US5372951A
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Method of making a semiconductor having selectively enhanced field oxide areas
Assignee: GlobalFoundries Inc
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Filing: 1993-10-01
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Granted: 1994-12-13
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Expires: 2013-10-01
Abstract
Abstract A field oxide is provided which purposefully takes advantage of fluorine mobility from an implanted impurity species. The field oxide can be enhanced or thickened according to the size (area and thickness) of the oxide. Fluorine from the impurity species provides for dislodgement of oxygen at silicon-oxygen bond sites, leading to oxygen recombination at the field oxide/substrate interface. Thickening of the oxide through recombination occurs after it is initially grown and implanted. Accordingly, initial thermal oxidation can be shortened to enhance throughput. The fluorine-enhanced thickening effect can therefore compensate for the shorter thermal oxidation time. Moreover, the thickened oxide regions are anistropically oxidized underneath existing thermally grown oxides and directly underneath openings between nitrides. The thickened oxides therefore do not cause additional shrinkage of the active areas which reside between field oxides.
Inventors
- 👤 Mohammed Anjum
- 👤 Ibrahim K. Burki
- 👤 Craig W. Christian
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 04:28
CPC Classifications
H; H10; H10P; H10P30/00; H10P30/20; H10P30/202; H10P30/204; H10P30/208; H10P30/225; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/012; H10W10/0125; H10W10/10; H10W10/13; Y; Y10; Y10S; Y10S438/00; Y10S438/981
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
127 words
A method for thickening a first oxide greater than a second oxide, said method comprising the steps of: providing a substrate; thermally growing a first oxide of a first area and thickness simultaneous with thermally growing a second oxide of a second area and thickness upon said substrate, wherein said second area and thickness is greater than said first area and thickness; and implanting an impurity species within said first oxide and said second oxide, wherein said impurity species comprises a chemical selected from the group consisting of BF 2 , BF and F, and wherein fluorine from said species will diffuse through said first oxide to a greater extent than through said second oxide resulting in greater thickening of said first oxide than said second oxide.
Claim 2
Independent Claim
127 words
A method for thickening a first oxide greater than a second oxide, said method comprising the steps of: providing a substrate; thermally growing a first oxide of a first area and thickness simultaneous with thermally growing a second oxide of a second area and thickness upon said substrate, wherein said second area and thickness is greater than said first area and thickness; and implanting an impurity species within said first oxide and said second oxide, wherein said impurity species comprises a chemical selected from the group consisting of BF 2 , BF and F, and wherein fluorine from said species will diffuse through said first oxide to a greater extent than through said second oxide resulting in greater thickening of said first oxide than said second oxide.
Claim 3
Dependent Claim
76 words
The method as recited in claim 1, wherein said implanting step comprises: allowing a portion of said fluorine atoms to diffuse to a plurality of silicon-oxygen bond sites located within a bulk portion of said first oxide near a juncture between said first oxide and said substrate; allowing said fluorine atoms to dislodge oxygen atoms at said plurality of silicon-oxygen bond sites; and allowing said dislodged oxygen atoms to recombine with silicon atoms at said juncture.
Claim 4
Dependent Claim
75 words
The method as recited in claim 1, wherein said implanting step comprises: preventing a majority of said fluorine atoms from diffusing to a plurality of silicon-oxygen bond sites located within a bulk portion of said second oxide near a juncture between said second oxide and said substrate; preventing said fluorine atoms from dislodging oxygen atoms at said plurality of silicon-oxygen bond sites; and preventing said dislodged atoms from recombining with silicon atoms at said juncture.
Claim 5
Dependent Claim
46 words
The method as recited in claim 1, wherein said implanting step comprises allowing a portion of boron atoms from said impurity species to reside at a point below said first oxide and said second oxide and within said substrate underlying respective said first and second oxides.
Claim 6
Dependent Claim
34 words
The method as recited in claim 5, wherein said boron atoms comprise a dopant source material that, when implanted into said substrate, increases threshold voltages within said substrate underlying said first and second oxides.
Claim 7
Dependent Claim
59 words
The method as recited in claim 1, wherein said implanting step comprises the steps of: providing a window through a patterned nitride layer; dislodging oxygen atoms with said fluorine in an area within said first oxide directly beneath said window; and recombining said oxygen atoms at a juncture between said first oxide and said substrate directly beneath said window.
Claim 8
Dependent Claim
19 words
The method as recited in claim 1, further comprising implanting conductors over said small oxide and said large oxide.
Claim 9
Independent Claim
276 words
A method for increasing the thickness of a first oxide to substantially match the thickness of a second oxide, said method comprising the steps of: providing a silicon substrate having a substantially planar upper surface; placing a layer of nitride upon said upper surface; patterning a plurality of first and second windows extending through said nitride and to said upper surface, wherein at least one of said first windows comprises a first area extending parallel to said upper surface and at least one of said second windows comprises a second area extending parallel to said upper surface, said first area is smaller than said second area; growing a first oxide of first thickness within said first window in a direction perpendicular and parallel to said upper surface; simultaneously growing a second oxide of second thickness within said second window in a direction perpendicular and parallel to said upper surface; implanting an impurity species within said first oxide and said second oxide, wherein said impurity species comprises a chemical selected from the group consisting of BF 2 , BF and F; and wherein fluorine atoms from said species will move through said first oxide to a lesser extent than through said second oxide; oxidizing said substrate with the aid of said fluorine atoms in a direction perpendicular to said upper surface directly beneath said first window and said second window, wherein said substrate underlying said first oxide is oxidized to a greater degree than said substrate underlying said second oxide; and allowing said oxidizing step to continue for a sufficient time to permit the thickness of said first oxide to match the thickness of said second oxide.
Claim 10
Independent Claim
276 words
A method for increasing the thickness of a first oxide to substantially match the thickness of a second oxide, said method comprising the steps of: providing a silicon substrate having a substantially planar upper surface; placing a layer of nitride upon said upper surface; patterning a plurality of first and second windows extending through said nitride and to said upper surface, wherein at least one of said first windows comprises a first area extending parallel to said upper surface and at least one of said second windows comprises a second area extending parallel to said upper surface, said first area is smaller than said second area; growing a first oxide of first thickness within said first window in a direction perpendicular and parallel to said upper surface; simultaneously growing a second oxide of second thickness within said second window in a direction perpendicular and parallel to said upper surface; implanting an impurity species within said first oxide and said second oxide, wherein said impurity species comprises a chemical selected from the group consisting of BF 2 , BF and F; and wherein fluorine atoms from said species will move through said first oxide to a lesser extent than through said second oxide; oxidizing said substrate with the aid of said fluorine atoms in a direction perpendicular to said upper surface directly beneath said first window and said second window, wherein said substrate underlying said first oxide is oxidized to a greater degree than said substrate underlying said second oxide; and allowing said oxidizing step to continue for a sufficient time to permit the thickness of said first oxide to match the thickness of said second oxide.
Claim 11
Dependent Claim
46 words
The method as recited in claim 8, wherein said implanting step comprises allowing a portion of boron atoms from said impurity species to reside at a point below said first oxide and said second oxide and within said substrate underlying respective said first and second oxides.
Claim 12
Dependent Claim
43 words
The method as recited in claim 9, wherein said boron atoms comprise a dopant source material that, when implanted into said substrate, increases threshold voltages within said substrate underlying said first oxide to a greater extent than said substrate underlying said second oxides.
Claim 13
Dependent Claim
111 words
The method as recited in claim 8, wherein said oxidizing step comprises: breaking silicon-oxygen bonds within said first oxide and adjacent said substrate with said fluorine in a region directly beneath said first window; breaking silicon-oxygen bonds to a lesser extent than said immediately preceding step within said second oxide and adjacent said substrate with said fluorine in a region directly beneath said second window; recombining oxygen atoms at a juncture between said first oxide and said substrate directly beneath said first window; and recombining oxygen atoms to a lesser extent than said immediately preceding step at a juncture between said second oxide and said substrate directly beneath said first window.
Claim 14
Dependent Claim
19 words
The method as recited in claim 8, further comprising implanting conductors over said first oxide and said second oxide.
References Cited (Backward Citations)
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