US5241183A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vertical xy stage
Assignee: NTT Inc
•
Filing: 1992-03-19
•
Granted: 1993-08-31
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Expires: 2012-03-19
Abstract
Abstract A vertical XY stage includes a base, an X-axis slider, a Y-axis slider, and a stage. The X-axis slider is movably mounted on the base. The Y-axis slider is movably mounted on the X-axis slider. Workpieces are arranged on the stage. The Y-axis slider includes a horizontally arranged slider main body, and a vertical portion vertically arranged and having a guide for allowing the Y-axis slider to move in a Y-axis direction. The stage is arranged in a space surrounded by the slider main body and the vertical portion of the Y-axis slider. The stage can be pivoted through a shaft mounted on the Y-axis slider.
Inventors
- 👤 Munenori Kanai
- 👤 Sunao Ishihara
- 👤 Atsunobu Une
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 06:46
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/50; G; G12; G12B; G12B5/00
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
99 words
A vertical XY stage comprising: a base; an X-axis slider movably mounted on said base; a Y-axis slider movably mounted on said X-axis slider; and a stage on which workpieces are arranged, wherein said Y-axis slider includes a horizontally arranged slider main body, and a vertical portion vertically arranged and having a guide for allowing said Y-axis slider to move in a Y-axis direction, said stage is arranged in a space surrounded by said slider main body and said vertical portion of said Y-axis slider, and wherein said stage is pivoted through a shaft mounted on said Y-axis slider.
Claim 2
Dependent Claim
99 words
A vertical XY stage comprising: a base; an X-axis slider movably mounted on said base; a Y-axis slider movably mounted on said X-axis slider; and a stage on which workpieces are arranged, wherein said Y-axis slider includes a horizontally arranged slider main body, and a vertical portion vertically arranged and having a guide for allowing said Y-axis slider to move in a Y-axis direction, said stage is arranged in a space surrounded by said slider main body and said vertical portion of said Y-axis slider, and wherein said stage is pivoted through a shaft mounted on said Y-axis slider.
Claim 3
Dependent Claim
32 words
An XY stage according to claim 1, wherein said shaft for pivoting said stage is mounted on said slider main body of said Y-axis slider to allow said stage to be reclined.
Claim 4
Dependent Claim
29 words
An XY stage according to claim 2, wherein said shaft includes a spring for reducing an effect of gravity applied to said shaft when said stage is set upright.
Claim 5
Dependent Claim
32 words
An XY stage according to claim 1, wherein said shaft for pivoting said stage is mounted on said slider main body of said Y-axis slider to allow said stage to horizontally pivot.
Claim 6
Dependent Claim
34 words
An XY stage according to claim 1, further comprising clutch means for coupling said stage to a driving source for pivoting said stage when said X- and Y-axis sliders are located at predetermined positions.
Claim 7
Dependent Claim
72 words
An XY stage according to claim 1, wherein a pulley is fixed and arranged above a vertical portion of said X-axis slider, a taking-up drum using a spiral spring is arranged below said X-axis slider, and said Y-axis slider and said taking-up drum are coupled to each other through said pulley, so that a weight applied to said Y-axis slider and torque of said taking-up drum are balanced by said spiral spring.
Claim 8
Dependent Claim
39 words
An XY stage according to claim 1, further comprising: a fixing member integrally formed upright with said base; an X-axis sub-slider arranged on said fixing member; and a connecting plate arranged between said X-axis sub-slider and said Y-axis slider.
Claim 9
Dependent Claim
17 words
An XY stage according to claim 7, wherein a Z-shaped groove is formed on said connecting plate.
Claim 10
Dependent Claim
19 words
An XY stage according to claim 1, wherein said X- and Y-axis sliders are guided through air hydrostatic guides.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-08-30 | 1997-03-01 | 1997-08-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-08-30 | 2001-03-01 | 2001-08-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-08-30 | 2005-03-01 | 2005-08-31 | $7700.00 | Window Closed / Lapsed |