US5392113A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor wafer defect monitoring
Assignee: Philips Semiconductors Inc
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Filing: 1992-09-30
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Granted: 1995-02-21
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Expires: 2012-09-30
Abstract
Abstract Method and apparatus for detecting the presence of selected types of defects, such as chemical stains from a liquid photoresist material or a liquid dielectric material, on a non-visible chosen surface of a semiconductor water that has undergone at least one processing step. In one embodiment, a support substrate for, the wafer is provided that has a highly reflecting surface adjacent to the chosen surface. The reflecting surface and the chosen surface are moved apart, and the chosen surface is illuminated with light to form an optical image of the chosen surface. The optical image of the chosen surface is reflected in the reflecting surface, and the reflected optical image is examined for the presence of selected types of defects. In another embodiment, a portion of this reflecting surface is initially contiguous to the chosen surface. A selected defect, if any, on the chosen surface changes a surface characteristic of the reflecting surface so that the presence of this defect on the chosen surface is visually perceptible on the reflecting surface.
Inventors
- 👤 Anthony Sayka
- 👤 Stacy W. Hall
- 👤 Judy U. Galloway
- 👤 Pierre Leroux
- 👤 Bryan D. Schmidt
- 👤 Daniel D. Siems
- 👤 Henry B. Taylor, III
- 👤 Edward R. Vokoun
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 23:40
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/9501
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
125 words
A method for inspecting a surface of a semiconductor wafer for a selected type of defect, the surface of the wafer being initially disposed on a reflecting surface of a support substrate, the method comprising the steps of: positioning a reflecting surface contiguous to said semiconductor wafer surface, and allowing a visually perceptible portion of said selected type of defect to appear on said reflecting surface, if said defect is present on said semiconductor wafer surface; moving said semiconductor wafer surface and the reflecting surface away from each other so that the reflecting surface is exposed; illuminating the reflecting surface with light; and examining the reflecting image to determine if said selected type of defect is visually perceptible on any portion of the reflecting surface.
Claim 2
Independent Claim
125 words
A method for inspecting a surface of a semiconductor wafer for a selected type of defect, the surface of the wafer being initially disposed on a reflecting surface of a support substrate, the method comprising the steps of: positioning a reflecting surface contiguous to said semiconductor wafer surface, and allowing a visually perceptible portion of said selected type of defect to appear on said reflecting surface, if said defect is present on said semiconductor wafer surface; moving said semiconductor wafer surface and the reflecting surface away from each other so that the reflecting surface is exposed; illuminating the reflecting surface with light; and examining the reflecting image to determine if said selected type of defect is visually perceptible on any portion of the reflecting surface.
Claim 3
Dependent Claim
47 words
The method of claim 1, wherein said examining step further comprises the step of orienting a dark surface relative to said wafer surface and to said reflecting surface so that said reflecting surface appears dark, if no selected type of defect is present on said wafer surface.
Claim 4
Dependent Claim
30 words
The method of claim 1, wherein said visually perceptible portion is at least one of a difference in color, texture, and reflectivity compared to other portions of said reflecting surface.
Claim 5
Dependent Claim
19 words
The method of claim 1, wherein said visually perceptible portion is of about the same shape as said defect.
Claim 6
Dependent Claim
18 words
The method of claim 1, wherein said step of examining the reflected image utilizes an optical sensor array.
Claim 7
Dependent Claim
156 words
Apparatus for detecting a selected type of defect on a back surface of a semiconductor wafer, the type of defect being introduced during one or more wafer processing steps, the apparatus comprising: a supporting substrate on which the back surface of the semiconductor wafer rests during the wafer processing steps; a wafer holder for holding the back surface of said wafer in a position spaced apart from the substrate during a selected time interval, said wafer holder comprising a plurality of movable pins projecting through said substrate to move said back surface into a first position contiguous to said substrate and to translate said back surface away from said substrate to a second position that is spaced apart from said substrate; and an imager for forming an optical image of the back surface of said wafer during the selected time interval and for examining the back surface of said wafer for the selected type of defect.
Claim 8
Dependent Claim
156 words
Apparatus for detecting a selected type of defect on a back surface of a semiconductor wafer, the type of defect being introduced during one or more wafer processing steps, the apparatus comprising: a supporting substrate on which the back surface of the semiconductor wafer rests during the wafer processing steps; a wafer holder for holding the back surface of said wafer in a position spaced apart from the substrate during a selected time interval, said wafer holder comprising a plurality of movable pins projecting through said substrate to move said back surface into a first position contiguous to said substrate and to translate said back surface away from said substrate to a second position that is spaced apart from said substrate; and an imager for forming an optical image of the back surface of said wafer during the selected time interval and for examining the back surface of said wafer for the selected type of defect.
Claim 9
Dependent Claim
22 words
The apparatus of claim 6, wherein said supporting substrate includes a reflecting surface that comprises at least a portion of said imager.
Claim 10
Dependent Claim
14 words
The apparatus of claim 7 wherein said imager further comprises an optical sensor array.
Claim 11
Dependent Claim
13 words
The apparatus of claim 6 wherein said imager comprises an optical sensor array.
Claim 12
Dependent Claim
18 words
The apparatus of claim 6 further comprising a light source for illuminating said back surface of said wafer.
Claim 13
Dependent Claim
12 words
The apparatus of claim 6 wherein said supporting substrate comprises a chillplate.
Claim 14
Dependent Claim
22 words
The apparatus of claim 11 wherein said chillplate comprises a metal coated with Teflon with a cooling liquid circulating in said metal.
Claim 15
Dependent Claim
19 words
The apparatus of claim 6, wherein said imager includes a transparent substrate which forms an image of said defect.
Claim 16
Dependent Claim
14 words
The apparatus of claim 13 wherein said transparent substrate is provided with a grid.
Claim 17
Dependent Claim
32 words
The apparatus of claim 14 wherein said grid is comprised of a first plurality of parallel lines and a second plurality of parallel lines perpendicular to said first plurality of parallel lines.
Claim 18
Dependent Claim
31 words
The apparatus of claim 14 wherein said grid comprises a first plurality of concentric circles intersected by a second plurality of radial lines emanating from a center of said concentric circles.
Claim 19
Dependent Claim
152 words
Apparatus for detecting a selected type of defect on a surface of a semiconductor wafer, the apparatus comprising: a reflecting surface that is initially held against the surface of the semiconductor wafer to allow a visually perceptible portion of a selected type of defect to appear on the reflecting surface, if the defect is present on the surface of the semiconductor wafer; a mechanism for moving the reflecting surface and the surface of the semiconductor wafer relative to each other so that the reflecting surface is visible from a selected position above the reflecting surface; and a light source for illuminating the reflecting surface so that, if a visually perceptible portion of the selected type of defect is present on the reflecting surface, the presence of this visually perceptible defect is detected by light reflected from the reflecting surface to an observer or an optical sensor array positioned at a selected position.
Claim 20
Dependent Claim
152 words
Apparatus for detecting a selected type of defect on a surface of a semiconductor wafer, the apparatus comprising: a reflecting surface that is initially held against the surface of the semiconductor wafer to allow a visually perceptible portion of a selected type of defect to appear on the reflecting surface, if the defect is present on the surface of the semiconductor wafer; a mechanism for moving the reflecting surface and the surface of the semiconductor wafer relative to each other so that the reflecting surface is visible from a selected position above the reflecting surface; and a light source for illuminating the reflecting surface so that, if a visually perceptible portion of the selected type of defect is present on the reflecting surface, the presence of this visually perceptible defect is detected by light reflected from the reflecting surface to an observer or an optical sensor array positioned at a selected position.
Claim 21
Dependent Claim
36 words
The apparatus of claim 17, further comprising a dark surface, positioned relative to said reflecting surface, so that said reflecting surface appears uniformly dark, if no selected type of defect is present on said reflecting surface.
Claim 22
Dependent Claim
32 words
The apparatus of claim 17, where said reflecting surface is treated with a substance that reacts to the presence of a defect by changing at least one of color, texture and reflectivity.
Claim 23
Dependent Claim
30 words
The apparatus of claim 17, wherein said visually perceptible portion is at least one of a difference in color, texture, and reflectivity compared to other portions of said reflecting surface.
Claim 24
Dependent Claim
22 words
The apparatus of claim 17, wherein said visually perceptible portion is of about the same shape as said selected type of defect.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-02-20 | 1998-08-22 | 1999-02-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-02-20 | 2002-08-22 | 2003-02-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-02-20 | 2006-08-22 | 2007-02-21 | $7700.00 | Window Closed / Lapsed |