US5203929A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of producing amorphous magnetic film
Assignee: Toyota Motor Corp
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Filing: 1991-06-26
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Granted: 1993-04-20
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Expires: 2011-06-26
Abstract
Abstract An amorphous magnetic film is produced by irradiating laser beams onto a magnetic metallic target and depositing an evaporated material on a substrate. During or after the evaporation process, the film formed on the substrate is annealed at a temperature lower than a crystallization temperature. The annealing process enables elimination of stresses from the film, thereby improving soft magnetic properties.
Inventors
- 👤 Noboru Takayanagi
- 👤 Kazuhiro Akihama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 07:01
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C23C14/06; C23C14/14; H; H01; H01F; H01F10/00; H01F10/08; H01F10/10; H01F10/12; H01F10/13; H01F10/131; H01F41/00; H01F41/14; H01F41/20; H01F41/205
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
83 words
A method of producing an amorphous magnetic film, comprising: (a) disposing a target consisting of a magnetic metal and a substrate in a confronting manner in a high vacuum chamber; (b) heating said substrate to a temperature below a crystallization temperature of a film to be produced; (c) irradiating a laser beam to said target so as to evaporate a target material; and (c) depositing the evaporated target material on said heated substrate so as to produce a thin film on said substrate.
Claim 2
Independent Claim
83 words
A method of producing an amorphous magnetic film, comprising: (a) disposing a target consisting of a magnetic metal and a substrate in a confronting manner in a high vacuum chamber; (b) heating said substrate to a temperature below a crystallization temperature of a film to be produced; (c) irradiating a laser beam to said target so as to evaporate a target material; and (c) depositing the evaporated target material on said heated substrate so as to produce a thin film on said substrate.
Claim 3
Dependent Claim
17 words
A method according to claim 1, further including applying a potential between said target and said substrate.
Claim 4
Dependent Claim
52 words
A method according to claim 1, wherein said magnetic metal is Se 75 Si 8 B 17 , said laser beam is a KrF excimer laser whose irradiation power density is approximately 10 J/cm 2 on the surface of said target, and the temperature of the substrate is 550° C. or less.
Claim 5
Dependent Claim
52 words
A method according to claim 2, wherein said magnetic metal is Fe 75 Si 8 B 17 , said laser beam is a KrF excimer laser whose irradiation power density is approximately 10 J/cm 2 on the surface of said target, and the temperature of the substrate is 200° C. or less.
References Cited (Backward Citations)
JPS5451919A
Cited
GB2016528A
Cited
US4512824A
Cited
US4469536A
Cited
US4634306A
Cited
EP0134653A1
Cited
EP0132907A1
Cited
GB2155042A
Cited
US4851296A
Cited
US4812181A
Cited
JPS63241135A
Cited
DE3800680A1
Cited
US5015492A
Cited
US4950337A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-04-19 | 1996-10-19 | 1997-04-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-19 | 2000-10-19 | 2001-04-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-19 | 2004-10-19 | 2005-04-20 | $7700.00 | Window Closed / Lapsed |