US5206091A
Expired / Lapsed
US
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Low dielectric constant, low moisture uptake polyimides and copolyimides for interlevel dielectrics and substrate coatings
Assignee: Texas A&M University System
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Filing: 1989-11-13
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Granted: 1993-04-27
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Expires: 2009-11-13
Abstract
Abstract A group of polyimides and copolyimides made from 6FDA, IPAN, or their acid or ester forms, and selected aromatic diamines are disclosed which are useful for substrate coatings and interlevel dielectrics in on-chip and multi-chip package applications. In such applications these polymers exhibit lower dielectric constant, lower moisture uptake and reduced dielectric constant variation with temperature and humidity than existing polymers, yet they are both thermally stable at required processing temperatures and can form suitably adherent, pinhole-free coatings on electronic component substrates.
Inventors
- 👤 Allyson J. Beuhler
- 👤 Neal R. Nowicki
- 👤 Douglas E. Fjare
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 02:00
CPC Classifications
C; C08; C08G; C08G73/00; C08G73/06; C08G73/10; C08G73/1046; C08G73/105; C08G73/1067; C08G73/1071; H; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0313; H05K1/032; H05K1/0346; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31678; Y10T428/31681; Y10T428/31721
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
68 words
An interlevel dielectric comprising a thin layer of a polyimide or copolyimide made essentially from a compound selected form the group consisting of 2,2-bis(3,4-dicarboxyphenyl)propane dianhydride, 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride, and their respective acids and esters, and an aromatic diamine selected from the group consisting of 2,2-bis(4-aminophenyl)propane and 4,4'-bis(p-aminophenoxy)biphenyl coated on a substrate to form a coated substrate overlayed with a thin adhering layer of a metal or an inorganic material.
Claim 2
Dependent Claim
68 words
An interlevel dielectric comprising a thin layer of a polyimide or copolyimide made essentially from a compound selected form the group consisting of 2,2-bis(3,4-dicarboxyphenyl)propane dianhydride, 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride, and their respective acids and esters, and an aromatic diamine selected from the group consisting of 2,2-bis(4-aminophenyl)propane and 4,4'-bis(p-aminophenoxy)biphenyl coated on a substrate to form a coated substrate overlayed with a thin adhering layer of a metal or an inorganic material.
Claim 3
Dependent Claim
34 words
Said interlevel dielectric of claim 1 wherein said substrate is selected from the group consisting of silicon, silicon dioxide, silicon nitride, silicon oxynitride, aluminum nitride, gallium arsenide, aluminum oxide, berylium oxide, and tantalum nitride.
Claim 4
Dependent Claim
16 words
Said interlevel dielectric of claim 1 wherein said substrate is silicon, silicon dioxide, or gallium arsenide.
Claim 5
Dependent Claim
12 words
Said interlevel dielectric of claim 1 wherein said aromatic diamine is 4,4-bis(p-aminophenoxy)biphenyl.
Claim 6
Dependent Claim
28 words
Said interlevel dielectric of claim 4 wherein said substrate is silicon, silicon dioxide, silicon nitride, silicon oxynitride, aluminum nitride, gallium arsenide, aluminum oxide, beryllium oxide and tantalum nitride.
Claim 7
Dependent Claim
16 words
Said interlevel dielectric of claim 4 wherein said substrate is silicon, silicon dioxide, or gallium arsenide.
Claim 8
Dependent Claim
22 words
The interlevel dielectric of claim 1 having at least one multilevel scheme comprising sequential layers of aluminum, polyimide or copolyimide, and aluminum.
Claim 9
Dependent Claim
11 words
The interlevel dielectric of claim 1 wherein said substrate is aluminum.
Claim 10
Dependent Claim
16 words
The interlevel dielectric of claim 1 wherein said thin adhering layer of a metal is aluminum.
Claim 11
Dependent Claim
63 words
An interlevel dielectric comprising a thin layer of a polyimide or copolyimide made essentially from a compound selected from the group consisting of 2,2-bis(3,4-dicarboxyphenyl)propane dianhydride, 2,2-bis (3,4-dicarboxyphenyl) hexafluoropropane dianhydride, and their respective acids and esters, and 2,2-bis{4-(p-aminophenoxy)phenyl} propane coated on a substrate to form a coated substrate, said coated substrate overlayed with a thin adhering layer of a metal or an inorganic material.
Claim 12
Dependent Claim
63 words
An interlevel dielectric comprising a thin layer of a polyimide or copolyimide made essentially from a compound selected from the group consisting of 2,2-bis(3,4-dicarboxyphenyl)propane dianhydride, 2,2-bis (3,4-dicarboxyphenyl) hexafluoropropane dianhydride, and their respective acids and esters, and 2,2-bis{4-(p-aminophenoxy)phenyl} propane coated on a substrate to form a coated substrate, said coated substrate overlayed with a thin adhering layer of a metal or an inorganic material.
Claim 13
Dependent Claim
34 words
Said interlevel dielectric of claim 10 wherein said substrate is selected from the group consisting of silicon, silicon dioxide, silicon nitride, silicon oxynitride, aluminum nitride, gallium arsenide, aluminum oxide, beryllium oxide, and tantalum nitride.
Claim 14
Dependent Claim
16 words
Said interlevel dielectric of claim 10 wherein said substrate is silicon, silicon dioxide, or gallium arsenide.
Claim 15
Dependent Claim
22 words
The interlevel dielectric of claim 10 having at least one multilevel scheme comprising sequential layers of aluminum, polyimide or copolyimide, and aluminum.
Claim 16
Dependent Claim
11 words
The interlevel dielectric of claim 10 wherein said substrate is aluminum.
Claim 17
Dependent Claim
16 words
The interlevel dielectric of claim 10 wherein said thin adhering layer of a metal is aluminum.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1996-04-26 | 1996-10-26 | 1997-04-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-26 | 2000-10-26 | 2001-04-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-26 | 2004-10-26 | 2005-04-27 | $7700.00 | Window Closed / Lapsed |