US5290761A
Expired / Lapsed
US
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Process for making oxide superconducting films by pulsed excimer laser ablation
Assignee: EIDP Inc
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Filing: 1992-10-19
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Granted: 1994-03-01
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Expires: 2012-10-19
Abstract
Abstract A process for producing thin films of superconducting material by bombarding a heated target with radiation from pulsed high energy UV laser to form a plume of target material, and depositing the plume on a substrate is disclosed.
Inventors
- 👤 Kenneth B. Keating
- 👤 Stephens S. The'
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 13:24
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/087; C23C14/22; C23C14/24; C23C14/28; H10N60/0268; H10N60/0296; H10N60/0521; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/73; Y10S505/732
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
44 words
A process for the deposition of an oxide superconducting film onto a substrate by pulsed excimer laser ablation of a target material wherein the improvement comprises heating the target material to within about 500° C. below its melting point prior to an during ablation.
Claim 2
Dependent Claim
44 words
A process for the deposition of an oxide superconducting film onto a substrate by pulsed excimer laser ablation of a target material wherein the improvement comprises heating the target material to within about 500° C. below its melting point prior to an during ablation.
Claim 3
Dependent Claim
18 words
The process of claim 1 wherein the target material and the superconducting film each comprises a copper oxide.
Claim 4
Dependent Claim
34 words
The process of claim 2 wherein the target material has an atomic ratio of Y:Ba:Cu of a:b:c where a is 0.5 to 1.5, b is 1.5 to 2.5, and c is 2.5 to 3.5.
Claim 5
Dependent Claim
22 words
The process of claim 1 wherein the superconducting film comprises YBa 2 Cu 3 O 7-x wherein x is 0 to 0.3.
Claim 6
Dependent Claim
57 words
The process of claim 1 wherein the superconducting film is Tl e Pb a Ca b Sr c Cu d O x wherein a is 0.1 to 1.5, b is 1 to 4, c is 1 to 3, d is 1 to 5, e is 0.3 to 1, x is (a+b+c+d+e+y) and y is 0.5 to 3.
Claim 7
Dependent Claim
57 words
The process of claim 2 wherein the target material is Tl e Pb a Ca b Sr c Cu d O x wherein a is 0.1 to 1.5, b is 1 to 4, c is 1 to 3, d is 1 to 5, e is 0.3 to 1, x is (a+b+c+d+e+y), and y is 0.5 to 3.
Claim 8
Dependent Claim
22 words
The process of claim 1 wherein the target material is heated to within 200° C. below its melting point prior to ablation.
Claim 9
Dependent Claim
15 words
The process of claim 5 performed at or below a pressure of about 26 Pa.
Claim 10
Dependent Claim
25 words
The process of claim 1 wherein the substrate is selected from the group consisting of MgO, LaAlO 3 , SrTiO 3 , and yttria-stabilized zirconia.
References Cited (Backward Citations)
US5017554A
Cited
US5019552A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-02-28 | 1997-08-30 | 1998-03-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-02-28 | 2001-08-30 | 2002-03-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-02-28 | 2005-08-30 | 2006-03-01 | $7700.00 | Window Closed / Lapsed |