US5179433A
Expired / Lapsed
US
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Breakdown evaluating test element
Assignee: Toshiba Corp
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Filing: 1991-06-12
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Granted: 1993-01-12
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Expires: 2011-06-12
Abstract
Abstract A breakdown evaluating test element insert an oxide film having thin thick portion and formed on a silicon wafer and a polysilicon film formed on the oxide film, in such a way that a capacitor is formed between the silicon wafer and the polysilicon film with the oxide film as dielectric. The area of the polysilicon film is made larger than that of the thin portion of the oxide film so that only the thin portion thereof is brought into breakdown at a predetermined probability by an electric field strength generated at the thin portion when an electric field is applied to the wafer and when no electron shower is used (no breakdown prevention countermeasure is taken) during ion implantation, for instance. Therefore, the effect of the electron shower can be confirmed by checking the resistivity of the thin oxide film portion after the wafer has been ion-implanted by using an electron shower.
Inventors
- 👤 Hisanori Misawa
- 👤 Masakazu Shiozaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 21:32
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/26; G01R31/2607; G01R31/2608; G01R31/261; G01R31/12; G01R31/20; H; H10; H10P; H10P74/00; H10P74/20; H10P74/207
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
152 words
A breakdown evaluating test element comprising: a silicon wafer; a thin oxide film formed on said wafer; a thick oxide film formed on said wafer, said thick oxide film being located on a peripheral portion of said thin film; and a polysilicon film formed on both said thin and thick oxide films; and wherein, a first area of said polysilicon film covers an area of said thick oxide film which is substantially greater than a second area of said polysilicon film covering said thin oxide film, such that, when an electric field is applied to the wafer during a manufacturing process, the thin oxide film has a predetermined probability of breaking down from the strength of an electric field resulting from electric charge accumulated in a capacitor formed by said silicon wafer as a first electrode, said polysilicon film as a second electrode said thin and thick oxide films as a dielectric.
Claim 2
Dependent Claim
152 words
A breakdown evaluating test element comprising: a silicon wafer; a thin oxide film formed on said wafer; a thick oxide film formed on said wafer, said thick oxide film being located on a peripheral portion of said thin film; and a polysilicon film formed on both said thin and thick oxide films; and wherein, a first area of said polysilicon film covers an area of said thick oxide film which is substantially greater than a second area of said polysilicon film covering said thin oxide film, such that, when an electric field is applied to the wafer during a manufacturing process, the thin oxide film has a predetermined probability of breaking down from the strength of an electric field resulting from electric charge accumulated in a capacitor formed by said silicon wafer as a first electrode, said polysilicon film as a second electrode said thin and thick oxide films as a dielectric.
Claim 3
Dependent Claim
23 words
The breakdown evaluating test element as claimed in claim 1, wherein a plurality of the capacitors are formed scattered on the silicon wafer.
Claim 4
Dependent Claim
37 words
The breakdown evaluating test element as claimed in claim 1, wherein the area of the thick portion of the oxide film is at least 1000 times greater than that of the thin portion of the oxide film.
Claim 5
Dependent Claim
36 words
The breakdown evaluating test element as claimed in claim 1, wherein the polysilicon film is formed on the oxide film in such a way as to expose part of the thin portion of the oxide film.
Claim 6
Dependent Claim
20 words
The breakdown evaluating test element as claimed in claim 1, wherein another oxide film is formed on the polysilicon film.
Claim 7
Dependent Claim
22 words
The breakdown evaluating test element as claimed in claim 1, wherein said polysilicon film is completely covered with a photo resist film.
Claim 8
Dependent Claim
31 words
The breakdown evaluating test element as claimed in claim 1, wherein said polysilicon film is partially covered with a photo resist film and a part of said polysilicon film is exposed.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-01-12 | 1996-07-13 | 1997-01-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-01-12 | 2000-07-13 | 2001-01-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-01-12 | 2004-07-13 | 2005-01-12 | $7700.00 | Window Closed / Lapsed |