US5202008A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for preparing a shield to reduce particles in a physical vapor deposition chamber
Assignee: Applied Materials Inc
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Filing: 1992-06-08
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Granted: 1993-04-13
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Expires: 2012-06-08
Abstract
Abstract In a method for preparing a shield for use in a physical vapor deposition process, the shield is sputter-etch cleaned to increase adhesion of deposits in the physical vapor deposition process. The sputter-etch cleaning serves to loosen contamination which may for a diffusion barrier and prevent the deposits from bonding to the shield. Also, the sputter-etch cleaning creates a high degree of micro-roughness. The roughness allows for an increase in nucleation sites which minimize the formation of interface voids. In addition to sputter-etch cleaning the shield may be bead blasted. The bead blasting makes the surface of the shield irregular. This enhances interface cracking of deposited material on a microscopic scale, resulting in less flaking.
Inventors
- 👤 Humoyoun Talieh
- 👤 Haim Gilboa
- 👤 Donald M. Mintz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 23:48
CPC Classifications
B; B08; B08B; B08B7/00; B08B7/0007; B08B7/04; C; C23; C23C; C23C14/00; C23C14/02; C23C14/021; C23C14/22; C23C14/56; C23C14/564
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
57 words
A method for increasing the lifetime of a shield for use in a physical vapor deposition process, the method comprising the steps of: (a) bead blasting the shield, and (b) sputter-etch cleaning the shield, thereby roughening the surface of the shield and increasing its surface area, prior to using the shield in a physical vapor deposition process.
Claim 2
Independent Claim
57 words
A method for increasing the lifetime of a shield for use in a physical vapor deposition process, the method comprising the steps of: (a) bead blasting the shield, and (b) sputter-etch cleaning the shield, thereby roughening the surface of the shield and increasing its surface area, prior to using the shield in a physical vapor deposition process.
Claim 3
Dependent Claim
18 words
A method as in claim 1 wherein the bead blasting is done with an aluminum oxide abrasive powder.
Claim 4
Dependent Claim
11 words
A method as in claim 1 wherein the shield comprises Titanium.
Claim 5
Dependent Claim
11 words
A method as in claim 1 wherein the shield comprises Aluminum.
Claim 6
Dependent Claim
11 words
A method as in claim 1 wherein the shield comprises Molybdenum.
Claim 7
Dependent Claim
18 words
A method as in claim 1 wherein the shield comprises stainless steel covered with a film of aluminum.
Claim 8
Dependent Claim
43 words
A method as in claim 1 wherein the sputter-etch cleaning is done in a chamber in which power, within the range of 50 Watts to 500 Watts, is applied to an anode plate mounted in the chamber in place of a sputter source.
Claim 9
Dependent Claim
27 words
A method as in claim 7 the power applied to anode plate mounted in the chamber in place of a sputter source is an DC power signal.
Claim 10
Dependent Claim
27 words
A method as in claim 7 the power applied to anode plate mounted in the chamber in place of a sputter source is an RF power signal.
Claim 11
Dependent Claim
30 words
A method as in claim 1 wherein the sputter-etch cleaning of the shield is done in situ in a physical vapor deposition chamber used in the physical vapor deposition process.
Claim 12
Dependent Claim
29 words
A method as in claim 1 wherein the sputter-etch cleaning of the shield is done off line in a stand-alone chamber not used in the physical vapor deposition process.
Claim 13
Independent Claim
58 words
A method for increasing the lifetime of a shield for use in a physical vapor deposition process, the method comprising the steps of: (a) bead blasting the shield, and (b) reactive plasma cleaning the shield, thereby roughening the surface of the shield and increasing its surface area, prior to using the shield in a physical vapor deposition process.
Claim 14
Independent Claim
58 words
A method for increasing the lifetime of a shield for use in a physical vapor deposition process, the method comprising the steps of: (a) bead blasting the shield, and (b) reactive plasma cleaning the shield, thereby roughening the surface of the shield and increasing its surface area, prior to using the shield in a physical vapor deposition process.
Claim 15
Dependent Claim
18 words
A method as in claim 12 wherein the bead blasting is done with an aluminum oxide abrasive powder.
Claim 16
Dependent Claim
15 words
A method as in claim 12 wherein plasma is activated in an upstream activation chamber.
Claim 17
Dependent Claim
21 words
A method as in claim 12 wherein plasma is activated in a chamber in which the shield is reactive plasma cleaned.
Claim 18
Dependent Claim
13 words
A method as in claim 12 wherein the plasma comprises O 2 .
Claim 19
Dependent Claim
13 words
As method a in claim 12 wherein the plasma comprises H 2 .
Claim 20
Dependent Claim
11 words
A method as in claim 12 wherein the shield comprises Titanium.
Claim 21
Dependent Claim
11 words
A method as in claim 12 wherein the shield comprises Aluminum.
Claim 22
Dependent Claim
11 words
A method as in claim 12 wherein the shield comprises Molybdenum.
Claim 23
Dependent Claim
18 words
A method as in claim 12 wherein the shield comprises stainless steel covered with a film of aluminum.
Claim 24
Independent Claim
59 words
A method for increasing the lifetime of a shield for use in a physical vapor deposition process, the method comprising the steps of: (a) bead blasting the shield, and (b) cleaning the shield using non-reactive plasma, thereby roughening the surface of the shield and increasing its surface area, prior to using the shield in a physical vapor deposition process.
Claim 25
Independent Claim
59 words
A method for increasing the lifetime of a shield for use in a physical vapor deposition process, the method comprising the steps of: (a) bead blasting the shield, and (b) cleaning the shield using non-reactive plasma, thereby roughening the surface of the shield and increasing its surface area, prior to using the shield in a physical vapor deposition process.
Claim 26
Dependent Claim
18 words
A method as in claim 22 wherein the bead blasting is done with an aluminum oxide abrasive powder.
Claim 27
Dependent Claim
14 words
A method as in claim 22 wherein the plasma comprises an inert gas ambient.
Claim 28
Dependent Claim
13 words
A method as in claim 24 wherein the inert gas ambient is Argon.
References Cited (Backward Citations)
US3649502A
Cited
FR2088659A5
Cited
US3773639A
Cited
US3699034A
Cited
FR2147265A1
Cited
US3864239A
Cited
US4368092A
Cited
US4392932A
Cited
JPS60248876A
Cited
US4699689A
Cited
JPS63162861A
Cited
JPS63307271A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-04-12 | 1996-10-12 | 1997-04-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-12 | 2000-10-12 | 2001-04-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-12 | 2004-10-12 | 2005-04-13 | $7700.00 | Window Closed / Lapsed |