Method and apparatus for removal of subsurface damage in semiconductor materials by plasma etching

Claim 2

A material removal tool for performing plasma assisted chemical etching reactions on the surface of a substrate so as to remove subsurface damage thereon, said tool comprising a reactor having: means for generating a local plasma etching reaction at a localized region of the substrate, said means including, means for defining a plasma chamber cavity as well as means for supplying a process gas to the plasma chamber cavity at a pressure greater than 1 Torr and for supplying rf power to said process gas within the plasma chamber cavity so as to cause said gas to disassociate into a reactive plasma; means for surrounding an outer periphery of the plasma chamber cavity so as to suppress plasma generation outside of said plasma chamber cavity; and means for adjusting the position of said plasma chamber cavity with respect to said substrate so as to position the local plasma etching reaction over a localized region of the substrate.

Claim 3

The material removal tool of claim 1, wherein the means for supplying rf power includes a first electrode positioned within the plasma chamber cavity, and a second electrode positioned outside the plasma chamber cavity so that the substrate is positioned between the first and second electrodes so as to complete an electrical circuit for supplying rf power to the reactive gas within the plasma chamber cavity.

Claim 4

The material removal tool of claim 1, wherein the means for defining a plasma chamber cavity include a first dielectric insulator.

Claim 5

The material removal tool of claim 3, wherein the first dielectric insulator is preferably fabricated from a non-contaminating dielectric material.

Claim 6

The material removal tool of claim 1, wherein the means for supplying a reactive gas to the plasma chamber cavity includes an electrically conductive and porous gas diffuser.

Claim 7

The material removal tool of claim 1, wherein the means for surrounding the outer periphery of the plasma chamber cavity is a second dielectric insulator extending outward from the first dielectric insulator so as to insulate conductive and proximate surfaces, and thereby facilitate extinction of any plasma outside the plasma chamber cavity.

Claim 8

The material removal tool of claim 1, wherein the means for adjusting the position of said plasma chamber cavity with respect to said substrate is an X-Y positioning table.

Claim 9

A material removal tool for performing plasma assisted chemical etching reactions on the surface of a substrate so as to remove subsurface damage thereon, said tool comprising a reactor having: a housing; a first dielectric insulator positioned within the housing for defining a plasma chamber having a cavity for performing a local plasma etching reaction about a localized region of a substrate; means for supplying the plasma chamber with a flow of process gas; means for providing the process gas within the plasma chamber at a pressure greater than 1 Torr with rf power so as to generate a plasma therein; a second dielectric insulator positioned within the housing and around the first dielectric insulator, said second dielectric insulator extending outward from the first dielectric insulator so as to insulate conductive and proximate surfaces, and thereby facilitating extinction of any plasma outside the plasma chamber cavity; means for supporting the substrate; and means for adjusting the position of said plasma chamber with respect to said substrate surface.

Claim 10

A material removal tool for performing plasma assisted chemical etching reactions on the surface of a substrate so as to remove subsurface damage thereon, said tool comprising a reactor having: a housing; a first dielectric insulator positioned within the housing for defining a plasma chamber having a cavity for performing a local plasma etching reaction about a localized region of a substrate; means for supplying the plasma chamber with a flow of process gas; means for providing the process gas within the plasma chamber at a pressure greater than 1 Torr with rf power so as to generate a plasma therein; a second dielectric insulator positioned within the housing and around the first dielectric insulator, said second dielectric insulator extending outward from the first dielectric insulator so as to insulate conductive and proximate surfaces, and thereby facilitating extinction of any plasma outside the plasma chamber cavity; means for supporting the substrate; and means for adjusting the position of said plasma chamber with respect to said substrate surface.

Claim 11

The material removal tool of claim 8, wherein the means for supplying rf power includes a first electrode positioned within the plasma chamber cavity, an electrically conductive rf gas diffuser, and a second electrode positioned outside the plasma chamber cavity so that the substrate is positioned between the first and second electrodes so as to complete an electrical circuit for supplying rf power to the reactive gas within the plasma chamber cavity.

Claim 12

The material removal tool of claim 9, wherein the first electrode having upper and lower surfaces is positioned so that the upper surface is in contact with the ceiling surface of the plasma chamber cavity and the rf gas diffuser, having an upper and lower surface is positioned so that its upper surface is in contact with the lower surface of the first electrode.

Claim 13

The material removal tool of claim 10, wherein the upper and lower surface areas of the first electrode have approximately the same area and approximately the same planar geometry as the surface of the ceiling of the plasma chamber cavity.

Claim 14

The material removal tool of claim 10, wherein the upper and lower surface areas of the electrically conductive gas diffuser have approximately the same area and approximately the same planar geometry as the surface of the ceiling of the plasma chamber cavity.

Claim 15

The material removal tool of claim 9, wherein the electrically conductive gas diffuser is fabricated from porous silicon carbide.

Claim 16

The material removal tool of claim 9, wherein the electrically conductive gas diffuser is fabricated from graphite.

Claim 17

The material removal tool of claim 9, wherein the second electrode is maintained at substantially at ground potential.

Claim 18

The material removal tool of claim 8, wherein the means for adjusting the position of said plasma chamber with respect to said substrate surface in the orthogonal direction comprises an x-y positioning table.

Claim 19

The material removal tool of claim 8, wherein said housing includes means for applying a vacuum to the housing to remove reaction product and exces reactive gas.

Claim 20

The material removal tool of claim 8, further comprising extending the first dielectric insulator defining the walls of said plasma chamber cavity a predetermined amount beyond the surface of the second dielectric proximate to the substrate surface so as to create a region of high plasma and low reactive gas flow conductance circumferentially adjacent to a site where plasma etching is occurring.

Claim 21

A material removal tool for performing confined plasma assisted chemical etching reactions on the surface of a substrate comprising a reactor having: a housing means for carrying out a local plasma etching reaction including means for controlling the temperature and pressure of the environment within the housing; a first dielectric insulator positioned within the housing for defining a plasma chamber having a cavity for performing a local plasma etching reaction about a localized region of a substrate; means for supplying the plasma chamber with a flow of process gas including a gas diffuser; means for providing the process gas within the plasma chamber at a pressure greater than 1 Torr with rf power so as to generate a plasma therein, said means including a first electrode positioned within the plasma chamber cavity, an electrically conductive rf gas diffuser, and a second electrode positioned outside the plasma chamber cavity so that the substrate is positioned between the first and second electrodes so as to complete an electrical circuit for supplying rf power to the reactive gas within the plasma chamber cavity; a second dielectric insulator positioned within the housing and around the first dielectric insulator, said second dielectric insulator extending outward from the first dielectric insulator so as to insulate conductive and proximate surfaces, and thereby facilitating extinction of any plasma outside the plasma chamber cavity, and extending downward toward the substrate surface a distance shorter than the first dielectric insulator so as to allow the first dielectric insulator to create a region of high plasma and reactive flow impedance circumferentially adjacent to a site where plasma etching is occurring so that plasma outside the region is extinguished; means for supporting the substrate; and an X-Y positioning table means for adjusting the position of said substrate surface with respect to the plasma chamber in an orthogonal direction.

Claim 22

A material removal tool for performing confined plasma assisted chemical etching reactions on the surface of a substrate comprising a reactor having: a housing means for carrying out a local plasma etching reaction including means for controlling the temperature and pressure of the environment within the housing; a first dielectric insulator positioned within the housing for defining a plasma chamber having a cavity for performing a local plasma etching reaction about a localized region of a substrate; means for supplying the plasma chamber with a flow of process gas including a gas diffuser; means for providing the process gas within the plasma chamber at a pressure greater than 1 Torr with rf power so as to generate a plasma therein, said means including a first electrode positioned within the plasma chamber cavity, an electrically conductive rf gas diffuser, and a second electrode positioned outside the plasma chamber cavity so that the substrate is positioned between the first and second electrodes so as to complete an electrical circuit for supplying rf power to the reactive gas within the plasma chamber cavity; a second dielectric insulator positioned within the housing and around the first dielectric insulator, said second dielectric insulator extending outward from the first dielectric insulator so as to insulate conductive and proximate surfaces, and thereby facilitating extinction of any plasma outside the plasma chamber cavity, and extending downward toward the substrate surface a distance shorter than the first dielectric insulator so as to allow the first dielectric insulator to create a region of high plasma and reactive flow impedance circumferentially adjacent to a site where plasma etching is occurring so that plasma outside the region is extinguished; means for supporting the substrate; and an X-Y positioning table means for adjusting the position of said substrate surface with respect to the plasma chamber in an orthogonal direction.

Claim 25

The method of claim 20, wherein the area and the profile of etching is controlled by moving the substrate in two or more directions with respect to a fixed plasma chamber.

Claim 26

The method of claim 20, wherein the area and profile of etching is controlled by moving the plasma chamber in two or more directions with respect to a fixed substrate.

Claim 27

The method of claim 20, wherein an etched void having approximately vertical and perpendicular walls with respect to the substrate surface is fabricated by positioning the plasma chamber closer than a sheath width to the surface of the etchable substrate.

Claim 28

The method of claim 20, wherein an etched void having sloping walls is fabricated by positioning the plasma chamber further than a sheath width to the surface of the etchable substrate.

Claim 29

The method of claim 20, wherein the reactive gas has high electronegativity.

Claim 30

The method of claim 25, wherein the reactive gas is sulfur hexafluoride.

Claim 31

The method of claim 25, wherein the reactive gas is nitrogen trifluoride.