US5294808A
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Pseudomorphic and dislocation free heteroepitaxial structures
Assignee: Cornell Research Foundation Inc
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Filing: 1992-10-23
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Granted: 1994-03-15
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Expires: 2012-10-23
Abstract
Abstract Pseudomorphic and dislocation free heteroepitaxial structures are formed in which pseudomorphic and heteroepitaxial layers of any desired thickness are grown on thin, free-standing substrates. In the case of pseudomorphic structures, the substrates are chosen to have a thickness less than the critical thickness above which misfit dislocations will form between the pseudomorphic layers and the substrate. Use of thin substrates in this manner prevents the overall strain energy between the two layers from ever becoming large enough to generate misfit dislocations, regardless of the pseudomorphic layer thickness. This concept can also be employed in the formation of defect free heteroepitaxial layers. If a heteroepitaxial layer is grown on a very thin substrate, an effect known as dislocation gettering will cause any dislocations between the two layers to propagate into the substrate, thus leaving the heteroepitaxial layer defect free. Multiple layer superlattice structures can also be formed which either have a very large lattice mismatch between the top and bottom layers, or strain compensation between the layers and the bottom substrate.
Inventors
- 👤 Yu-hwa Lo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 13:17
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/32; H10P14/3242; H10P14/3244; H10P14/3251; H10P14/3252; H10P14/29; H10P14/2901; H10P14/34; H10P14/3402
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
96 words
A semiconductor structure comprising: a) a semiconductor substrate layer having a thickness; and b) a heteroepitaxial layer disposed on said substrate layer formed from a material which is lattice mismatched with said substrate layer; wherein, said thickness of said substrate layer is chosen to be approximately less than or equal to a critical thickness above which dislocations will form between said substrate layer and said heteroepitaxial layer, whereby said heteroepitaxial layer can be formed having any arbitrary thickness without formation of dislocations between said substrate layer and said heteroepitaxial layer, thereby resulting in a pseudomorphic structure.
Claim 2
Dependent Claim
96 words
A semiconductor structure comprising: a) a semiconductor substrate layer having a thickness; and b) a heteroepitaxial layer disposed on said substrate layer formed from a material which is lattice mismatched with said substrate layer; wherein, said thickness of said substrate layer is chosen to be approximately less than or equal to a critical thickness above which dislocations will form between said substrate layer and said heteroepitaxial layer, whereby said heteroepitaxial layer can be formed having any arbitrary thickness without formation of dislocations between said substrate layer and said heteroepitaxial layer, thereby resulting in a pseudomorphic structure.
Claim 3
Dependent Claim
139 words
A semiconductor structure comprising: a) a first, thick semiconductor substrate; b) a plurality of thin heteroepitaxial layers formed on said thick substrate layer, said plurality of thin layers including at least a bottom layer and a top layer; each said thin layer having a thickness less than approximately a critical thickness above which dislocations will form between adjacent layers; c) an arbitrarily thick heteroepitaxial layer formed on said top thin layer; d) an aperture extending from a bottom side of said substrate through said substrate and all of the thin layers in said plurality of thin layers with the exception of said top thin layer, said aperture exposing a bottom side of said top thin layer; and e) a pseudomorphic region formed in said arbitrarily thick heteroepitaxial layer over a region of said top thin layer above said aperture.
Claim 4
Dependent Claim
139 words
A semiconductor structure comprising: a) a first, thick semiconductor substrate; b) a plurality of thin heteroepitaxial layers formed on said thick substrate layer, said plurality of thin layers including at least a bottom layer and a top layer; each said thin layer having a thickness less than approximately a critical thickness above which dislocations will form between adjacent layers; c) an arbitrarily thick heteroepitaxial layer formed on said top thin layer; d) an aperture extending from a bottom side of said substrate through said substrate and all of the thin layers in said plurality of thin layers with the exception of said top thin layer, said aperture exposing a bottom side of said top thin layer; and e) a pseudomorphic region formed in said arbitrarily thick heteroepitaxial layer over a region of said top thin layer above said aperture.
Claim 5
Dependent Claim
131 words
The structure of claim 2 wherein said bottom thin layer is formed from a material that is lattice mismatched with said substrate, each adjacent pair of layers in said plurality of thin layers is formed from materials which are lattice mismatched with one another, and said arbitrarily thick heteroepitaxial layer is formed from a material that is mismatched with the material of said top thin layer; whereby, said arbitrarily thick heteroepitaxial layer can be formed from a material that has a lattice mismatch with the material of said thick substrate that is substantially larger than the individual lattice mismatches between said bottom thin layer and said substrate, between each adjacent pair of layers in said plurality of thin layers and between said arbitrarily thick heteroepitaxial layer in said top thin layer.
Claim 6
Dependent Claim
108 words
A heteroepitaxial semiconductor structure comprising: a) a semiconductor substrate having a thickness and an aperture extending through said thickness; b) a first heteroepitaxial layer disposed on said substrate; and, c) a superlattice structure formed on said first heteroepitaxial layer, said superlattice structure comprising a plurality of additional heteroepitaxial layers; wherein, said first heteroepitaxial layer is formed from a material having a lattice mismatch relative to said substrate which will compensate for lattice strains of said superlattice structure, thereby preventing lattice strains from being imparted by said substrate to said superlattice structure; whereby a strain compensated region is formed in said superlattice structure above said aperture of said substrate.
Claim 7
Dependent Claim
108 words
A heteroepitaxial semiconductor structure comprising: a) a semiconductor substrate having a thickness and an aperture extending through said thickness; b) a first heteroepitaxial layer disposed on said substrate; and, c) a superlattice structure formed on said first heteroepitaxial layer, said superlattice structure comprising a plurality of additional heteroepitaxial layers; wherein, said first heteroepitaxial layer is formed from a material having a lattice mismatch relative to said substrate which will compensate for lattice strains of said superlattice structure, thereby preventing lattice strains from being imparted by said substrate to said superlattice structure; whereby a strain compensated region is formed in said superlattice structure above said aperture of said substrate.
Claim 8
Dependent Claim
149 words
A semiconductor structure comprising: a) a semiconductor substrate having a thickness and an aperture extending through said thickness; b) a semiconductor layer disposed on said semiconductor substrate, said semiconductor layer having a thickness and having a bottom side of a region thereof exposed by said aperture; and, c) a heteroepitaxial layer disposed on said semiconductor layer formed from a material which is lattice mismatched with said semiconductor layer; wherein, said thickness of said semiconductor layer is chosen to be approximately less than or equal to a critical thickness above which dislocations will form between said semiconductor layer and said heteroepitaxial layer, and a pseudomorphic region is formed in said heteroepitaxial layer above said exposed region of said semiconductor layer, whereby said heteroepitaxial layer can be formed having an arbitrary thickness without formation of dislocations between the exposed region of said semiconductor layer over said aperture and said heteroepitaxial layer.
Claim 9
Dependent Claim
149 words
A semiconductor structure comprising: a) a semiconductor substrate having a thickness and an aperture extending through said thickness; b) a semiconductor layer disposed on said semiconductor substrate, said semiconductor layer having a thickness and having a bottom side of a region thereof exposed by said aperture; and, c) a heteroepitaxial layer disposed on said semiconductor layer formed from a material which is lattice mismatched with said semiconductor layer; wherein, said thickness of said semiconductor layer is chosen to be approximately less than or equal to a critical thickness above which dislocations will form between said semiconductor layer and said heteroepitaxial layer, and a pseudomorphic region is formed in said heteroepitaxial layer above said exposed region of said semiconductor layer, whereby said heteroepitaxial layer can be formed having an arbitrary thickness without formation of dislocations between the exposed region of said semiconductor layer over said aperture and said heteroepitaxial layer.
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