Method for forming a boron phosphorus silicate glass composite layer on a semiconductor wafer

Claim 2

A process for forming a composite layer of boron phosphorus silicate glass (BPSG) over stepped surfaces of a semiconductor wafer which comprises: (a) depositing a first CVD base layer of BPSG on said wafer, in a vacuum chamber, by flowing into said vacuum chamber a mixture of gases comprising one or more gaseous sources of boron, one or more gaseous sources of phosphorus, a gaseous source of oxygen containing at least 1 vol. % O 3 , and tetraethylorthosilicate (TEOS) as the gaseous source of silicon, with the ratio of TEOS to O 3 ranging from about 1:100 to about 2:1; and (b) depositing a plasma assisted CVD capping layer of BPSG over said CVD layer, in said vacuum chamber, by using a mixture of gases comprising one or more gaseous sources of boron, one or more gaseous sources of phosphorus, a gaseous source of oxygen containing at least 1 vol. % O 3 , and TEOS as the gaseous source of silicon, with the ratio of TEOS to O 3 ranging from about 1:100 to about 2:1, while maintaining a plasma in said chamber at a power level of at least about 25 watts.

Claim 3

The process of claim 1 which further comprises depositing from about 80% to about 95% of the desired thickness of said composite BPSG layer in said first step of CVD deposition and from about 5% to about 20% of the desired thickness of said composite BPSG layer during said second step of plasma-assisted CVD deposition.

Claim 4

The process of claim 1 which further comprises maintaining a flow rate into said vacuum chamber of said gaseous source of boron within a range of from about 10 sccm to about 3000 sccm during said deposition steps.

Claim 5

The process of claim 1 which further comprises maintaining a flow rate into said vacuum chamber of said gaseous source of phosphorus within a range of from about 10 sccm to about 3000 sccm during said deposition steps.

Claim 6

The process of claim 1 which further comprises maintaining a flow rate into said vacuum chamber of said gaseous source of oxygen within a range of from about 500 sccm to about 10,000 sccm during said deposition steps.

Claim 7

The process of claim 1 which further comprises maintaining a flow rate into said vacuum chamber of said gaseous TEOS within a range of from about 100 sccm to about 10,000 sccm during said deposition steps.

Claim 8

The process of claim 1 which further comprises maintaining a total flow rate into said vacuum chamber of said gaseous sources of boron, phosphorus, oxygen, and TEOS within a range of from about 650 sccm to about 20,000 sccm during said deposition steps.

Claim 9

The process of claim 1 wherein said gaseous source of boron is selected from the class consisting of trimethylborate, (trimethylsilyl)borate, and mixtures of same.

Claim 10

The process of claim 1 wherein said gaseous source of phosphorus is selected from the class consisting of triethylphosphine, trimethylphosphate, (trimethylsilyl)phosphate, and mixtures of same.

Claim 11

The process of claim 1 wherein said gaseous source of oxygen further comprises one or more gases selected from the class consisting of O 2 , H 2 O 2 , helium, argon, and nitrogen.

Claim 12

A process for forming a composite layer of boron phosphorus silicate glass (BPSG) over stepped surfaces of a semiconductor wafer which comprises: (a) depositing a first CVD base layer of BPSG on said wafer, in a vacuum chamber, comprising from about 80% to about 95% of the total thickness of said composite BPSG layer, by flowing into said vacuum chamber a mixture of gases comprising: one or more gaseous sources of boron having a flow rate within a range of from about 10 sccm to about 3000 sccm, one or more gaseous sources of phosphorus having a flow rate within a range of from about 10 sccm about 3000 sccm, one or more gaseous sources of oxygen having a flow rate within a range of from about 500 sccm to about 10,000 sccm, and tetraethylorthosilicate as the gaseous source of silicon having a flow rate within a range of from about 100 sccm to about 10,000 sccm; and (b) depositing a plasma assisted CVD capping layer of BPSG over said CVD layer, in a vacuum chamber, comprising from about 5% to about 20% of the total thickness of said composite BPSG layer, by igniting a plasma in said vacuum chamber having a power level of at least about 25 watts while continuing to flow said mixture of said one or more gaseous sources of boron, said one or more gaseous sources of phosphorus, said one or more gaseous sources of oxygen, and said tetraethylorthosilicate into said vacuum chamber.

Claim 13

A process for forming a composite layer of boron phosphorus silicate glass (BPSG) over stepped surfaces of a semiconductor wafer which comprises: (a) depositing a first CVD base layer of BPSG on said wafer, in a vacuum chamber, comprising from about 80% to about 95% of the total thickness of said composite BPSG layer, by flowing into said vacuum chamber a mixture of gases comprising: one or more gaseous sources of boron having a flow rate within a range of from about 10 sccm to about 3000 sccm, one or more gaseous sources of phosphorus having a flow rate within a range of from about 10 sccm about 3000 sccm, one or more gaseous sources of oxygen having a flow rate within a range of from about 500 sccm to about 10,000 sccm, and tetraethylorthosilicate as the gaseous source of silicon having a flow rate within a range of from about 100 sccm to about 10,000 sccm; and (b) depositing a plasma assisted CVD capping layer of BPSG over said CVD layer, in a vacuum chamber, comprising from about 5% to about 20% of the total thickness of said composite BPSG layer, by igniting a plasma in said vacuum chamber having a power level of at least about 25 watts while continuing to flow said mixture of said one or more gaseous sources of boron, said one or more gaseous sources of phosphorus, said one or more gaseous sources of oxygen, and said tetraethylorthosilicate into said vacuum chamber.

Claim 14

A process for forming a composite layer of boron phosphorus silicate glass (BPSG) over stepped surfaces of a semiconductor water to provide a layer without visible signs of voids and a surface which is non-hygroscopic and resistant to loss of boron during subsequent etching which comprises: (a) depositing a first CVD base layer of BPSG on a wafer heated to a temperature within a range of from about 390° C. to about 600° C., in a vacuum chamber maintained at a pressure within a range of from about 40 Torr to about 760 Torr, by flowing into said vacuum chamber a mixture of gases comprising one or more gaseous sources of boron, one or more gaseous sources of phosphorus, a gaseous source of oxygen containing at least 1 vol. % O 3 , and tetraethylorthosilicate (TEOS) as the gaseous source of silicon, with the ratio of TEOS to O 3 ranging from about 1:100 to about 2:1; and (a) depositing a first CVD base layer of BPSG on a wafer heated to a temperature within a range of from about 390° C. to about 600° C., in a vacuum chamber maintained at a pressure within a range of from about 40 Torr to about 760 Torr, by flowing into said vacuum chamber a mixture of gases comprising one or more gaseous sources of boron, one or more gaseous sources of phosphorus, a gaseous source of oxygen containing at least 1 vol. %, O 3 , and tetraethylorthosilicate (TEOS) as the gaseous source of silicon, with the ratio of TEOS to O 3 ranging from about 1:100 to about 2:1; and (b) depositing a plasma assisted CVD capping layer of BPSG over said CVD layer on said wafer heated to a temperature within a range of from about 390° C. to about 600° C., in a vacuum chamber maintained at a pressure within a range of from about 40 Torr to about 760 Torr, by using a mixture of gases comprising one or more gaseous sources of boron, one or more gaseous sources of phosphorus, a gaseous source of oxygen containing at least 1 vol. % O 3 , and tetraethylorthosilicate (TEOS) as the gaseous source of silicon, with the ratio of TEOS to O 3 ranging from about 1:100 to about 2:1; while maintaining a plasma in said chamber at a power level ranging from about 25 to about 500 watts.

Claim 15

A process for forming a composite layer of boron phosphorus silicate glass (BPSG) over stepped surfaces of a semiconductor water to provide a layer without visible signs of voids and a surface which is non-hygroscopic and resistant to loss of boron during subsequent etching which comprises: (a) depositing a first CVD base layer of BPSG on a wafer heated to a temperature within a range of from about 390° C. to about 600° C., in a vacuum chamber maintained at a pressure within a range of from about 40 Torr to about 760 Torr, by flowing into said vacuum chamber a mixture of gases comprising one or more gaseous sources of boron, one or more gaseous sources of phosphorus, a gaseous source of oxygen containing at least 1 vol. % O 3 , and tetraethylorthosilicate (TEOS) as the gaseous source of silicon, with the ratio of TEOS to O 3 ranging from about 1:100 to about 2:1; and (a) depositing a first CVD base layer of BPSG on a wafer heated to a temperature within a range of from about 390° C. to about 600° C., in a vacuum chamber maintained at a pressure within a range of from about 40 Torr to about 760 Torr, by flowing into said vacuum chamber a mixture of gases comprising one or more gaseous sources of boron, one or more gaseous sources of phosphorus, a gaseous source of oxygen containing at least 1 vol. %, O 3 , and tetraethylorthosilicate (TEOS) as the gaseous source of silicon, with the ratio of TEOS to O 3 ranging from about 1:100 to about 2:1; and (b) depositing a plasma assisted CVD capping layer of BPSG over said CVD layer on said wafer heated to a temperature within a range of from about 390° C. to about 600° C., in a vacuum chamber maintained at a pressure within a range of from about 40 Torr to about 760 Torr, by using a mixture of gases comprising one or more gaseous sources of boron, one or more gaseous sources of phosphorus, a gaseous source of oxygen containing at least 1 vol. % O 3 , and tetraethylorthosilicate (TEOS) as the gaseous source of silicon, with the ratio of TEOS to O 3 ranging from about 1:100 to about 2:1; while maintaining a plasma in said chamber at a power level ranging from about 25 to about 500 watts.

Claim 16

A process for forming a composite layer of boron phosphorus silicate glass (BPSG) over stepped surfaces of a semiconductor wafer to provide a layer essentially free of discernible voids and a surface which is non-hygroscopic and resistant to loss of boron during subsequent etching which comprises: (a) depositing a first CVD base layer of BPSG on a wafer heated to a temperature within a range of from about 390° C. to about 499° C., in a vacuum chamber maintained at a pressure within a range of from about 40 Torr to about 760 Torr, by flowing into said vacuum chamber a mixture of gases comprising: (i) one or more gaseous sources of boron; (ii) one or more gaseous sources of phosphorus; (iii) a gaseous source of oxygen selected from the class consisting of O 2 , O 3 , H 2 O 2 , and mixtures of same, with said oxygen source comprising at least 1 vol. % O 3 ; and (iv) tetraethylorthosilicate (TEOS) as the gaseous source of silicon; with the ratio of TEOS to O 3 ranging from about 1:100 to about 2:1; and (b) depositing a plasma assisted CVD capping layer of BPSG over said CVD layer on said wafer heated to a temperature within a range of from about 390° C. to about 499° C., in a vacuum chamber maintained at a pressure within a range of from about 40 Torr to about 760 Torr, by using a mixture of gases comprising: (i) one or more gaseous sources of boron; (ii) one or more gaseous sources of phosphorus; (iii) a gaseous source of oxygen selected from the class consisting of O 2 , O 3 , H 2 O 2 , and mixtures of same, with said oxygen source comprising at least 1 vol. % O 3 ; and (iv) tetraethylorthosilicate (TEOS) as the gaseous source of silicon; with the ratio of TEOS to O 3 ranging from about 1:100 to about 2:1; while maintaining a plasma in said chamber at a power level ranging from about 25 to about 200 watts.

Claim 17

A process for forming a composite layer of boron phosphorus silicate glass (BPSG) over stepped surfaces of a semiconductor wafer to provide a layer essentially free of discernible voids and a surface which is non-hygroscopic and resistant to loss of boron during subsequent etching which comprises: (a) depositing a first CVD base layer of BPSG on a wafer heated to a temperature within a range of from about 390° C. to about 499° C., in a vacuum chamber maintained at a pressure within a range of from about 40 Torr to about 760 Torr, by flowing into said vacuum chamber a mixture of gases comprising: (i) one or more gaseous sources of boron; (ii) one or more gaseous sources of phosphorus; (iii) a gaseous source of oxygen selected from the class consisting of O 2 , O 3 , H 2 O 2 , and mixtures of same, with said oxygen source comprising at least 1 vol. % O 3 ; and (iv) tetraethylorthosilicate (TEOS) as the gaseous source of silicon; with the ratio of TEOS to O 3 ranging from about 1:100 to about 2:1; and (b) depositing a plasma assisted CVD capping layer of BPSG over said CVD layer on said wafer heated to a temperature within a range of from about 390° C. to about 499° C., in a vacuum chamber maintained at a pressure within a range of from about 40 Torr to about 760 Torr, by using a mixture of gases comprising: (i) one or more gaseous sources of boron; (ii) one or more gaseous sources of phosphorus; (iii) a gaseous source of oxygen selected from the class consisting of O 2 , O 3 , H 2 O 2 , and mixtures of same, with said oxygen source comprising at least 1 vol. % O 3 ; and (iv) tetraethylorthosilicate (TEOS) as the gaseous source of silicon; with the ratio of TEOS to O 3 ranging from about 1:100 to about 2:1; while maintaining a plasma in said chamber at a power level ranging from about 25 to about 200 watts.

Claim 18

A process for forming a composite layer of boron phosphorus silicate glass (BPSG) over stepped surfaces of a semiconductor wafer comprising a void-free first BPSG layer and a non-porous and non-hygroscopic BPSG cap layer which comprises: depositing a first CVD base layer of BPSG on said wafer, in a vacuum chamber, by flowing into said vacuum chamber a mixture of gases comprising: (i) one or more gaseous sources of boron; (ii) one or more gaseous sources of phosphorus; (iii) a gaseous source of oxygen containing at least 1 vol. % O 3 , and (iv) tetraethylorthosilicate (TEOS) as the gaseous source of silicon; to form said void-free first BPSG layer; and (b) depositing a plasma assisted CVD capping layer of BPSG over said CVD layer, in a vacuum chamber, by using a mixture of gases comprising: (i) one or more gaseous sources of boron; (ii) one or more gaseous sources of phosphorus; (iii) a gaseous source of oxygen containing at least 1 vol. % O 3 , and (iv) tetraethylorthosilicate (TEOS) as the gaseous source of silicon; while maintaining a plasma in said chamber at a power level of at least about 25 watts to form said non-porous and non-hygroscopic BPSG cap layer.

Claim 19

A process for forming a composite layer of boron phosphorus silicate glass (BPSG) over stepped surfaces of a semiconductor wafer comprising a void-free first BPSG layer and a non-porous and non-hygroscopic BPSG cap layer which comprises: depositing a first CVD base layer of BPSG on said wafer, in a vacuum chamber, by flowing into said vacuum chamber a mixture of gases comprising: (i) one or more gaseous sources of boron; (ii) one or more gaseous sources of phosphorus; (iii) a gaseous source of oxygen containing at least 1 vol. % O 3 , and (iv) tetraethylorthosilicate (TEOS) as the gaseous source of silicon; to form said void-free first BPSG layer; and (b) depositing a plasma assisted CVD capping layer of BPSG over said CVD layer, in a vacuum chamber, by using a mixture of gases comprising: (i) one or more gaseous sources of boron; (ii) one or more gaseous sources of phosphorus; (iii) a gaseous source of oxygen containing at least 1 vol. % O 3 , and (iv) tetraethylorthosilicate (TEOS) as the gaseous source of silicon; while maintaining a plasma in said chamber at a power level of at least about 25 watts to form said non-porous and non-hygroscopic BPSG cap layer.

Claim 20

A process for forming a composite layer of boron phosphorus silicate glass (BPSG) over stepped surfaces of a semiconductor wafer comprising a void-free first BPSG layer and a non-porous and non-hygroscopic BPSG cap layer which comprises: (a) depositing a first CVD base layer of BPSG on said wafer, in a vacuum chamber, by flowing into said vacuum chamber a mixture of gases comprising: (i) one or more gaseous sources of boron; (ii) one or more gaseous sources of phosphorus; (iii) a gaseous source of oxygen containing at least 1 vol. % O 3 , and (iv) tetraethylorthosilicate (TEOS) as the gaseous source of silicon, with the ratio of TEOS to O 3 ranging from about 1:100 to about 2:1; to form said void-free first BPSG layer; and (b) depositing a plasma assisted CVD capping layer of BPSG over said CVD layer, in a vacuum chamber, by using a mixture of gases comprising: (i) one or more gaseous sources of boron; (ii) one or more gaseous sources of phosphorus; (iii) one or more gaseous sources of oxygen, and (iv) tetraethylorthosilicate (TEOS) as the gaseous source of silicon, with the ratio of TEOS to O 3 ranging from about 1:100 to about 2:1; while maintaining a plasma in said chamber at a power level of at least about 25 watts to form said non-porous and non-hygroscopic BPSG cap layer.

Claim 21

A process for forming a composite layer of boron phosphorus silicate glass (BPSG) over stepped surfaces of a semiconductor wafer comprising a void-free first BPSG layer and a non-porous and non-hygroscopic BPSG cap layer which comprises: (a) depositing a first CVD base layer of BPSG on said wafer, in a vacuum chamber, by flowing into said vacuum chamber a mixture of gases comprising: (i) one or more gaseous sources of boron; (ii) one or more gaseous sources of phosphorus; (iii) a gaseous source of oxygen containing at least 1 vol. % O 3 , and (iv) tetraethylorthosilicate (TEOS) as the gaseous source of silicon, with the ratio of TEOS to O 3 ranging from about 1:100 to about 2:1; to form said void-free first BPSG layer; and (b) depositing a plasma assisted CVD capping layer of BPSG over said CVD layer, in a vacuum chamber, by using a mixture of gases comprising: (i) one or more gaseous sources of boron; (ii) one or more gaseous sources of phosphorus; (iii) one or more gaseous sources of oxygen, and (iv) tetraethylorthosilicate (TEOS) as the gaseous source of silicon, with the ratio of TEOS to O 3 ranging from about 1:100 to about 2:1; while maintaining a plasma in said chamber at a power level of at least about 25 watts to form said non-porous and non-hygroscopic BPSG cap layer.

Claim 22

A process for forming a composite layer of boron phosphorus silicate glass (BPSG) over stepped surfaces of a semiconductor wafer which comprises: (a) depositing a first CVD base layer of BPSG on said wafer, in a vacuum chamber, by flowing into said vacuum chamber a mixture of gases comprising one or more gaseous sources of boron, one or more gaseous sources of phosphorus, a gaseous source of oxygen, and tetraethylorthosilicate as the gaseous source of silicon, while maintaining a wafer temperature during said deposition not exceeding about 600° C.; and (b) depositing a plasma assisted CVD capping layer of BPSG over said CVD layer, in a vacuum chamber, by using a mixture of gases comprising one or more gaseous sources of boron, one or more gaseous sources of phosphorus, a gaseous source of oxygen, and tetraethylorthosilicate as the gaseous source of silicon, while maintaining a plasma in said chamber at a power level of at least about 25 watts, and while maintaining a wafer temperature during said deposition not exceeding about 600° C.

Claim 23

A process for forming a composite layer of boron phosphorus silicate glass (BPSG) over stepped surfaces of a semiconductor wafer which comprises: (a) depositing a first CVD base layer of BPSG on said wafer, in a vacuum chamber, by flowing into said vacuum chamber a mixture of gases comprising one or more gaseous sources of boron, one or more gaseous sources of phosphorus, a gaseous source of oxygen, and tetraethylorthosilicate as the gaseous source of silicon, while maintaining a wafer temperature during said deposition not exceeding about 600° C.; and (b) depositing a plasma assisted CVD capping layer of BPSG over said CVD layer, in a vacuum chamber, by using a mixture of gases comprising one or more gaseous sources of boron, one or more gaseous sources of phosphorus, a gaseous source of oxygen, and tetraethylorthosilicate as the gaseous source of silicon, while maintaining a plasma in said chamber at a power level of at least about 25 watts, and while maintaining a wafer temperature during said deposition not exceeding about 600° C.

Claim 24

A process for forming a composite layer of boron phosphorus silicate glass (BPSG) over stepped surfaces of a semiconductor wafer which comprises: (a) depositing a first CVD base layer of BPSG on said wafer, in a vacuum chamber, by flowing into said vacuum chamber a mixture of gases comprising one or more gaseous sources of boron, one or more gaseous sources of phosphorus, a gaseous source of oxygen, and tetraethylorthosilicate as the gaseous source of silicon, while maintaining a pressure in said chamber of at least about 40 Torr; and (b) depositing a plasma assisted CVD capping layer of BPSG over said CVD layer, in said vacuum chamber, by using a mixture of gases comprising one or more gaseous sources of boron, one or more gaseous sources of phosphorus, a gaseous source of oxygen, and tetraethylorthosilicate as the gaseous source of silicon, while maintaining a plasma in said chamber at a power level of at least about 25 watts, and while maintaining a pressure in said chamber of at least about 40 Torr.

Claim 25

A process for forming a composite layer of boron phosphorus silicate glass (BPSG) over stepped surfaces of a semiconductor wafer which comprises: (a) depositing a first CVD base layer of BPSG on said wafer, in a vacuum chamber, by flowing into said vacuum chamber a mixture of gases comprising one or more gaseous sources of boron, one or more gaseous sources of phosphorus, a gaseous source of oxygen, and tetraethylorthosilicate as the gaseous source of silicon, while maintaining a pressure in said chamber of at least about 40 Torr; and (b) depositing a plasma assisted CVD capping layer of BPSG over said CVD layer, in said vacuum chamber, by using a mixture of gases comprising one or more gaseous sources of boron, one or more gaseous sources of phosphorus, a gaseous source of oxygen, and tetraethylorthosilicate as the gaseous source of silicon, while maintaining a plasma in said chamber at a power level of at least about 25 watts, and while maintaining a pressure in said chamber of at least about 40 Torr.