Patent US3082190A successfully refreshed from Google Patents.
US5280677A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Positioning mechanism
Assignee: Canon Inc
•
Filing: 1993-03-09
•
Granted: 1994-01-25
•
Expires: 2013-03-09
Abstract
Abstract A positioning device, includes a first positioning portion for moving an article in a direction substantially perpendicular to a predetermined plane and/or in a direction inclined with respect to the predetermined plane; a second positioning portion for moving the article in a direction substantially parallel to the predetermined plane, wherein the first positioning portion is mounted on the second positioning portion; a base member on which the second positioning portion is mounted; and a position detecting system for controlling movement of the article through the first positioning portion, the position detecting system being operable to measure displacement with respect to the surface of the base member.
Inventors
- 👤 Tadayuki Kubo
- 👤 Eiji Osanai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 05:01
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; B; B23; B23Q; B23Q1/00; B23Q1/25; B23Q1/44; B23Q1/48; G03F7/708; G03F7/70858; G03F7/709
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
130 words
A device comprising: first positioning means for moving a movable member, on which an article is to be placed, in at least one of a direction substantially perpendicular to a predetermined plane and in a direction inclined with respect to the predetermined plane; second positioning means for moving the movable member in a direction substantially parallel to the predetermined plane, wherein said first positioning means is mounted on said second positioning means; a base member on which said second positioning means is mounted; position detecting means for controlling movement of the movable member through said first positioning means, said position detecting means being operable to measure displacement with respect to the surface of said base member; and damping means provided between said first positioning means and said second positioning means.
Claim 2
Independent Claim
130 words
A device comprising: first positioning means for moving a movable member, on which an article is to be placed, in at least one of a direction substantially perpendicular to a predetermined plane and in a direction inclined with respect to the predetermined plane; second positioning means for moving the movable member in a direction substantially parallel to the predetermined plane, wherein said first positioning means is mounted on said second positioning means; a base member on which said second positioning means is mounted; position detecting means for controlling movement of the movable member through said first positioning means, said position detecting means being operable to measure displacement with respect to the surface of said base member; and damping means provided between said first positioning means and said second positioning means.
Claim 3
Dependent Claim
15 words
A device according to claim 1, wherein said position detecting means includes a non-contact guage.
Claim 4
Dependent Claim
28 words
A device according to claim 1, wherein said first positioning means includes a plurality of actuator mechanisms and wherein said damping means includes a plurality of damping mechanisms.
Claim 5
Dependent Claim
34 words
A device according to claim 3, wherein said actuator mechanisms and said damping mechanisms are disposed substantially equiangularly on a plane substantially parallel to the predetermined plane, about a center of the movable member.
Claim 6
Dependent Claim
30 words
A device according to claim 4, wherein said actuator mechanisms and said damping mechanisms are disposed diametrically opposed to each other with respect to the center of the movable member.
Claim 7
Dependent Claim
13 words
A device according to claim 1, wherein the article is a semiconductor wafer.
Claim 8
Dependent Claim
15 words
A device according to claim 3, wherein the number of said actuator mechanisms is three.
Claim 9
Dependent Claim
111 words
A positioning device comprising: positioning means for moving a movable member, on which an article is to be placed in at least one of a direction substantially perpendicular to a predetermined plane and in a direction inclined with respect to the predetermined plane; and damping means provided between the movable member and a surface on which said positioning means is mounted, wherein said positioning means includes a plurality of actuator mechanisms and wherein said damping means includes a plurality of damping mechanisms, and wherein said actuator mechanisms and said damping mechanisms are disposed substantially equiangularly on a plane substantially parallel to the predetermined plane, about a center of the movable member.
Claim 10
Dependent Claim
111 words
A positioning device comprising: positioning means for moving a movable member, on which an article is to be placed in at least one of a direction substantially perpendicular to a predetermined plane and in a direction inclined with respect to the predetermined plane; and damping means provided between the movable member and a surface on which said positioning means is mounted, wherein said positioning means includes a plurality of actuator mechanisms and wherein said damping means includes a plurality of damping mechanisms, and wherein said actuator mechanisms and said damping mechanisms are disposed substantially equiangularly on a plane substantially parallel to the predetermined plane, about a center of the movable member.
Claim 11
Dependent Claim
20 words
A device according to claim 8, wherein said actuator mechanisms and said damping mechanisms are disposed with mutually shifted phases.
Claim 12
Dependent Claim
14 words
A device according to claim 8, wherein said damping means includes a damping rubber.
Claim 13
Dependent Claim
13 words
A device according to claim 8, wherein said damping means uses viscosity resistance.
Claim 14
Dependent Claim
13 words
A device according to claim 8, wherein the article is a semiconductor wafer.
Claim 15
Dependent Claim
15 words
A device according to claim 8, wherein the number of said actuator mechanisms is three.
Claim 16
Dependent Claim
117 words
A positioning device in a semiconductor element manufacturing apparatus, said device comprising: first positioning means for moving a movable member, on which a semiconductor wafer is to be placed in at least one of a direction substantially perpendicular to a predetermined plane and in a direction inclined with respect to the predetermined plane; second positioning means for moving the movable member in a direction substantially parallel to the predetermined plane, wherein said first positioning means is mounted on said second positioning means; a base member on which said second positioning means is mounted; and damping means provided between the movable member and the surface of said second positioning means on which said first positioning means is mounted.
Claim 17
Dependent Claim
117 words
A positioning device in a semiconductor element manufacturing apparatus, said device comprising: first positioning means for moving a movable member, on which a semiconductor wafer is to be placed in at least one of a direction substantially perpendicular to a predetermined plane and in a direction inclined with respect to the predetermined plane; second positioning means for moving the movable member in a direction substantially parallel to the predetermined plane, wherein said first positioning means is mounted on said second positioning means; a base member on which said second positioning means is mounted; and damping means provided between the movable member and the surface of said second positioning means on which said first positioning means is mounted.
Claim 18
Dependent Claim
131 words
A positioning device, comprising: first positioning means for moving a movable member, on which an article is to be placed, in at least one of a direction substantially perpendicular to a predetermined plane and in a direction inclined with respect to the predetermined plane; second positioning means for moving the movable member in a direction substantially parallel to the predetermined plane, wherein said first positioning means is mounted on said second positioning means; a base member on which said second positioning means is mounted, and position detecting means for controlling movement of the movable member through said first positioning means, said position detecting means being operable to measure displacement with respect to the surface of said base member, and said position detecting means being mounted integrally on said first positioning means.
Claim 19
Dependent Claim
131 words
A positioning device, comprising: first positioning means for moving a movable member, on which an article is to be placed, in at least one of a direction substantially perpendicular to a predetermined plane and in a direction inclined with respect to the predetermined plane; second positioning means for moving the movable member in a direction substantially parallel to the predetermined plane, wherein said first positioning means is mounted on said second positioning means; a base member on which said second positioning means is mounted, and position detecting means for controlling movement of the movable member through said first positioning means, said position detecting means being operable to measure displacement with respect to the surface of said base member, and said position detecting means being mounted integrally on said first positioning means.
Claim 20
Dependent Claim
14 words
A positioning device according to claim 15, wherein the article is a semiconductor wafer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-01-24 | 1997-07-26 | 1998-01-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-01-24 | 2001-07-26 | 2002-01-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-01-24 | 2005-07-26 | 2006-01-25 | $7700.00 | Window Closed / Lapsed |