US5369722A
Expired / Lapsed
US
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Optical inorganic waveguide with a substantially planar organic substrate
Assignee: Schott AG
•
Filing: 1992-09-18
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Granted: 1994-11-29
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Expires: 2012-09-18
Abstract
Abstract An optical waveguide is disclosed with a substantially planar substrate and a waveguide layer applied to the substrate. The invention resides in that the substrate consists of a synthetic resin or of a material having a high organic proportion. This has the advantage that the high index of refraction of the inorganic waveguide layer is combined with the material properties of the synthetic resin substrate, such as, for example, breaking resistance, plastic and thermoplastic moldability, photochemical structuring ability, and others.
Inventors
- 👤 Martin Heming
- 👤 Roland Hochhaus
- 👤 Ralf Kersten
- 👤 Dieter Krause
- 👤 Jurgen Otto
- 👤 Volker Paquet
- 👤 Johannes Segner
- 👤 Christof Fattinger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 02:55
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/122; G02B6/1221; G02B6/124
Claims Analysis
Total Claims: 65
Claim 1
Independent Claim
42 words
An optical waveguide comprising: a substantially planar substrate (1) consisting essentially of a synthetic resin or a material having a high organic proportion, and an inorganic waveguide layer (3) applied to said substrate, said inorganic waveguide layer having a refractive index ≧1.74.
Claim 2
Dependent Claim
42 words
An optical waveguide comprising: a substantially planar substrate (1) consisting essentially of a synthetic resin or a material having a high organic proportion, and an inorganic waveguide layer (3) applied to said substrate, said inorganic waveguide layer having a refractive index ≧1.74.
Claim 3
Dependent Claim
14 words
A waveguide according to claim 1, wherein said substrate consists essentially of synthetic resin.
Claim 4
Dependent Claim
26 words
A waveguide according to claim 1, wherein said substrate consists essentially of synthetic resin and said substrate is textured photochemically or by plastic or thermoplastic shaping.
Claim 5
Dependent Claim
20 words
A waveguide according to claim 2, wherein the optical index of refraction of said synthetic resin can be altered photochemically.
Claim 6
Dependent Claim
19 words
A waveguide according to claim 2, wherein said synthetic resin is a polycarbonate, PMMA, a polyimide, or a polyester.
Claim 7
Dependent Claim
15 words
A waveguide according to claim 2, wherein said substrate (1) is a synthetic resin film.
Claim 8
Dependent Claim
12 words
A waveguide according to claim 1, wherein said substrate is an ORMOCER.
Claim 9
Dependent Claim
26 words
A waveguide according to claim 1, wherein said substrate (1) is applied to a backing plate or backing film (4) of an inorganic or organic material.
Claim 10
Dependent Claim
19 words
A waveguide according to claim 1, wherein the thickness of said substrate is between 20 μm and 2 mm.
Claim 11
Dependent Claim
46 words
A waveguide according to claim 1, wherein said inorganic waveguide layer (3) consists essentially of TiO 2 , a TiO 2 --SiO 2 mixture, ZnO, Nb 2 O 5 , Si 3 N 4 , Ta 2 O 5 , HfO 2 or ZrO 2 .
Claim 12
Dependent Claim
12 words
A waveguide according to claim 1, exhibiting an attenuation of <10 dB/cm.
Claim 13
Dependent Claim
12 words
A waveguide according to claim 11, exhibiting an attenuation of <3 dB/cm.
Claim 14
Dependent Claim
29 words
A waveguide according to claim 1, wherein at least one optical diffraction grating (2) is provided on said substrate or between said substrate (1) and said waveguide layer (3).
Claim 15
Dependent Claim
16 words
A waveguide according to claim 13, wherein said optical diffraction grating (2) is a micro-relief grating.
Claim 16
Dependent Claim
21 words
A waveguide according to claim 14, wherein said optical diffraction grating (2) is embossed into the surface of the substrate (1).
Claim 17
Dependent Claim
16 words
A waveguide according to claim 13, wherein said optical diffraction grating (2) is a refractive-index grating.
Claim 18
Dependent Claim
18 words
A waveguide according to claim 14, wherein said optical diffraction grating (2) is produced by a photochemical process.
Claim 19
Dependent Claim
16 words
A waveguide according to claim 13, wherein said optical diffraction grating (2) is a multidiffractive grating.
Claim 20
Dependent Claim
19 words
A waveguide according to claim 13, wherein said optical diffraction grating extends over the entire surface of said substrate.
Claim 21
Dependent Claim
30 words
A waveguide according to claim 13, wherein said optical diffraction grating (2) exhibits a line density of 500 to 5000 l/mm and a structural depth of 1 to 50 nm.
Claim 22
Dependent Claim
23 words
A waveguide according to claim 1, further comprising at least one intermediate layer (6) between said substrate (1) and said waveguide layer (3).
Claim 23
Dependent Claim
28 words
A waveguide according to claim 21, wherein said intermediate layer is a material having a refractive index smaller than or equal to the refractive index of said substrate.
Claim 24
Dependent Claim
18 words
A waveguide according to claim 21, wherein said intermediate layer(s) (6) exhibit(s) a surface roughness of <3 nm.
Claim 25
Dependent Claim
47 words
A waveguide according to claim 21, wherein at least one optical diffraction grating (2) is provided on said substrate or between said substrate (1) and said waveguide layer (3), and wherein the modulation depth of said optical diffraction grating (2) is reduced by said intermediate layer (6).
Claim 26
Dependent Claim
30 words
A waveguide according to claim 24, wherein the thickness of said intermediate layer(s) (6) is dimensioned to provide a desired degree of diffraction efficiency of said optical diffraction grating (2).
Claim 27
Dependent Claim
36 words
A waveguide according to claim 25, wherein the thickness of said intermediate layer (6) amounts to at least 0.1 times and at most 50 times the depth of the optical diffraction grating (2) obtained by embossing.
Claim 28
Dependent Claim
17 words
A waveguide according to claim 21, wherein said intermediate layer (6) consists essentially of SiO 2 .
Claim 29
Dependent Claim
25 words
A waveguide according to claim 21, wherein said intermediate layer (6) consists essentially of an organic material or a material having a high organic proportion.
Claim 30
Dependent Claim
19 words
A waveguide according to, claim 1 further comprising an adhesion-promoting layer provided between said substrate and said waveguide layer.
Claim 31
Dependent Claim
20 words
A waveguide according to claim 29, wherein said adhesion-promoting layer consists essentially of SiO x C y H z .
Claim 32
Dependent Claim
56 words
A waveguide according to claim 8, further comprising a protective layer (7) provided between said waveguide layer (3) and said organic backing plate or organic film, said protective layer protecting said organic backing plate or organic backing film against attack of energy particles from the plasma of starting materials used for preparing said waveguide layer (3).
Claim 33
Dependent Claim
16 words
A waveguide according to claim 31, said protective layer (7) consists essentially of SiO 2 .
Claim 34
Dependent Claim
18 words
A waveguide according to claim 21, wherein said intermediate layer (6) is an adhesion-promoting and protective layer (7).
Claim 35
Dependent Claim
27 words
A waveguide according to claim 1, further comprising a cover layer covering the surface of the waveguide, said cover layer (8) being an inorganic or organic material.
Claim 36
Dependent Claim
17 words
A waveguide according to claim 34, wherein said cover layer (8) consists essentially of SiO 2 .
Claim 37
Dependent Claim
12 words
A waveguide according to claim 35, wherein said SiO 2 is porous.
Claim 38
Dependent Claim
17 words
A waveguide according to claim 34, wherein said cover layer (8) consists essentially of a synthetic resin.
Claim 39
Dependent Claim
24 words
A waveguide according to claim 1, wherein the optically waveguiding structure of said waveguide layer on the substrate surface is a planar optical waveguide.
Claim 40
Dependent Claim
24 words
A waveguide according to claim 1, wherein the optically waveguiding structure of said waveguide layer on the substrate surface is an optical strip waveguide.
Claim 41
Dependent Claim
48 words
A waveguide according to claim 39, wherein the wave guidance is defined along the tracks by refractive index modulation or a micro-relief profile in the substrate surface and/or in at least one layer between said substrate (1) and said waveguide layer (3) and/or in said waveguide layer (3).
Claim 42
Dependent Claim
10 words
A waveguide according to claim 1, being a monomode waveguide.
Claim 43
Dependent Claim
26 words
In a method of converting an optical value with an optical transducer, the improvement comprising using a waveguide according to claim 1 as said optical transducer.
Claim 44
Dependent Claim
18 words
A method of using a waveguide according to claim 1 as a component of an optical measuring device.
Claim 45
Dependent Claim
17 words
A method of using a waveguide according to claim 1 as a component of an optical network.
Claim 46
Dependent Claim
16 words
A waveguide according to claim 13, wherein the optical diffraction grating (2) is a bidiffractive grating.
Claim 47
Dependent Claim
42 words
An optical waveguide comprising: a substantially planar substrate (1) consisting essentially of a synthetic resin or a material having a high organic proportion, and an inorganic waveguide layer (3) applied to said substrate, said optical waveguide exhibiting an attenuation of <10 dB/cm.
Claim 48
Dependent Claim
42 words
An optical waveguide comprising: a substantially planar substrate (1) consisting essentially of a synthetic resin or a material having a high organic proportion, and an inorganic waveguide layer (3) applied to said substrate, said optical waveguide exhibiting an attenuation of <10 dB/cm.
Claim 49
Dependent Claim
12 words
A waveguide according to claim 1, exhibiting an attenuation of <5 dB/cm.
Claim 50
Dependent Claim
18 words
A waveguide according to claim 23, wherein the intermediate layer(s) (6) exhibit(s) a surface roughness of <1.5 nm.
Claim 51
Dependent Claim
18 words
A waveguide according to claim 8, wherein the thickness of said substrate is between 0.1 and 50 μm.
Claim 52
Dependent Claim
17 words
A waveguide according to claim 9, wherein the thickness of said substrate is less than 500 μm.
Claim 53
Dependent Claim
18 words
A waveguide according to claim 49, wherein the thickness of said substrate is between 0.5 and 20 μm.
Claim 54
Dependent Claim
18 words
A waveguide according to claim 20, wherein said optical diffraction grating has a structural depth of 2-10 nm.
Claim 55
Dependent Claim
32 words
A waveguide according to claim 1, further comprising a protective layer provided between said waveguide layer and said substrate, wherein said protective layer protects said substrate during application of said waveguide layer.
Claim 56
Dependent Claim
14 words
A waveguide according to claim 37, wherein said cover layer consists essentially of polystyrene.
Claim 57
Dependent Claim
65 words
A waveguide according to claim 34, wherein the optical waveguiding structure of said waveguide layer on the substrate surface is an optical strip waveguide and wave guidance is defined along tracks by refractive index modulation or a micro-relief grating in the substrate surface and/or in the one layer between the substrate and the waveguide layer and/or in the waveguide layer and/or in the cover layer.
Claim 58
Dependent Claim
12 words
A waveguide according to claim 46, exhibiting an attenuation of <3 dB/cm.
Claim 59
Dependent Claim
15 words
A waveguide according to claim 1, wherein said waveguide layer has a refractive index <1.8.
Claim 60
Dependent Claim
27 words
A waveguide according to claim 29, further comprising a cover layer covering the surface of the waveguide, said cover layer (8) being an inorganic or organic material.
Claim 61
Dependent Claim
18 words
A waveguide according to claim 31, further comprising an adhesion-promoting layer between said substrate and said protective layer.
Claim 62
Dependent Claim
73 words
An optical waveguide comprising: a substantially planar substrate (1) consisting essentially of a synthetic resin or a material having a high organic proportion, and an inorganic waveguide layer (3) applied to said substrate; wherein said inorganic waveguide layer (3) consists essentially of TiO 2 , a TiO 2 --SiO 2 mixture, ZnO, Nb 2 O 5 , Si 3 N 4 , Ta 2 O 5 , HfO 2 or ZrO 2 .
Claim 63
Dependent Claim
73 words
An optical waveguide comprising: a substantially planar substrate (1) consisting essentially of a synthetic resin or a material having a high organic proportion, and an inorganic waveguide layer (3) applied to said substrate; wherein said inorganic waveguide layer (3) consists essentially of TiO 2 , a TiO 2 --SiO 2 mixture, ZnO, Nb 2 O 5 , Si 3 N 4 , Ta 2 O 5 , HfO 2 or ZrO 2 .
Claim 64
Dependent Claim
44 words
An optical waveguide comprising: a substantially planar substrate (1) consisting essentially of a synthetic resin or a material having a high organic proportion, and an inorganic waveguide layer (3) applied to said substrate; and an adhesion-promoting layer provided between said substrate and said waveguide.
Claim 65
Dependent Claim
44 words
An optical waveguide comprising: a substantially planar substrate (1) consisting essentially of a synthetic resin or a material having a high organic proportion, and an inorganic waveguide layer (3) applied to said substrate; and an adhesion-promoting layer provided between said substrate and said waveguide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-28 | 1998-05-30 | 1998-11-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-28 | 2002-05-30 | 2002-11-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-28 | 2006-05-30 | 2006-11-29 | $7700.00 | Window Closed / Lapsed |