US5221450A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrostatic chucking method
Assignee: Toshiba Corp
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Filing: 1991-08-06
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Granted: 1993-06-22
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Expires: 2011-08-06
Abstract
Abstract Disclosed is an electrostatic chucking method, comprising the steps of: (a) placing a substrate to be chucked electrostatically on a chucking material containing an electrode; (b) chucking the substrate to the chucking material by supplying a predetermined electrical potential to the electrode in the chucking material; (c) removing the substrate from the chucking material; and (d) eliminating residual charges on the chucking material by sputtering it with a plasma gas for a predetermined period. Further, the plasma gas may be capable of etching the chucking material.
Inventors
- 👤 Kei Hattori
- 👤 Makoto Sekine
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 18:34
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32798; H01J37/32853; H01J37/32862; H10; H10P; H10P72/00; H10P72/70; H10P72/72; H10P72/722; H01J2237/00; H01J2237/004; H01J2237/0041; H01J2237/0044; H01J2237/0047; H01J2237/20; H01J2237/2007
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
73 words
An electrostatic chucking method, comprising the steps of: (a) placing a substrate to be chucked electrostatically on a chucking material containing an electrode therein; (b) chucking the substrate to the chucking material by supplying a predetermined electrical potential to the electrode in the chucking material; (c) removing the substrate from the chucking material; and (d) eliminating residual charges on the chucking material by sputtering it with a plasma gas for a predetermined period.
Claim 2
Dependent Claim
73 words
An electrostatic chucking method, comprising the steps of: (a) placing a substrate to be chucked electrostatically on a chucking material containing an electrode therein; (b) chucking the substrate to the chucking material by supplying a predetermined electrical potential to the electrode in the chucking material; (c) removing the substrate from the chucking material; and (d) eliminating residual charges on the chucking material by sputtering it with a plasma gas for a predetermined period.
Claim 3
Dependent Claim
23 words
An electrostatic chucking method according to claim 1, wherein the chucking material is an insulator, and the plasma gas is N 2 gas.
Claim 4
Dependent Claim
80 words
An electrostatic chucking method, comprising the steps of: (a) placing a substrate to be chucked on a chucking material containing an electrode therein; (b) chucking the substrate to the chucking material by supplying a predetermined electrical potential to the electrode in the chucking material; (c) removing the substrate from the chucking material; and (d) eliminating residual charges on the chucking material by sputtering it for a predetermined period with a plasma gas which is capable of etching the chucking material.
Claim 5
Dependent Claim
80 words
An electrostatic chucking method, comprising the steps of: (a) placing a substrate to be chucked on a chucking material containing an electrode therein; (b) chucking the substrate to the chucking material by supplying a predetermined electrical potential to the electrode in the chucking material; (c) removing the substrate from the chucking material; and (d) eliminating residual charges on the chucking material by sputtering it for a predetermined period with a plasma gas which is capable of etching the chucking material.
Claim 6
Dependent Claim
24 words
An electrostatic chucking method according to claim 3, wherein the chucking material is an insulator, and the plasma gas is a halogen containing gas.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-21 | 1996-12-21 | 1997-06-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-21 | 2000-12-21 | 2001-06-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-21 | 2004-12-21 | 2005-06-22 | $7700.00 | Window Closed / Lapsed |