US5280174A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for producing a thermal atomic oxygen beam
Assignee: National Aeronautics and Space Administration
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Filing: 1993-01-25
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Granted: 1994-01-18
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Expires: 2013-01-25
Abstract
Abstract Atomic oxygen atoms are routed to a material through a sufficiently tortuous path so that vacuum ultraviolet radiation is obstructed from arriving at the surface of the material. However, the material surface continues to be exposed to the atomic oxygen.
Inventors
- 👤 Bruce A. Banks
- 👤 Sharon K. Rutledge
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 03:41
CPC Classifications
H; H05; H05H; H05H3/00; H05H3/02
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
98 words
Apparatus for exposing material to atomic oxygen comprising a chamber, means for mounting said material in said chamber, means for evacuating said chamber with said material mounted therein for establishing a vacuum environment for said material, means for producing atomic oxygen atoms from oxygen plasma wherein vacuum ultraviolet radiation is produced, means for conveying said atomic oxygen atoms into said chamber, and means for routing said atomic oxygen atoms to said material through a sufficiently tortuous path so that vacuum ultraviolet radiation is obstructed from arriving at said material while atomic oxygen continues to arrive at said material.
Claim 2
Dependent Claim
98 words
Apparatus for exposing material to atomic oxygen comprising a chamber, means for mounting said material in said chamber, means for evacuating said chamber with said material mounted therein for establishing a vacuum environment for said material, means for producing atomic oxygen atoms from oxygen plasma wherein vacuum ultraviolet radiation is produced, means for conveying said atomic oxygen atoms into said chamber, and means for routing said atomic oxygen atoms to said material through a sufficiently tortuous path so that vacuum ultraviolet radiation is obstructed from arriving at said material while atomic oxygen continues to arrive at said material.
Claim 3
Dependent Claim
19 words
Apparatus as claimed in claim 1 wherein the means for producing atomic oxygen atoms includes a microwave power system.
Claim 4
Dependent Claim
15 words
Apparatus as claimed in claim 2 wherein the vacuum ultraviolet radiation is at 130 nm.
Claim 5
Dependent Claim
23 words
Apparatus as claimed in claim 3 including a pipe having a "S" shaped configuration for routing said atomic oxygen atoms to said material.
Claim 6
Dependent Claim
11 words
Apparatus as claimed in claim 4 wherein the pipe is glass.
Claim 7
Dependent Claim
12 words
Apparatus as claimed in claim 4 where the pipe is fused silica.
Claim 8
Dependent Claim
28 words
Apparatus as claimed in claim 3 where the means for routing the oxygen atoms to said material include a triangular prism which obstructs VUV illumination of the material.
Claim 9
Dependent Claim
31 words
Apparatus as claimed in claim 7 wherein the triangular prism is of a glass material selected from the group consisting of SiO 2 fluorosilicate, soda lime, and other metal oxide glasses.
Claim 10
Dependent Claim
36 words
Apparatus as claimed in claim 8 wherein the triangular glass prism contains a sheet of a non ultraviolet radiation transmitting material for inhibiting longer wavelength ultraviolet radiation greater than 200 nm from impinging on the material.
Claim 11
Dependent Claim
12 words
Apparatus as claimed in claim 9 wherein the sheet is aluminum foil.
Claim 12
Independent Claim
90 words
A method for exposing material to atomic oxygen comprising mounting said material in a chamber, evacuating said chamber with said material mounted therein thereby establishing a vacuum environment for said material, producing atomic oxygen atoms from oxygen plasma wherein vacuum ultraviolet radiation is produced, conveying said atomic oxygen atoms into said chamber, and routing said atomic oxygen atoms to said material in said chamber through a sufficiently tortuous path so that vacuum ultraviolet radiation is obstructed from arriving at said material while atomic oxygen continues to arrive at said material.
Claim 13
Independent Claim
90 words
A method for exposing material to atomic oxygen comprising mounting said material in a chamber, evacuating said chamber with said material mounted therein thereby establishing a vacuum environment for said material, producing atomic oxygen atoms from oxygen plasma wherein vacuum ultraviolet radiation is produced, conveying said atomic oxygen atoms into said chamber, and routing said atomic oxygen atoms to said material in said chamber through a sufficiently tortuous path so that vacuum ultraviolet radiation is obstructed from arriving at said material while atomic oxygen continues to arrive at said material.
Claim 14
Dependent Claim
17 words
A method as claimed in claim 11 wherein the atomic oxygen atoms are produced by microwave power.
Claim 15
Dependent Claim
16 words
A method as claimed in claim 12 wherein vacuum ultraviolet radiation at 130 um is produced.
Claim 16
Dependent Claim
24 words
A method as claimed in claim 13 including routing said atomic oxygen atoms to said material along an "S" shaped path in said chamber.
Claim 17
Dependent Claim
16 words
A method as claimed in claim 14 wherein the path is formed by a glass pipe.
Claim 18
Dependent Claim
17 words
A method as claimed in claim 14 wherein the path is formed by a fused silica pipe.
Claim 19
Dependent Claim
28 words
A method as claimed in claim 13 wherein the oxygen atoms are routed to said material with a triangular prism and UV illumination of the material is obstructed.
Claim 20
Dependent Claim
37 words
A method as claimed in claim 17 wherein the oxygen atoms are routed by a triangular prism of a glass material selected from the group consisting of SiO 2 , fluorosilicate, soda lime, and other metal oxide.
Claim 21
Dependent Claim
22 words
A method as claimed in claim 18 including inhibiting longer wavelength ultraviolet radiation greater than 200 nm from impinging on the material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-01-17 | 1997-07-19 | 1998-01-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-01-17 | 2001-07-19 | 2002-01-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-01-17 | 2005-07-19 | 2006-01-18 | $7700.00 | Window Closed / Lapsed |