US5283141A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photolithography control system and method using latent image measurements
Assignee: National Semiconductor Corp
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Filing: 1992-03-05
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Granted: 1994-02-01
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Expires: 2012-03-05
Abstract
Abstract A method of and apparatus for processing semiconductor wafers which include observing optical characteristics of exposed undeveloped photoresist, without removing the wafers from the stepper is disclosed. The present invention includes the steps of loading a wafer having a layer of photoresist into a photolithography system, exposing the photoresist in accordance with an initial set of control parameters including exposure time, position of the wafer within the photolithography system, and/or focus change. Prior to developing the photoresist, optical characteristics of the exposed photoresist are observed using a phase contrast microscope which detects latent images. Then, according to the observations of the latent image, the initial set of control parameters are adjusted to generate a second set of control parameters.
Inventors
- 👤 Euisik Yoon
- 👤 Robert W. Allison, Jr.
- 👤 Ronald P. Kovacs
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 15:29
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70591; G01; G01R; G01R31/00; G01R31/28; G01R31/302; G01R31/308; G01R31/311; G03F7/20; G03F7/70605; G03F7/70616; G03F7/70641; G03F7/70653; G03F7/70675; G03F9/00; H; H10; H10P; H10P72/00; H10P72/50; H10P72/57; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948; Y10S438/949
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
99 words
A method of processing semiconductor wafers comprising the steps of: (a) loading a first wafer having a layer of photoresist into a photolithography system; (b) exposing said photoresist in accordance with an initial set of control parameters; (c) prior to developing said photoresist, using a phase contrast microscope to measure linewidth characteristics of at least one latent image created on said photoresist by said exposing step; and (d) adjusting said initial set of control parameters according to said measured linewidth characteristics of said at least one latent image on said photoresist to generate a second set of control parameters.
Claim 2
Independent Claim
99 words
A method of processing semiconductor wafers comprising the steps of: (a) loading a first wafer having a layer of photoresist into a photolithography system; (b) exposing said photoresist in accordance with an initial set of control parameters; (c) prior to developing said photoresist, using a phase contrast microscope to measure linewidth characteristics of at least one latent image created on said photoresist by said exposing step; and (d) adjusting said initial set of control parameters according to said measured linewidth characteristics of said at least one latent image on said photoresist to generate a second set of control parameters.
Claim 3
Dependent Claim
47 words
The method of claim 1, further including (e) loading additional wafers, each having a layer of photoresist thereon, into said photolithography system; (f) exposing said photoresist on said subsequent wafers in accordance with said second set of control parameters; (g) developing said photoresist on said subsequent wafers.
Claim 4
Dependent Claim
27 words
The method of claim 2, wherein steps (b) through (g) are repeated at predefined intervals so as to recalibrate said photoresist lithography system at said predefined intervals.
Claim 5
Dependent Claim
59 words
The method of claim 2 wherein step (b) includes exposing a matrix of die using a multiplicity of control parameter values for each of at least two of said control parameters, and wherein step (d) includes selecting said control parameter values of one die in said matrix of die which best meets predefined linewidth criteria for said adjusting step.
Claim 6
Dependent Claim
35 words
A method as recited in claim 1 wherein said initial set of control parameters includes exposure time of said exposing step and wherein said adjusting step includes changing said exposure time of said exposing step.
Claim 7
Dependent Claim
36 words
A method as recited in claim 1 wherein said initial set of control parameters includes the position of said wafer within said photolithography system and wherein said adjusting step includes changing said position of said wafer.
Claim 8
Dependent Claim
34 words
A method as recited in claim 1 wherein said initial set of control parameters includes the focus of said photolithography system and wherein said adjusting step includes changing said focus of said photolithography system.
Claim 9
Dependent Claim
36 words
A method as recited in claim 1 wherein said initial set of control parameters includes the numerical aperture of said photolithography system and wherein said adjusting step includes changing said numerical aperture of said photolithography system.
Claim 10
Dependent Claim
36 words
A method as recited in claim 1 wherein said initial set of control parameters includes the illumination coherence of said photolithography system and wherein said adjusting step includes changing said illumination coherence of said photolithography system.
References Cited (Backward Citations)
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| 3.5 Years (Year 4) | 1997-01-31 | 1997-08-02 | 1998-02-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-01-31 | 2001-08-02 | 2002-02-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-01-31 | 2005-08-02 | 2006-02-01 | $7700.00 | Window Closed / Lapsed |