tank in a direction parallel to said first pair of opposed side walls, said means comprising a pair of vertical extensions formed integrally and coplanar with said first pair of opposed side walls and each extending to a height greater than said first height; and at least one washing tank disposed within said cavity and formed integrally with said bottom surface, wherein said at least one washing tank has a height no greater than said first height.
Claim 3
Dependent Claim
24 words
An over-flow tank as claimed in claim 1, wherein said pair of vertical extensions both have a second height greater than said first height.
Claim 4
Dependent Claim
28 words
An over-flow tank as claimed in claim 1, wherein one of said pair of vertical extensions is adapted to be provided with hardware including pipes and monitoring devices.
Claim 5
Dependent Claim
16 words
An over-flow tank as claimed in claim 1, wherein said washing tank is made of fluororesin.
Claim 6
Dependent Claim
16 words
An over-flow tank as claimed in claim 1, wherein said washing tank is made of quartz.
Claim 7
Dependent Claim
181 words
A semiconductor wafer washing apparatus adapted to be placed in a clean room having means for forcing clean air onto the washing apparatus, said washing apparatus comprising a plurality of overflow tanks disposed in plural rows, wherein each of the overflow tanks comprises: a bottom surface; a first pair of opposed side walls having a first height; a second pair of opposed side walls having the first height, wherein said bottom surface, said first pair of opposed side walls, and said second pair of opposed side walls define a cavity adapted to hold a washing tank; and means for guiding the clean air over the over-flow tank in a direction parallel to said first pair of opposed side walls, said means comprising a pair of vertical extensions formed integrally and coplanar with said first pair of opposed side walls and each extending to a height greater than said first height; wherein the means for guiding the clean air of each over-flow tank in one of said plural rows are aligned so as to guide the clean air in a single direction.
Claim 8
Dependent Claim
181 words
A semiconductor wafer washing apparatus adapted to be placed in a clean room having means for forcing clean air onto the washing apparatus, said washing apparatus comprising a plurality of overflow tanks disposed in plural rows, wherein each of the overflow tanks comprises: a bottom surface; a first pair of opposed side walls having a first height; a second pair of opposed side walls having the first height, wherein said bottom surface, said first pair of opposed side walls, and said second pair of opposed side walls define a cavity adapted to hold a washing tank; and means for guiding the clean air over the over-flow tank in a direction parallel to said first pair of opposed side walls, said means comprising a pair of vertical extensions formed integrally and coplanar with said first pair of opposed side walls and each extending to a height greater than said first height; wherein the means for guiding the clean air of each over-flow tank in one of said plural rows are aligned so as to guide the clean air in a single direction.
Claim 9
Dependent Claim
19 words
An over-flow tank as claimed in claim 1, including a pair of said washing tanks disposed within said cavity.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-11-03 | 1996-05-04 | 1996-11-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-11-03 | 2000-05-04 | 2000-11-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-11-03 | 2004-05-04 | 2004-11-03 | $7700.00 | Window Closed / Lapsed |