US5409310A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor processor liquid spray system with additive blending
Assignee: Applied Materials Inc
•
Filing: 1993-09-30
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Granted: 1995-04-25
•
Expires: 2013-09-30
Abstract
Abstract A semiconductor processor blending system for diluting a concentrated liquid additive into an actively flowing primary liquid. The concentrated additive is stored in a reservoir and transferred to a drained mixing tank via a metering pump. A diluent supply adds a measured amount of diluent to the mixing tank to provide a diluted additive. Primary fluid flows through aspirator-injectors having a suction port which draws from the mixing tank. This provides two-stage dilution which can easily achieve very dilute ratios of the additive.
Inventors
- 👤 Aleksander Owczarz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 02:40
CPC Classifications
B; B01; B01F; B01F23/00; B01F23/40; B01F23/49; B01F23/48; B01F23/483; B01F35/00; B01F35/10; B01F35/145; B01F35/1452; B01F25/00; B01F25/30; B01F25/31; B01F25/312
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
132 words
A semiconductor processor liquid blending system for blending a concentrated liquid additive into an actively flowing primary liquid, comprising: a concentrate reservoir for holding concentrated liquid additive; a first dilution mix tank; a pump for delivering concentrated liquid additive from the concentrate reservoir to the mix tank; a diluent supply for supplying diluent to the mix tank to produce a diluted additive therein; at least one primary liquid supply line through which primary liquid is supplied; at least one aspirator-injector connected to receive liquid flowing through said at least one liquid supply line; said aspirator-injector having inflow and outflow ports and a suction port connected to receive diluted additive from said mix tank; whereby diluted additive is injected into said primary liquid at said aspirator-injector to provide two-stage dilution of the additive.
Claim 2
Dependent Claim
132 words
A semiconductor processor liquid blending system for blending a concentrated liquid additive into an actively flowing primary liquid, comprising: a concentrate reservoir for holding concentrated liquid additive; a first dilution mix tank; a pump for delivering concentrated liquid additive from the concentrate reservoir to the mix tank; a diluent supply for supplying diluent to the mix tank to produce a diluted additive therein; at least one primary liquid supply line through which primary liquid is supplied; at least one aspirator-injector connected to receive liquid flowing through said at least one liquid supply line; said aspirator-injector having inflow and outflow ports and a suction port connected to receive diluted additive from said mix tank; whereby diluted additive is injected into said primary liquid at said aspirator-injector to provide two-stage dilution of the additive.
Claim 3
Dependent Claim
25 words
A semiconductor processor liquid blending system according to claim 1 and further comprising a mix tank gauge for measuring the contents of the mix tank.
Claim 4
Dependent Claim
32 words
A semiconductor processor liquid blending system according to claim 1 and further comprising at least one injection flowmeter for sensing the flow rate of diluted additive to said at least one aspirator-injector.
Claim 5
Dependent Claim
41 words
A semiconductor processor liquid blending system according to claim 1 and further comprising at least one injection flowmeter for indicating the flow rate of diluted additive to said at least one aspirator-injector; said injection flowmeter having a low flow rate alarm.
Claim 6
Dependent Claim
37 words
A semiconductor processor liquid blending system according to claim 1 and further comprising at least one injection adjustment valve connected to provide adjustment of the flow rate of the diluted additive to said at least one aspirator-injector.
Claim 7
Dependent Claim
27 words
A semiconductor processor liquid blending system according to claim 1 wherein said pump is a metering pump capable of delivering metered amounts of the concentrated liquid additive.
Claim 8
Dependent Claim
29 words
A semiconductor processor liquid blending system according to claim 1 wherein said at least one aspirator-injector has a diffuser for aiding in mixing of the additive within the aspirator-injector.
Claim 9
Dependent Claim
33 words
A semiconductor processor liquid blending system according to claim 1 and further comprising at least one primary liquid control valve for controlling the flow of primary liquid through said at least one aspirator-injector.
Claim 10
Dependent Claim
56 words
A semiconductor processor liquid blending system according to claim 1 and further comprising: at least one injection flowmeter for indicating the flow rate of diluted additive to said at least one aspirator-injector; at least one injection adjustment valve connected to provide adjustment of the flow rate of the diluted additive to said at least one aspirator-injector.
Claim 11
Dependent Claim
41 words
A semiconductor processor liquid blending system according to claim 1 and further comprising at least one spray nozzle connected to said primary liquid supply line downstream of said at least one aspirator-injector to receive primary liquid mixed with said liquid additive.
Claim 12
Dependent Claim
60 words
A semiconductor processor liquid blending system according to claim 1 and further comprising: at least one primary liquid control valve for controlling the flow of primary liquid through said at least one aspirator-injector; at least one primary gas purge for providing purge gas through the primary liquid supply line and said at least one aspirator-injector to drive primary liquid therefrom.
Claim 13
Dependent Claim
106 words
A semiconductor processor liquid blending system according to claim 1 and further comprising: at least one primary liquid control valve for controlling the flow of primary liquid through said at least one aspirator-injector; at least one primary gas purge for providing purge gas through the primary liquid supply line and said at least one aspirator-injector to drive primary liquid therefrom; at least one primary liquid recycle line connected adjacent to said at least one primary liquid control valves for providing a continuous migration of water through the primary liquid supply line upstream of said primary liquid control valve when the primary liquid control valve is closed.
Claim 14
Dependent Claim
125 words
A semiconductor processor liquid blending system for blending a concentrated liquid additive into an actively flowing primary liquid, comprising: a concentrate reservoir for holding concentrated liquid additive; a first dilution mix tank; a pump for delivering concentrated liquid additive from the concentrate reservoir to the mix tank; a diluent supply for supplying diluent to the mix tank to produce a diluted additive therein; a plurality of primary liquid supply lines through which primary liquid is supplied; a plurality of aspirator-injectors connected in said liquid supply lines; said aspirator-injectors having inflow and outflow ports and a suction port connected to receive diluted additive from said mix tank; whereby diluted additive is injected into the primary liquid at said aspirator-injectors to provide two-stage dilution of the additive.
Claim 15
Dependent Claim
125 words
A semiconductor processor liquid blending system for blending a concentrated liquid additive into an actively flowing primary liquid, comprising: a concentrate reservoir for holding concentrated liquid additive; a first dilution mix tank; a pump for delivering concentrated liquid additive from the concentrate reservoir to the mix tank; a diluent supply for supplying diluent to the mix tank to produce a diluted additive therein; a plurality of primary liquid supply lines through which primary liquid is supplied; a plurality of aspirator-injectors connected in said liquid supply lines; said aspirator-injectors having inflow and outflow ports and a suction port connected to receive diluted additive from said mix tank; whereby diluted additive is injected into the primary liquid at said aspirator-injectors to provide two-stage dilution of the additive.
Claim 16
Dependent Claim
25 words
A semiconductor processor liquid blending system according to claim 13 and further comprising a mix tank gauge for measuring the contents of the mix tank.
Claim 17
Dependent Claim
31 words
A semiconductor processor liquid blending system according to claim 13 and further comprising a plurality of injection flowmeters for indicating the flow rates of diluted additive to said plurality of aspirator-injectors.
Claim 18
Dependent Claim
40 words
A semiconductor processor liquid blending system according to claim 13 and further comprising a plurality of injection flowmeters for indicating the flow rates of diluted additive to said plurality of aspirator-injectors; said injection flowmeters having a low flow rate alarms.
Claim 19
Dependent Claim
36 words
A semiconductor processor liquid blending system according to claim 13 and further comprising a plurality of injection adjustment valves connected to provide adjustment of the flow rate of the diluted additive to said plurality of aspirator-injectors.
Claim 20
Dependent Claim
27 words
A semiconductor processor liquid blending system according to claim 13 wherein said pump is a metering pump capable of delivering metered amounts of the concentrated liquid additive.
Claim 21
Dependent Claim
28 words
A semiconductor processor liquid blending system according to claim 13 wherein said plurality of aspirator-injectors have a diffuser for aiding in mixing of the additive within the aspirator-injectors.
Claim 22
Dependent Claim
32 words
A semiconductor processor liquid blending system according to claim 13 and further comprising a plurality of primary liquid control valves for controlling the flow of primary liquid through said plurality of aspirator-injectors.
Claim 23
Dependent Claim
54 words
A semiconductor processor liquid blending system according to claim 13 and further comprising: a plurality of injection flowmeters for indicating the flow rate of diluted additive to said plurality of aspirator-injectors; a plurality of injection adjustment valves connected to provide adjustment of the flow rate of the diluted additive to said plurality of aspirator-injectors.
Claim 24
Dependent Claim
40 words
A semiconductor processor liquid blending system according to claim 13 and further comprising a plurality of spray nozzles connected to said primary liquid supply lines downstream of said plurality of aspirator-injectors to receive primary liquid mixed with said liquid additive.
Claim 25
Dependent Claim
58 words
A semiconductor processor liquid blending system according to claim 13 and further comprising: a plurality of primary liquid control valves for controlling the flow of primary liquid through said plurality of aspirator-injectors; a plurality of primary gas purges for providing purge gas through the primary liquid supply lines and said plurality of aspirator-injectors to drive primary liquid therefrom.
Claim 26
Dependent Claim
103 words
A semiconductor processor liquid blending system according to claim 13 and further comprising: a plurality of primary liquid control valves for controlling the flow of primary liquid through said plurality of aspirator-injectors; a plurality of primary gas purges for providing purge gas through the primary liquid supply lines and said plurality of aspirator-injectors to drive primary liquid therefrom; a plurality of primary liquid recycle lines connected adjacent to said plurality of primary liquid control valves for providing a continuous migration of water through the primary liquid supply lines upstream of said primary liquid control valves when the primary liquid control valves are closed.
Claim 27
Independent Claim
112 words
A method for blending a concentrated liquid additive into a plurality of primary liquid supply lines containing active flows of primary liquid for delivery by spray heads into a semiconductor processor chamber, comprising: delivering a controlled amount of concentrated liquid additive from a concentrate reservoir to a mix tank; diluting the concentrated liquid additive held within the mix tank by supplying a controlled amount of diluent to the mix tank to produce diluted additive; flowing primary liquid through aspirator-injectors mounted in the primary liquid supply lines; injecting diluted additive into flowing primary liquid via said aspirator-injectors; to thereby provide a plurality of active flows of primary liquid containing two-stage diluted liquid additive.
Claim 28
Independent Claim
112 words
A method for blending a concentrated liquid additive into a plurality of primary liquid supply lines containing active flows of primary liquid for delivery by spray heads into a semiconductor processor chamber, comprising: delivering a controlled amount of concentrated liquid additive from a concentrate reservoir to a mix tank; diluting the concentrated liquid additive held within the mix tank by supplying a controlled amount of diluent to the mix tank to produce diluted additive; flowing primary liquid through aspirator-injectors mounted in the primary liquid supply lines; injecting diluted additive into flowing primary liquid via said aspirator-injectors; to thereby provide a plurality of active flows of primary liquid containing two-stage diluted liquid additive.
Claim 29
Dependent Claim
19 words
A method according to claim 25 and further defined by emptying the mix tank prior to said delivering step.
Claim 30
Dependent Claim
18 words
A method according to claim 25 and further defined by balancing flows of diluted additive to the aspirator-injectors.
Claim 31
Independent Claim
94 words
A method for blending a concentrated liquid additive into an active flow of primary liquid within a semiconductor processor, comprising: delivering a controlled amount of concentrated liquid additive from a concentrate reservoir to a mix tank; diluting the concentrated liquid additive held within the mix tank by supplying a controlled amount of diluent to the mix tank to produce diluted additive; flowing primary liquid through an aspirator-injector mounted in a primary liquid supply line; injecting diluted additive into flowing primary liquid via said aspirator-injector; spraying the primary liquid with additive from a spray nozzle.
Claim 32
Independent Claim
94 words
A method for blending a concentrated liquid additive into an active flow of primary liquid within a semiconductor processor, comprising: delivering a controlled amount of concentrated liquid additive from a concentrate reservoir to a mix tank; diluting the concentrated liquid additive held within the mix tank by supplying a controlled amount of diluent to the mix tank to produce diluted additive; flowing primary liquid through an aspirator-injector mounted in a primary liquid supply line; injecting diluted additive into flowing primary liquid via said aspirator-injector; spraying the primary liquid with additive from a spray nozzle.
Claim 33
Dependent Claim
19 words
A method according to claim 28 and further defined by emptying the mix tank prior to said delivering step.
Claim 34
Independent Claim
94 words
A method for blending a concentrated liquid additive into an active flow of primary liquid, comprising: delivering a controlled amount of concentrated liquid additive from a concentrate reservoir to a mix tank; diluting the concentrated liquid additive held within the mix tank by supplying a controlled amount of diluent to the mix tank to produce diluted additive; flowing primary liquid through an aspirator-injector mounted in a primary liquid supply line; injecting diluted additive into flowing primary liquid via said aspirator-injector; to thereby provide an active flow of primary liquid containing two-stage diluted liquid additive.
Claim 35
Independent Claim
94 words
A method for blending a concentrated liquid additive into an active flow of primary liquid, comprising: delivering a controlled amount of concentrated liquid additive from a concentrate reservoir to a mix tank; diluting the concentrated liquid additive held within the mix tank by supplying a controlled amount of diluent to the mix tank to produce diluted additive; flowing primary liquid through an aspirator-injector mounted in a primary liquid supply line; injecting diluted additive into flowing primary liquid via said aspirator-injector; to thereby provide an active flow of primary liquid containing two-stage diluted liquid additive.
Claim 36
Dependent Claim
19 words
A method according to claim 30 and further defined by emptying the mix tank prior to said delivering step.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-04-24 | 1998-10-24 | 1999-04-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-04-24 | 2002-10-24 | 2003-04-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-04-24 | 2006-10-24 | 2007-04-25 | $7700.00 | Window Closed / Lapsed |