US5384507A
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US
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Method of and device for driving piezo-electric elements and system for controlling micromotion mechanism
Assignee: HITACHI CONSTRUCTION
•
Filing: 1992-11-30
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Granted: 1995-01-24
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Expires: 2012-11-30
Abstract
Abstract Set with respect to the piezo-electric element (1) is an approximate expression representing a relationship between the amplitude (ΔV) of the applied voltage range, a reference voltage (Vo) relative to the applied voltage range and an amount of displacement (G) of the piezo-electric element per unit voltage. There is obtained the amplitude (ΔV) of the applied voltage range for producing the target amount of displacement in the reference voltage by inputting the target amount of displacement (ΔX) and the reference voltage (Vo) and using the approximate expression. The applied voltage range (Vmin˜Vmax) for producing the target amount of displacement is determined from the obtained amplitude of the applied voltage range and the inputted reference voltage (Vo). The voltage is applied to the piezo-electric element on the basis of the applied voltage range determined. It is therefore possible to cause highly accurate displacements without using a special displacement measuring device. Prepared are approximate expressions utilizing a linear expression and a quadratic expression depending on the accuracies required.
Inventors
- 👤 Ryuji Takada
- 👤 Eiichi Hazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 22:01
CPC Classifications
B; B82; B82Y; B82Y15/00; H; H02; H02N; H02N2/00; H02N2/02; H02N2/06; H02N2/062; H10; H10N; H10N30/00; H10N30/80; H10N30/802; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/85; Y10S977/86; Y10S977/872
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
194 words
A method of driving a piezo-electric element by setting an amplitude (ΔV) of a range of a voltage applied to said piezo-electric element in accordance with a target amount of displacement (ΔX), applying the voltage to said piezo-electric element in accordance with said amplitude of said applied voltage range and causing said target amount of displacement, said method comprising the steps of: (a) setting an approximate expression representing a relationship between said amplitude (ΔV) of said applied voltage range, a reference voltage (Vo) relative to said applied voltage range and an amount of displacement (G) per unit voltage of said piezo-electric element with respect to said piezo-electric element; (b) obtaining said amplitude (ΔV) of said applied voltage range for producing said target amount of displacement in said reference voltage by inputting said target amount of displacement (ΔX) and said reference voltage (Vo) and using said approximate expression; (c) determining said applied voltage range (Vmin˜Vmax) for producing said target amount of displacement from said obtained amplitude of said applied voltage range and said inputted reference voltage (Vo); and (d) applying said voltage to said piezo-electric element on the basis of said applied voltage range determined.
Claim 2
Independent Claim
194 words
A method of driving a piezo-electric element by setting an amplitude (ΔV) of a range of a voltage applied to said piezo-electric element in accordance with a target amount of displacement (ΔX), applying the voltage to said piezo-electric element in accordance with said amplitude of said applied voltage range and causing said target amount of displacement, said method comprising the steps of: (a) setting an approximate expression representing a relationship between said amplitude (ΔV) of said applied voltage range, a reference voltage (Vo) relative to said applied voltage range and an amount of displacement (G) per unit voltage of said piezo-electric element with respect to said piezo-electric element; (b) obtaining said amplitude (ΔV) of said applied voltage range for producing said target amount of displacement in said reference voltage by inputting said target amount of displacement (ΔX) and said reference voltage (Vo) and using said approximate expression; (c) determining said applied voltage range (Vmin˜Vmax) for producing said target amount of displacement from said obtained amplitude of said applied voltage range and said inputted reference voltage (Vo); and (d) applying said voltage to said piezo-electric element on the basis of said applied voltage range determined.
Claim 3
Dependent Claim
42 words
The method according to claim 1, wherein said approximate expression set by the step (a) is a linear function of the said amplitude (ΔV) of said applied voltage range, said reference voltage (Vo) and said amount of displacement (G) per unit voltage.
Claim 4
Dependent Claim
57 words
The method according to claim 1, wherein said approximate expression set by the step (a) is G=aVoΔV+bVo+CΔV+d where ΔV is said amplitude of said applied voltage range, Vo is said reference voltage, G is said amount of displacement per unit voltage, and a, b, c, d are coefficients determined depending on displacement characteristics of said piezo-electric element.
Claim 5
Dependent Claim
41 words
The method according to claim 1, wherein said approximate expression set by the step (a) is a quadratic expression of said amplitude (ΔV) of said applied voltage range, said reference voltage (Vo) and said amount of displacement (G) per unit voltage.
Claim 6
Dependent Claim
94 words
The method according to claim 1, wherein said approximate expression set by the step (a) is G=k.sub.22 Vo.sup.2 ΔV.sup.2 +k.sub.21 Vo.sup.2 ΔV+k.sub.20 Vo.sup.2 +k.sub.12 VoΔV.sup.2 +k.sub.11 VoΔV+k.sub.10 Vo+k.sub.02 ΔV.sup.2 +k.sub.01 ΔV+k.sub.00 where ΔV is said amplitude of said applied voltage range, Vo is said reference voltage, G is said amount of displacement per unit voltage, and k 22 , k 21 , k 20 , k 12 , k 11 , k 10 , k 02 , k 01 , k 00 are coefficients determined depending on the displacement characteristics of said piezo-electric element.
Claim 7
Dependent Claim
25 words
The method according to claim 1, wherein said reference voltage (Vo) is a voltage value centered in said amplitude (ΔV) of said applied voltage range.
Claim 8
Dependent Claim
32 words
The method according to claim 1, wherein said reference voltage (Vo) is a maximum voltage value (Vmax) or a minimum voltage value (Vmin) of said amplitude (ΔV) of said applied voltage range.
Claim 9
Dependent Claim
74 words
The method according to claim 1, further comprising the step of setting further a first relational expression between said target amount of displacement (ΔX), said amplitude (ΔV) of said applied voltage range and said amount of displacement (G) per unit voltage, wherein in step (b), said amplitude (ΔV) of said applied voltage range is obtained from said inputted target amount of displacement, said reference voltage (Vo), said approximate expression and said first relational expression.
Claim 10
Dependent Claim
45 words
The method according to claim 8, wherein said first relational expression is G=ΔX(A/ΔV) where ΔX is said target amount of displacement, ΔV is said amplitude of said applied voltage range, G is said amount of displacement per unit voltage, and A is said unit voltage.
Claim 11
Dependent Claim
96 words
The method according to claim 1, further comprising the step of setting further a second relational expression for determining said applied voltage range (Vmin˜Vmax) for producing said target amount of displacement (ΔX) from said amplitude (ΔV) of said applied voltage range and said reference voltage (Vo), wherein in step (c), said applied voltage range (Vmin˜Vmax) for producing said target amount of displacement is determined from said amplitude of said applied voltage range that has been obtained by use of said approximate expression, said inputted reference voltage (Vo) and said second relational expression in the step (c).
Claim 12
Dependent Claim
49 words
The method according to claim 10, wherein said second relational expression is Vmin=Vo-(ΔV/2) Vmax=Vo+(ΔV/2) where ΔV is said amplitude of said applied voltage range, Vo is said reference voltage, and Vmin, Vmax are minimum and maximum values of said applied voltage range for producing said target amount of displacement.
Claim 13
Dependent Claim
25 words
The method according to claim 2, wherein said reference voltage (Vo) is a voltage value centered in said amplitude (ΔV) of said applied voltage range.
Claim 14
Dependent Claim
25 words
The method according to claim 3, wherein said reference voltage (Vo) is a voltage value centered in said amplitude (ΔV) of said applied voltage range.
Claim 15
Dependent Claim
25 words
The method according to claim 4, wherein said reference voltage (Vo) is a voltage value centered in said amplitude (ΔV) of said applied voltage range.
Claim 16
Dependent Claim
25 words
The method according to claim 5, wherein said reference voltage (Vo) is a voltage value centered in said amplitude (ΔV) of said applied voltage range.
Claim 17
Dependent Claim
32 words
The method according to claim 2, wherein said reference voltage (Vo) is a maximum voltage value (Vmax) or a minimum voltage value (Vmin) of said amplitude (ΔV) of said applied voltage range.
Claim 18
Dependent Claim
32 words
The method according to claim 3, wherein said reference voltage (Vo) is a maximum voltage value (Vmax) or a minimum voltage value (Vmin) of said amplitude (ΔV) of said applied voltage range.
Claim 19
Dependent Claim
32 words
The method according to claim 4, wherein said reference voltage (Vo) is a maximum voltage value (Vmax) or a minimum voltage value (Vmin) of said amplitude (ΔV) of said applied voltage range.
Claim 20
Dependent Claim
32 words
The method according to claim 5, wherein said reference voltage (Vo) is a maximum voltage value (Vmax) or a minimum voltage value (Vmin) of said amplitude (ΔV) of said applied voltage range.
Claim 21
Independent Claim
233 words
A device for driving a piezo-electric element by setting an amplitude (ΔV) of a range of voltages applied to said piezo-electric element in accordance with a target amount of displacement (ΔX), applying the voltages to said piezo-electric element in accordance with said amplitude of said applied voltage range, and causing said target amount of displacement, said device comprising: (a) input means for inputting said target amount of displacement (ΔX) and said reference voltage (Vo) relative to said applied voltage range; (b) memory means for storing an approximate expression representing a relationship between said amplitude (ΔV) of said applied voltage range, a reference voltage (Vo) and an amount of displacement (G) per unit voltage of said piezo-electric element with respect to said piezo-electric element; (c) arithmetic means for retrieving said target amount of displacement (ΔX) and said reference voltage (Vo) from said input means and said approximate expression from said memory means, for obtaining said amplitude of said applied voltage range from said approximate expression, and for thus determining said applied voltage range for producing said target amount of displacement from said amplitude of said obtained applied voltage range and said inputted reference voltage; and (d) voltage generating means for receiving the applied voltage range determined by said arithmetic means, and for generating and applying the voltages to said piezo-electric element on the basis of said applied voltage range determined by said arithmetic means.
Claim 22
Independent Claim
233 words
A device for driving a piezo-electric element by setting an amplitude (ΔV) of a range of voltages applied to said piezo-electric element in accordance with a target amount of displacement (ΔX), applying the voltages to said piezo-electric element in accordance with said amplitude of said applied voltage range, and causing said target amount of displacement, said device comprising: (a) input means for inputting said target amount of displacement (ΔX) and said reference voltage (Vo) relative to said applied voltage range; (b) memory means for storing an approximate expression representing a relationship between said amplitude (ΔV) of said applied voltage range, a reference voltage (Vo) and an amount of displacement (G) per unit voltage of said piezo-electric element with respect to said piezo-electric element; (c) arithmetic means for retrieving said target amount of displacement (ΔX) and said reference voltage (Vo) from said input means and said approximate expression from said memory means, for obtaining said amplitude of said applied voltage range from said approximate expression, and for thus determining said applied voltage range for producing said target amount of displacement from said amplitude of said obtained applied voltage range and said inputted reference voltage; and (d) voltage generating means for receiving the applied voltage range determined by said arithmetic means, and for generating and applying the voltages to said piezo-electric element on the basis of said applied voltage range determined by said arithmetic means.
Claim 23
Dependent Claim
57 words
The device according to claim 20, wherein said approximate expression stored in said memory means is G=aVoΔV+bVo+cΔV+d where ΔV is said amplitude of said applied voltage range, Vo is said reference voltage, G is said amount of displacement per unit voltage, and a, b, c, d are coefficients determined depending on displacement characteristics of said piezo-electric element.
Claim 24
Dependent Claim
94 words
The device according to claim 20, wherein said approximate expression stored in said memory means is G=k.sub.22 Vo.sup.2 ΔV.sup.2 +k.sub.21 Vo.sup.2 ΔV+k.sub.20 Vo.sup.2 +k.sub.12 VoΔV.sup.2 +k.sub.11 VoΔV+k.sub.10 Vo+k.sub.02 ΔV.sup.2 +k.sub.01 ΔV+k.sub.00 where ΔV is said amplitude of said applied voltage range, Vo is said reference voltage, G is said amount of displacement per unit voltage, and k 22 , k 21 , k 20 , k 12 , k 11 , k 10 , k 02 , k 01 , k 00 are coefficients determined depending on the displacement characteristics of said piezo-electric element.
Claim 25
Dependent Claim
71 words
The device according to claim 20, where said memory means stores a first relational expression between said target amount of displacement (ΔX), said amplitude (ΔV) of said applied voltage range and said amount of displacement (G) per unit voltage, and said arithmetic means calculates said amplitude (ΔV) of said applied voltage range from said inputted target amount of displacement, said reference voltage (Vo), said approximate expression and said first relational expression.
Claim 26
Dependent Claim
50 words
The device according to claim 23, wherein said first relational expression stored in said memory means is G=ΔX(A/ΔV) where ΔX is said target amount of displacement, ΔV is said amplitude of said applied voltage range, G is said amount of displacement per unit voltage, and A is said unit voltage.
Claim 27
Dependent Claim
81 words
The device according to claim 20, wherein said memory means stores a second relational expression for determining said applied voltage range for producing said target amount of displacement (ΔX) from said amplitude (ΔV) of said applied voltage range and said reference voltage (Vo), and said arithmetic means determines said applied voltage range from said amplitude (ΔV) of said applied voltage range that has been obtained by use of said approximate expression, said inputted reference voltage (Vo) and said second relational expression.
Claim 28
Dependent Claim
54 words
The device according to claim 25, wherein said second relational expression stored in said memory means is Vmin=Vo-(ΔV/2) Vmax=Vo+(ΔV/2) where ΔV is said amplitude of said applied voltage range, Vo is said reference voltage, and Vmin, Vmax are minimum and maximum values of said applied voltage range for producing said target amount of displacement.
Claim 29
Dependent Claim
56 words
A system for controlling a micromotion mechanism, comprising: two piezo-electric elements as actuators for causing a probe to scan the surface of a sample, said two piezo-electric elements being so constructed as to be orthogonal to each other; and said driving device as set forth in claim 12 for driving each of said two piezo-electric elements.
Claim 30
Dependent Claim
56 words
A system for controlling a micromotion mechanism, comprising: two piezo-electric elements as actuators for causing a probe to scan the surface of a sample, said two piezo-electric elements being so constructed as to be orthogonal to each other; and said driving device as set forth in claim 21 for driving each of said two piezo-electric elements.
Claim 31
Dependent Claim
56 words
A system for controlling a micromotion mechanism, comprising: two piezo-electric elements as actuators for causing a probe to scan the surface of a sample, said two piezo-electric elements being so constructed as to be orthogonal to each other; and said driving device as set forth in claim 22 for driving each of said two piezo-electric elements.
Claim 32
Dependent Claim
56 words
A system for controlling a micromotion mechanism, comprising: two piezo-electric elements as actuators for causing a probe to scan the surface of a sample, said two piezo-electric elements being so constructed as to be orthogonal to each other; and said driving device as set forth in claim 23 for driving each of said two piezo-electric elements.
Claim 33
Dependent Claim
56 words
A system for controlling a micromotion mechanism, comprising: two piezo-electric elements as actuators for causing a probe to scan the surface of a sample, said two piezo-electric elements being so constructed as to be orthogonal to each other; and said driving device as set forth in claim 24 for driving each of said two piezo-electric elements.
Claim 34
Dependent Claim
56 words
A system for controlling a micromotion mechanism, comprising: two piezo-electric elements as actuators for causing a probe to scan the surface of a sample, said two piezo-electric elements being so constructed as to be orthogonal to each other; and said driving device as set forth in claim 25 for driving each of said two piezo-electric elements.
Claim 35
Dependent Claim
56 words
A system for controlling a micromotion mechanism, comprising: two piezo-electric elements as actuators for causing a probe to scan the surface of a sample, said two piezo-electric elements being so constructed as to be orthogonal to each other; and said driving device as set forth in claim 26 for driving each of said two piezo-electric elements.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1998-01-23 | 1998-07-25 | 1999-01-24 | $2000.00 | Window Closed / Lapsed |
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