Patent JPS4898692A successfully refreshed from Google Patents.
US5425616A
Expired / Lapsed
US
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Micromotion stage
Assignee: National Institute of Advanced Industrial Science and Technology
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Filing: 1994-03-28
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Granted: 1995-06-20
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Expires: 2014-03-28
Abstract
Abstract A micromotion stage comprises a stationary plate and a moving plate connected by six links each consisting of a stacked piezoelectric element serving as an actuator, a holder fixed at one end of the stacked piezoelectric element, a capacitance type displacement gage retained by the holder and a target member fixed at the other end of the stacked piezoelectric element to have a part thereof face a tip portion of the capacitance type displacement gage across a small gap. Change in the distance between the holder and the target member caused by expansion or contraction of the stacked piezoelectric element and indicative of a change in the link stroke can be detected by the capacitance type displacement gage.
Inventors
- 👤 Tatsuo Arai
- 👤 Naotaka Komatsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 12:25
CPC Classifications
H; H02; H02N; H02N2/00; H02N2/0095; B; B25; B25J; B25J17/00; B25J17/02; B25J17/0258; B25J17/0266; B25J19/00; B25J19/02; B25J19/028; Y; Y10; Y10T; Y10T74/00; Y10T74/20; Y10T74/20207; Y10T74/20341; Y10T74/20354
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
188 words
A micromotion stage comprising: a moving plate supported horizontally above a stationary plate by links which expand and contract for providing strokes and having first to third target surfaces lying perpendicular to x, y and z axes of a Cartesian coordinate system; two capacitance type displacement gages attached at a prescribed spacing to have their longitudinal axes parallel to the x-axis and to have their one ends facing the first target surface; one capacitance type displacement gage attached to have its longitudinal axis parallel to the y-axis and to have its one end facing the second target surface; three capacitance type displacement gages attached to have their longitudinal axes parallel to the z-axis and such that the points of intersection of their axes with an xy plane including the x-axis and the y-axis are the apices of a right triangle in the xy plane and the sides of the right triangle adjacent to the right angle lie parallel to the x-axis and the y-axis; and whereby it is possible to detect positional and attitudinal changes in the moving plate caused by changes in the strokes of the links.
Claim 2
Dependent Claim
188 words
A micromotion stage comprising: a moving plate supported horizontally above a stationary plate by links which expand and contract for providing strokes and having first to third target surfaces lying perpendicular to x, y and z axes of a Cartesian coordinate system; two capacitance type displacement gages attached at a prescribed spacing to have their longitudinal axes parallel to the x-axis and to have their one ends facing the first target surface; one capacitance type displacement gage attached to have its longitudinal axis parallel to the y-axis and to have its one end facing the second target surface; three capacitance type displacement gages attached to have their longitudinal axes parallel to the z-axis and such that the points of intersection of their axes with an xy plane including the x-axis and the y-axis are the apices of a right triangle in the xy plane and the sides of the right triangle adjacent to the right angle lie parallel to the x-axis and the y-axis; and whereby it is possible to detect positional and attitudinal changes in the moving plate caused by changes in the strokes of the links.
References Cited (Backward Citations)
US4651589A
Cited
US5053687A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-06-19 | 1998-12-19 | 1999-06-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-06-19 | 2002-12-19 | 2003-06-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-06-19 | 2006-12-19 | 2007-06-20 | $7700.00 | Window Closed / Lapsed |