US5171992A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Nanometer scale probe for an atomic force microscope, and method for making same
Assignee: International Business Machines Corp
•
Filing: 1991-10-03
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Granted: 1992-12-15
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Expires: 2011-10-03
Abstract
Abstract Methods are described for producing a needle probe tip having prescribed magnetic properties for a scanning magnetic force microscope (MFM) on a substrate positioned in an evacuated environment. A substantially rigid, nanometer-scale needle-like structure is produced by selective decomposition of a volatile organic compound by a highly focussed electron beam. Processing steps are described to obtain prescribed magnetic properties of such a needle probe structure; in particular, the fabrication of a single magnetic domain, with hard or soft magnetic properties at the distal end of the needle structure. Three dimensional probe tips are also achieved. These magnetic sensing probes allow magnetic imaging at the nanometer-scale level.
Inventors
- 👤 Joachim G. Clabes
- 👤 Michael Hatzakis
- 👤 Kam L. Lee
- 👤 Bojan Petek
- 👤 John C. Slonczewski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 09:41
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/50; G01Q60/54; B; B82; B82Y; B82Y15/00; B82Y35/00; G01Q70/00; G01Q70/08; G01Q70/10; G01Q70/12; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/07; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/875; Y10S977/878; Y10S977/879
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
41 words
A probe for a scanned-probe microscope, comprising: a substrate; a nanometer scale, needle-shaped structure, exhibiting a high aspect ratio, extending from said substrate, said structure comprising a carbonized matrix of a decomposed organic reactant, said structure further exhibiting a substantial stiffness.
Claim 2
Dependent Claim
41 words
A probe for a scanned-probe microscope, comprising: a substrate; a nanometer scale, needle-shaped structure, exhibiting a high aspect ratio, extending from said substrate, said structure comprising a carbonized matrix of a decomposed organic reactant, said structure further exhibiting a substantial stiffness.
Claim 3
Dependent Claim
15 words
The probe as recited in claim wherein said carbonized matrix includes metallic deposits interspersed therein.
Claim 4
Dependent Claim
14 words
The probe as recited in claim 2 wherein said metallic deposits exhibit maqnetic properties.
Claim 5
Dependent Claim
24 words
The probe as recited in claim 3 wherein said structure exhibits a tip diameter sufficiently small that it manifests a single magnetic domain thereat.
Claim 6
Dependent Claim
16 words
The probe as recited in claim 1, wherein said needle-shaped structure includes a plurality of protrusions.
Claim 7
Dependent Claim
15 words
The probe as recited in claim 5 wherein each said protrusion includes a magnetic layer.
Claim 8
Dependent Claim
20 words
The probe as recited in claim 5 wherein some of said plurality of protrusions extend away from said needle-shaped structure.
Claim 9
Dependent Claim
24 words
The probe as recited in claim wherein said needle-shaped structure is provided with an expanded tip, said expanded tip exhibiting a three dimensional shape.
Claim 10
Dependent Claim
14 words
The probe as recited in claim 8 wherein said expanded tip includes magnetic portions.
Claim 11
Dependent Claim
36 words
The probe as recited in claim 1 wherein said substrate comprises a flexible beam having an integral protrusion extending in a perpendicular direction therefrom, said protrusion having an apex surface from which said needle-like structure extends.
Claim 12
Dependent Claim
19 words
The invention as recited in claim 10 wherein said flexible beam and protrusion are comprised of a silicon-based material.
Claim 13
Dependent Claim
30 words
The probe as recited in claim 1 further comprising: a thin metal layer disposed on at least a distal end of said structure, said thin metal layer exhibiting magnetic properties.
Claim 14
Dependent Claim
27 words
The probe as recited in claim 12 further comprising: a thin metal-containing interlayer disposed between said distal end of said structure and said thin metal magnetic layer.
Claim 15
Dependent Claim
29 words
A structure comprising: a substrate; a needle-shaped structure having a tip, said needle-shaped structure extending from said substrate, said needle-shaped structure having a single magnetic domain at said tip.
Claim 16
Dependent Claim
29 words
A structure comprising: a substrate; a needle-shaped structure having a tip, said needle-shaped structure extending from said substrate, said needle-shaped structure having a single magnetic domain at said tip.
Claim 17
Dependent Claim
32 words
The structure as recited in claim 14 wherein said needle-shaped structure includes a plurality of said tips, some said tips extending away from said structure, each tip exhibiting a single magnetic domain.
Claim 18
Dependent Claim
20 words
The structure of claim 14, wherein said needle-shaped structure has an aspect ratio of greater than about 10 to 1.
Claim 19
Dependent Claim
24 words
The structure of claim 14, wherein said needle-shaped structure comprises a carbonized matrix of a decomposed organic reactant, said needle-shaped structure exhibiting substantial stiffness.
Claim 20
Dependent Claim
16 words
The structure of claim 14, wherein said structure is a probe tip for a scanned-probe microscope.
Claim 21
Dependent Claim
34 words
A structure comprising: a substrate; and a nanometer scale, needle-shaped organic-based structure, extending from said substrate and exhibiting a high aspect ratio, said needle-shaped structure exhibiting substantial stiffness and a three dimensional tip structure.
Claim 22
Dependent Claim
34 words
A structure comprising: a substrate; and a nanometer scale, needle-shaped organic-based structure, extending from said substrate and exhibiting a high aspect ratio, said needle-shaped structure exhibiting substantial stiffness and a three dimensional tip structure.
Claim 23
Dependent Claim
36 words
The structure as recited in claim 19 wherein said three dimensional tip structure comprises a plurality of extensions, at least some said extensions being disposed in a direction that is substantially perpendicular to said needle-shaped structure.
Claim 24
Dependent Claim
19 words
The structure as recited in claim 19 wherein certain said extensions comprise different material compositions than other said extensions.
Claim 25
Dependent Claim
15 words
The structure as recited in claim 19 wherein said needle shaped structure exhibits electrical conductivity.
Claim 26
Dependent Claim
18 words
The structure as recited in claim 22 wherein said three dimensional structure comprises at least one closed loop.
Claim 27
Dependent Claim
26 words
The structure as recited in claim 22 wherein said three dimensional structure includes a plurality of loops having different angular orientations with respect to each other.
Claim 28
Dependent Claim
29 words
The structure as recited in claim 22 further comprising: an additional nanometer scale, needle-shaped, organic-based structure extending from said substrate, said three dimensional structure connected between said needle-shaped structures.
Claim 29
Dependent Claim
24 words
The structure as recited in claim 25 wherein said three dimensional structure is an open loop having ends connected to said needle shaped structures.
Claim 30
Dependent Claim
15 words
The structure as recited in claim 25 wherein said open loop is helical in shape.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-12-15 | 1996-06-15 | 1996-12-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-12-15 | 2000-06-15 | 2000-12-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-12-15 | 2004-06-15 | 2004-12-15 | $7700.00 | Window Closed / Lapsed |