US5264246A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Spin coating method
Assignee: Mitsubishi Electric Corp
•
Filing: 1992-01-21
•
Granted: 1993-11-23
•
Expires: 2012-01-21
Abstract
Abstract A spin coating method includes the steps of applying a coating material on the surface of a substrate, rotating the substrate about a first axis, and revolving the substrate about a second axis while tilting the substrate towards the second axis. The rotating step spreads the coating material over the surface of the substrate, and the step of revolving while tilting the substrate smoothens the surface of the coating material. At least the rotating step may be performed in an atmosphere containing a solvent vapor. A spin coating apparatus includes a nozzle for applying a coating material to the surface of a substrate, a chuck for rotating the substrate about a first axis, a support arm for revolving the substrate about a second axis, and a tilting mechanism for tilting the surface of the substrate towards the center of the second axis while the substrate is revolving.
Inventors
- 👤 Masahiko Ikeno
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 20:08
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0448; B; B05; B05D; B05D1/00; B05D1/002; B05D1/005; H10P72/0402; H10P72/0404
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
51 words
A spin coating method comprising: applying a liquid coating material to a substrate; and after applying the coating material to the substrate, rotating the substrate about a first axis generally perpendicular to the substrate and revolving the substrate about a second axis while tilting the substrate relative to the second axis.
Claim 2
Dependent Claim
51 words
A spin coating method comprising: applying a liquid coating material to a substrate; and after applying the coating material to the substrate, rotating the substrate about a first axis generally perpendicular to the substrate and revolving the substrate about a second axis while tilting the substrate relative to the second axis.
Claim 3
Dependent Claim
25 words
A spin coating method as claimed in claim 1, comprising revolving the substrate about the second axis while rotating the substrate about the first axis.
Claim 4
Dependent Claim
20 words
A spin coating method as claimed in claim 1, including rotating the substrate in an atmosphere containing a solvent vapor.
Claim 5
Dependent Claim
22 words
A spin coating method as claimed in claim 3 including introducing the vapor of the solvent into a chamber surrounding the substrate.
Claim 6
Dependent Claim
35 words
A spin coating method as claimed in claim 4 wherein the coating material contains a solvent including producing the solvent vapor in the chamber from the same solvent that is contained in the coating material.
Claim 7
Dependent Claim
35 words
A spin coating method as claimed in claim 1, including tilting the substrate such that the vector sum of gravity and centrifugal force acting on the coating material is substantially perpendicular to the the substrate.
Claim 8
Dependent Claim
38 words
A spin coating method as claimed in claim 1 including revolving the substrate at a first speed to smooth the coating material and revolving at a second speed, lower than the first speed, to dry the coating material.
Claim 9
Dependent Claim
46 words
A spin coating method comprising: rotating a substrate having a liquid coating material on a surface thereof about a first axis to spread the coating material over the surface; and revolving the substrate about a second axis while tilting the substrate relative to the second axis.
Claim 10
Dependent Claim
46 words
A spin coating method comprising: rotating a substrate having a liquid coating material on a surface thereof about a first axis to spread the coating material over the surface; and revolving the substrate about a second axis while tilting the substrate relative to the second axis.
Claim 11
Dependent Claim
17 words
A spin coating method as claimed in claim 8 wherein the first and second axes are parallel.
Claim 12
Dependent Claim
24 words
A spin coating method as claimed in claim 8 wherein the first axis intersects the substrate at a point spaced from the second axis.
References Cited (Backward Citations)
US3858547A
Cited
JPS5247836A
Cited
US4124411A
Cited
JPS5372464A
Cited
JPS5536923A
Cited
JPS57107032A
Cited
US4528934A
Cited
JPS6042762A
Cited
JPS6042729A
Cited
JPS60130830A
Cited
JPS60161767A
Cited
JPS60189934A
Cited
JPS60226125A
Cited
JPS6129125A
Cited
JPS6151633A
Cited
JPS61125017A
Cited
JPS61206221A
Cited
JPS61207019A
Cited
JPS61246990A
Cited
JPS61291068A
Cited
US4741926A
Cited
JPS62219522A
Cited
JPS6354725A
Cited
US4822639A
Cited
US4806504A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-22 | 1997-05-24 | 1997-11-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-22 | 2001-05-24 | 2001-11-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-22 | 2005-05-24 | 2005-11-23 | $7700.00 | Window Closed / Lapsed |