Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
56 words
A method of gas phase synthesis of a material comprising the steps of measuring, by ellipsometry, optical properties of a surface of a sample on which a film is being formed during the formation of the film, and of evaluating the density of nucleation from changes in the ellipsometric parameter angles during formation of the film.
Claim 2
Independent Claim
56 words
A method of gas phase synthesis of a material comprising the steps of measuring, by ellipsometry, optical properties of a surface of a sample on which a film is being formed during the formation of the film, and of evaluating the density of nucleation from changes in the ellipsometric parameter angles during formation of the film.
Claim 3
Dependent Claim
28 words
A method of gas phase synthesis according to claim 1, wherein the density of nucleation is controlled by adjusting film forming synthesis conditions during formation of the film.
Claim 4
Dependent Claim
25 words
A method of gas phase synthesis according to claim 1, wherein the density of nucleation is controlled by adjusting a temperature of the sample substrate.
Claim 5
Independent Claim
23 words
A method of gas phase synthesis according to any one of claims 1 through 3, wherein a film to be synthesized is diamond.
Claim 6
Dependent Claim
85 words
In a method for the gas phase synthesis of a material in a vacuum chamber having a substrate electrode provided with a cooling means, a discharge electrode and a gas inlet means, the improvement comprising determining the density of nucleation of said material deposited upon said substrate by measuring the ellipsometric parameter angles Ψ and Δ during deposition of a material and adjusting at least one of the pressure within the chamber and a temperature of the substrate to obtain the desired density of nucleation.
Claim 7
Dependent Claim
85 words
In a method for the gas phase synthesis of a material in a vacuum chamber having a substrate electrode provided with a cooling means, a discharge electrode and a gas inlet means, the improvement comprising determining the density of nucleation of said material deposited upon said substrate by measuring the ellipsometric parameter angles Ψ and Δ during deposition of a material and adjusting at least one of the pressure within the chamber and a temperature of the substrate to obtain the desired density of nucleation.
Claim 8
Dependent Claim
49 words
In a method of gas phase synthesis according to claim 5, the improvement wherein the ellipsometric parameter angles Ψ and Δ are measured by projecting polarized light through a window into said vacuum chamber into said material formed upon said substrate and analyzing the light reflected from said material.
Claim 9
Independent Claim
63 words
A method of manufacturing a material comprising thin films which grow in the form of nuclei, said method comprising the steps of: measuring by ellipsometry conditions of a surface of said material during growing of said films; and evaluating a density of nucleation from a value of said ellipsometry or changes of said value, said evaluation being made during growth of said nuclei.
Claim 10
Independent Claim
63 words
A method of manufacturing a material comprising thin films which grow in the form of nuclei, said method comprising the steps of: measuring by ellipsometry conditions of a surface of said material during growing of said films; and evaluating a density of nucleation from a value of said ellipsometry or changes of said value, said evaluation being made during growth of said nuclei.