US5405488A
Expired / Lapsed
US
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System and method for plasma etching endpoint detection
Assignee: Philips Semiconductors Inc
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Filing: 1993-09-13
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Granted: 1995-04-11
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Expires: 2013-09-13
Abstract
Abstract A plasma etching endpoint detection system monitors two optical wavelengths during etching of a non-opaque dielectric film. A controller coupled to the optical monitoring equipment generates an endpoint detection signal corresponding to a predefined mathematical combination of the monitored intensity of light at the first wavelength and the monitored intensity of light at the second wavelength. When the endpoint detection signal crosses a threshold level, the etching of the dielectric layer is stopped. In a preferred embodiment the two monitored wavelengths differ by approximately a factor of two. More generally, the two monitored wavelengths are selected such that the combined intensity signal has a proportionally smaller false endpoint peak than either of the individual monitored intensity signals. The present invention is beneficial primarily for plasma etching systems in which the optical path of the optical monitoring equipment is not parallel to the surface of wafer being etched, which results in a premature or false endpoint signal produced by alternating constructive and destructive interference between reflected and refracted light.
Inventors
- 👤 Dimitrios Dimitrelis
- 👤 Calvin T. Gabriel
- 👤 Samuel V. Dunton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 20:37
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32917; H01J37/32935; H01J37/32963
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
246 words
A method of etching a non-opaque film on a substrate, the steps of the method comprising: etching said non-opaque film in a plasma etching chamber; monitoring the intensity of light produced in said plasma etching chamber at a first wavelength and at a second wavelength while said etching step is being performed; said monitoring step including monitoring said intensity of light using light sensors having optical paths that are neither parallel nor perpendicular to a top surface of said non-opaque film; generating a first and second endpoint detection signals corresponding to the monitored intensity of light produced at said first and second wavelengths, wherein both said first and second endpoint detection signals include respective premature peaks prior to completion of said etching step as well as respective end peaks at completion of said etching step; generating a combination endpoint detection signal corresponding to a mathematical combination of said monitored intensity of light at said first wavelength and said monitored intensity of light at said second wavelength, said combination endpoint signal having an end peak at completion of said etching step and a premature peak prior to completion of said etching step, wherein said mathematical combination is defined such that said combination endpoint detection signal's premature peak is smaller relative to its end peak than said respective premature peaks of first and second endpoint detection signals are relative to their respective end peaks; and stopping said etching when said combination endpoint detection signal crosses a threshold level.
Claim 2
Independent Claim
246 words
A method of etching a non-opaque film on a substrate, the steps of the method comprising: etching said non-opaque film in a plasma etching chamber; monitoring the intensity of light produced in said plasma etching chamber at a first wavelength and at a second wavelength while said etching step is being performed; said monitoring step including monitoring said intensity of light using light sensors having optical paths that are neither parallel nor perpendicular to a top surface of said non-opaque film; generating a first and second endpoint detection signals corresponding to the monitored intensity of light produced at said first and second wavelengths, wherein both said first and second endpoint detection signals include respective premature peaks prior to completion of said etching step as well as respective end peaks at completion of said etching step; generating a combination endpoint detection signal corresponding to a mathematical combination of said monitored intensity of light at said first wavelength and said monitored intensity of light at said second wavelength, said combination endpoint signal having an end peak at completion of said etching step and a premature peak prior to completion of said etching step, wherein said mathematical combination is defined such that said combination endpoint detection signal's premature peak is smaller relative to its end peak than said respective premature peaks of first and second endpoint detection signals are relative to their respective end peaks; and stopping said etching when said combination endpoint detection signal crosses a threshold level.
Claim 3
Dependent Claim
15 words
The method of claim 1, wherein said second wavelength is approximately half said first wavelength.
Claim 4
Dependent Claim
46 words
The method of claim 1, wherein one of said first wavelength and second wavelength is associated with a reaction product created by said etching step, and the other of said first wavelength and second wavelength is associated with a reactant used to perform said etching step.
Claim 5
Dependent Claim
24 words
The method of claim 3, said generating step including subtracting one of said monitored light intensities from the other of said monitored light intensities.
Claim 6
Independent Claim
255 words
A method of processing a semiconductor wafer, the steps of the method comprising: depositing and patterning a conductive interconnect layer on a said semiconductor wafer; depositing a non-opaque dielectric film on said patterned conductive interconnect layer; etching said non-opaque film in a plasma etching chamber; monitoring the intensity of light produced in said plasma etching chamber at a first wavelength and at a second wavelength while said etching step is being performed; said monitoring step including monitoring said intensity of light using at least light sensors having an optical path that is neither parallel nor perpendicular to a top surface of said non-opaque film; generating a first and second endpoint detection signals corresponding to the monitored intensity of light produced at said first and second wavelengths, wherein both said first and second endpoint detection signals include respective premature peaks prior to completion of said etching step as well as respective end peaks at completion of said etching step; generating combination endpoint detection signal corresponding to a mathematical combination of said monitored intensity of light at said first wavelength and said monitored intensity of light at said second wavelength, wherein said first and second wavelengths and said mathematical combination are selected so as to generate an easily detected premature peak in said combination endpoint detection signal prior to completion of said etching step; and stopping said etching when said premature peak occurs in said combination endpoint detection signal so as to leave a thin layer of said non-opaque dielectric film on said patterned conductive interconnect layer.
Claim 7
Independent Claim
255 words
A method of processing a semiconductor wafer, the steps of the method comprising: depositing and patterning a conductive interconnect layer on a said semiconductor wafer; depositing a non-opaque dielectric film on said patterned conductive interconnect layer; etching said non-opaque film in a plasma etching chamber; monitoring the intensity of light produced in said plasma etching chamber at a first wavelength and at a second wavelength while said etching step is being performed; said monitoring step including monitoring said intensity of light using at least light sensors having an optical path that is neither parallel nor perpendicular to a top surface of said non-opaque film; generating a first and second endpoint detection signals corresponding to the monitored intensity of light produced at said first and second wavelengths, wherein both said first and second endpoint detection signals include respective premature peaks prior to completion of said etching step as well as respective end peaks at completion of said etching step; generating combination endpoint detection signal corresponding to a mathematical combination of said monitored intensity of light at said first wavelength and said monitored intensity of light at said second wavelength, wherein said first and second wavelengths and said mathematical combination are selected so as to generate an easily detected premature peak in said combination endpoint detection signal prior to completion of said etching step; and stopping said etching when said premature peak occurs in said combination endpoint detection signal so as to leave a thin layer of said non-opaque dielectric film on said patterned conductive interconnect layer.
Claim 8
Dependent Claim
15 words
The method of claim 5, wherein said second wavelength is approximately half said first wavelength.
Claim 9
Dependent Claim
35 words
The method of claim 6, wherein said first wavelength is associated with a reaction product created by said etching step, and said second wavelength is associated with a reactant used to perform said etching step.
Claim 10
Dependent Claim
39 words
The method of claim 1, said monitoring step including monitoring said intensity of light using at least one light sensor having an optical path that is oriented at about 22 degrees from a top surface of said non-opaque film.
Claim 11
Dependent Claim
39 words
The method of claim 5, said monitoring step including monitoring said intensity of light using at least one light sensor having an optical path that is oriented at about 22 degrees from a top surface of said non-opaque film.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-04-10 | 1998-10-10 | 1999-04-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-04-10 | 2002-10-10 | 2003-04-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-04-10 | 2006-10-10 | 2007-04-11 | $7700.00 | Window Closed / Lapsed |