US5288684A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photochemical vapor phase reaction apparatus and method of causing a photochemical vapor phase reaction
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1991-03-22
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Granted: 1994-02-22
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Expires: 2011-03-22
Abstract
Abstract A photochemical vapor phase reaction apparatus and a method of causing a photochemical vapor phase reaction are described. The apparatus comprises a vacuum chamber, a substrate holder provided in the vacuum chamber for holding a substrate to be treated by a vapor phase reaction, a gas feeding system for supplying a reactive gas to the reaction space, a light source housed in a light source room for emitting light rays through a light window, an optical system for condensing and projecting the light rays emitted from the light source onto the substrate on the holder. By this configuration, the intensity of light is relatively low at the light window and relatively high at the surface of a substrate to be treated.
Inventors
- 👤 Shunpei Yamazaki
- 👤 Shinji Imatoh
- 👤 Shigenori Hayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 20:58
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/031; H10D30/0312; H10D30/0314; C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/482; C23C16/488; H10D30/0321; H10P; H10P50/00; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267; H10P50/268
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
162 words
A photochemical vapor phase reaction apparatus comprising: a reaction space; a gas feeding system for supplying a reactive gas to said reaction space; a light source for emitting light rays, said light source being provided in a light source room separated from said reaction space by a light window in an air-tight manner; a substrate holder for holding a substrate in said reaction space; means for condensing and projecting the light rays emitted from said light source onto said substrate on said holder in order to cause a photochemical vapor phase reaction to said reactive gas in said reaction space, and a mechanism for adjusting the distance between said light ray condensing means and said substrate by changing the location of said light ray condensing means to vary its distance from the substrate holder and thereby changing the extent to which the light rays are condensed as they travel from the light ray condensing means, through the light window, onto said substrate.
Claim 2
Dependent Claim
162 words
A photochemical vapor phase reaction apparatus comprising: a reaction space; a gas feeding system for supplying a reactive gas to said reaction space; a light source for emitting light rays, said light source being provided in a light source room separated from said reaction space by a light window in an air-tight manner; a substrate holder for holding a substrate in said reaction space; means for condensing and projecting the light rays emitted from said light source onto said substrate on said holder in order to cause a photochemical vapor phase reaction to said reactive gas in said reaction space, and a mechanism for adjusting the distance between said light ray condensing means and said substrate by changing the location of said light ray condensing means to vary its distance from the substrate holder and thereby changing the extent to which the light rays are condensed as they travel from the light ray condensing means, through the light window, onto said substrate.
Claim 3
Dependent Claim
19 words
The photochemical vapor phase reaction apparatus as claimed in claim 1 wherein said condensing means is a convex lens.
Claim 4
Dependent Claim
21 words
The photochemical vapor phase reaction apparatus as claimed in claim 1 further comprising a heater provided for heating said substrate holder.
Claim 5
Dependent Claim
22 words
The photochemical vapor phase reaction apparatus as claimed in claim 1 wherein said photochemical vapor phase reaction is a photochemical vapor deposition.
Claim 6
Dependent Claim
20 words
The photochemical vapor phase reaction apparatus as claimed in claim 1 wherein said photochemical vapor phase reaction is an etching.
Claim 7
Dependent Claim
19 words
The photochemical vapor phase reaction apparatus as claimed in claim 1 wherein said light source is a UV lamp.
Claim 8
Dependent Claim
31 words
The photochemical vapor phase reaction apparatus as claimed in claim 1 wherein said light source room and said reaction space are formed by partitioning a vacuum chamber by said light window.
Claim 9
Dependent Claim
25 words
The photochemical vapor phase reaction apparatus as claimed in claim 1 further comprising a circulation means for circulating a gas through said light source room.
Claim 10
Dependent Claim
30 words
The photochemical vapor phase reaction apparatus as claimed in claim 8 further comprising a cooler associated with said circulation means for cooling said gas circulated through said light source room.
Claim 11
Dependent Claim
26 words
The photochemical vapor phase reaction apparatus as claimed in claim 1 further comprising a pressure control means for controlling a pressure of said light source room.
Claim 12
Dependent Claim
21 words
The photochemical vapor phase reaction apparatus as claimed in claim 10 wherein said pressure can be maintained at an atmospheric pressure.
Claim 13
Dependent Claim
30 words
The photochemical vapor phase reaction apparatus as claimed in claim 1 further comprising an electrode provided opposed to said holder for carrying out plasma reaction by supplying electric energy therebetween.
Claim 14
Dependent Claim
18 words
The photochemical vapor phase reaction apparatus as claimed in claim 12 wherein said electrode is a meshed electrode.
Claim 15
Dependent Claim
21 words
The photochemical vapor phase reaction apparatus as claimed in claim 12 wherein said electric energy is supplied at a high frequency.
Claim 16
Dependent Claim
21 words
The photochemical vapor phase reaction apparatus as claimed in claim 1 further comprising an evacuation system for evacuating said reaction space.
Claim 17
Dependent Claim
20 words
The photochemical vapor phase reaction apparatus as claimed in claim 15 wherein said evacuation system includes a turbo molecular pump.
Claim 18
Dependent Claim
30 words
The photochemical vapor phase reaction apparatus as claimed in claim 1 further comprising a loading chamber for keeping a plurality of substrates to be sequentially treated in said reaction space.
Claim 19
Dependent Claim
29 words
The photochemical vapor phase reaction apparatus as claimed in claim 1 further comprising an unloading chamber for storing a plurality of substrates having been treated in said reaction space.
Claim 20
Dependent Claim
139 words
A photochemical vapor phase reaction apparatus comprising: an evacuation chamber; a substrate holder for supporting a substrate in said evacuation chamber; a gas feeding system for supplying a reactive gas to said chamber; a light source chamber directly connected to said evacuation chamber where said light source chamber is isolated from said evacuation chamber by a light window; a UV lamp provided in said light source chamber for emitting light rays into said evacuation chamber through said light window; and a means for circulating a gas in said light source chamber for cooling said UV lamp, wherein said light window is a convex lens so that said light rays are condensed in said evacuation chamber and wherein said convex lens has a flat surface on the evacuation chamber side and a convex surface on the light source chamber side.
Claim 21
Dependent Claim
139 words
A photochemical vapor phase reaction apparatus comprising: an evacuation chamber; a substrate holder for supporting a substrate in said evacuation chamber; a gas feeding system for supplying a reactive gas to said chamber; a light source chamber directly connected to said evacuation chamber where said light source chamber is isolated from said evacuation chamber by a light window; a UV lamp provided in said light source chamber for emitting light rays into said evacuation chamber through said light window; and a means for circulating a gas in said light source chamber for cooling said UV lamp, wherein said light window is a convex lens so that said light rays are condensed in said evacuation chamber and wherein said convex lens has a flat surface on the evacuation chamber side and a convex surface on the light source chamber side.
Claim 22
Dependent Claim
19 words
A photochemical vapor phase reaction apparatus according to claim 19, wherein said convex lens is a single convex lens.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-02-21 | 1997-08-23 | 1998-02-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-02-21 | 2001-08-23 | 2002-02-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-02-21 | 2005-08-23 | 2006-02-22 | $7700.00 | Window Closed / Lapsed |