Electrochemical planarization

Claim 2

Method of forming a planarized thin film metal interconnect in a dielectric layer on a substrate, comprising: forming a trench or via in the dielectric layer for the metal interconnect; forming on the dielectric layer a metal layer with a substantially flat surface which fills the trench or via without voids and extends substantially flat over the surface overlying both the trench or via and the surrounding dielectric layer by substantially isotropically depositing by electroplating or electroless plating on the dielectric layer a metal layer in sufficient depth to create said flat surface; etching back by electropolishing the flat metal layer to the dielectric layer to form a substantially flat surface of metal embedded in and flush with the dielectric layer.

Claim 3

The method of claim 1 wherein the trench or via is formed in the dielectric layer by etching.

Claim 4

The method of claim 1 further comprising forming the metal layer of gold, silver, copper, aluminum, nickel, zinc or chromium.

Claim 5

The method of claim 1 wherein the metal layer is deposited by pulsed plating.

Claim 6

The method of claim 1 wherein the etching back by electropolishing is performed by: connecting the substrate to the anode of a DC voltage source; placing the substrate in an electrolyte; flowing a DC current of sufficient current density through the substrate.

Claim 7

The method of claim 1 further comprising performing the etching back by electropolishing on a plurality of substrates simultaneously.

Claim 8

The method of claim 1 further comprising forming an additional dielectric layer over the etched back metal interconnect and repeating the steps of forming a trench or via, forming a metal layer with a substantially flat surface and etching back the metal layer to form a multilevel interconnect.

Claim 9

Method of forming a planarized thin film metal interconnect in a dielectric layer on a substrate, comprising: forming a trench or via in the dielectric layer for the metal interconnect; forming on the dielectric layer a metal layer with a substantially flat surface which fills the trench or via without voids and extends substantially flat over the surface overlying both the trench or via and the surrounding dielectric layer by substantially isotropically depositing by electroplating or electroless plating on the dielectric layer a metal layer to a depth of about half the width of the widest trench or via formed in the dielectric layer which is to be filled with metal to create said flat surface; etching back by electropolishing the flat metal layer to the dielectric layer to form a substantially flat surface of metal embedded in and flush with the dielectric layer.

Claim 10

Method of forming a planarized thin film metal interconnect in a dielectric layer on a substrate, comprising: forming a trench or via in the dielectric layer for the metal interconnect; forming on the dielectric layer a metal layer with a substantially flat surface which fills the trench or via without voids and extends substantially flat over the surface overlying both the trench or via and the surrounding dielectric layer by substantially isotropically depositing by electroplating or electroless plating on the dielectric layer a metal layer to a depth of about half the width of the widest trench or via formed in the dielectric layer which is to be filled with metal to create said flat surface; etching back by electropolishing the flat metal layer to the dielectric layer to form a substantially flat surface of metal embedded in and flush with the dielectric layer.

Claim 11

The method of claim 1 further comprising stopping electropolishing just before all metal is totally removed from the dielectric layer and then removing any residual metal by ion milling.

Claim 12

Method of forming a planarized thin film metal interconnect in a dielectric layer on a substrate, comprising: forming a trench or via in the dielectric layer for the metal interconnect; forming a seed bilayer on the dielectric layer, the seed bilayer comprising a bottom layer of conducting material on which electroplating and electropolishing do not occur and a top layer of another conducting material on which electropolishing and electroplating do occur; forming on the dielectric layer a metal layer with a substantially flat surface which fills the trench or via without voids and extends substantially flat over the surface overlying both the trench or via and the surrounding dielectric layer by substantially isotropically depositing by electroplating or electroless plating on the top layer of the seed bilayer a metal layer in sufficient depth of create said flat surface; etching back by electropolishing the flat metal layer to the bottom layer of the seed bilayer on the dielectric layer outside the trench or via to form a substantially flat surface of metal embedded in and flush with the dielectric layer; removing the bottom layer of the seed bilayer on the dielectric layer outside the trench or via.

Claim 13

Method of forming a planarized thin film metal interconnect in a dielectric layer on a substrate, comprising: forming a trench or via in the dielectric layer for the metal interconnect; forming a seed bilayer on the dielectric layer, the seed bilayer comprising a bottom layer of conducting material on which electroplating and electropolishing do not occur and a top layer of another conducting material on which electropolishing and electroplating do occur; forming on the dielectric layer a metal layer with a substantially flat surface which fills the trench or via without voids and extends substantially flat over the surface overlying both the trench or via and the surrounding dielectric layer by substantially isotropically depositing by electroplating or electroless plating on the top layer of the seed bilayer a metal layer in sufficient depth of create said flat surface; etching back by electropolishing the flat metal layer to the bottom layer of the seed bilayer on the dielectric layer outside the trench or via to form a substantially flat surface of metal embedded in and flush with the dielectric layer; removing the bottom layer of the seed bilayer on the dielectric layer outside the trench or via.

Claim 14

The method of claim 1 further comprising rotating the substrate while electropolishing to provide more uniform electropolishing.

Claim 15

The method of claim 1 further comprising placing the substrate in a tube which restricts flow against the face of the substrate while electropolishing to provide more uniform electropolishing.