US5453661A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thin film ferroelectric flat panel display devices, and methods for operating and fabricating same
Assignee: RTI International
•
Filing: 1994-04-15
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Granted: 1995-09-26
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Expires: 2014-04-15
Abstract
Abstract A flat panel display includes a ferroelectric thin film between first and second spaced apart electrodes. The ferroelectric thin film emits electrons upon application of a predetermined voltage between the first and second spaced apart electrodes. The electrons are emitted in an electron emission path and impinge upon a luminescent layer such as a phosphor layer, which produces luminescence upon impingement upon the emitter electrodes. The ferroelectric thin film is preferably about 2 μm or less in thickness and is preferably a polycrystalline ferroelectric thin film. More preferably, the thin ferroelectric film is a highly oriented, polycrystalline thin ferroelectric film. Most preferably, highly oriented ferroelectric thin film has a preferred (001) crystal orientation and is about 2 μm or less in thickness. A flat panel display may be formed of arrays of such display elements. Top and bottom electrodes or side electrodes may be used. The display may be formed using conventional microelectronic fabrication steps.
Inventors
- 👤 Orlando H. Auciello
- 👤 Gary E. McGuire
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 07:28
CPC Classifications
H; H01; H01J; H01J63/00; B; B82; B82Y; B82Y10/00; H01J1/00; H01J1/02; H01J1/30; H01J1/312; H01J2201/00; H01J2201/30; H01J2201/306; H01J2329/00
Claims Analysis
Total Claims: 46
Claim 1
Independent Claim
89 words
A flat panel display comprising: first and second spaced apart electrodes, said first and second spaced apart electrodes producing an electric field therebetween upon application of a predetermined voltage therebetween; a ferroelectric thin film between said first and second spaced apart electrodes, said ferroelectric thin film emitting electrons therefrom in an electron emission path upon application of said predetermined voltage between said first and second spaced apart electrodes; and a luminescent layer in said electron emission path, said luminescent layer producing luminescence upon impingement of the emitted electrons thereon.
Claim 2
Dependent Claim
89 words
A flat panel display comprising: first and second spaced apart electrodes, said first and second spaced apart electrodes producing an electric field therebetween upon application of a predetermined voltage therebetween; a ferroelectric thin film between said first and second spaced apart electrodes, said ferroelectric thin film emitting electrons therefrom in an electron emission path upon application of said predetermined voltage between said first and second spaced apart electrodes; and a luminescent layer in said electron emission path, said luminescent layer producing luminescence upon impingement of the emitted electrons thereon.
Claim 3
Dependent Claim
21 words
A flat panel display according to claim 1 wherein said ferroelectric thin film is about 2 microns or less in thickness.
Claim 4
Dependent Claim
19 words
A flat panel display according to claim 2 wherein said ferroelectric thin film is a polycrystalline ferroelectric thin film.
Claim 5
Dependent Claim
23 words
A flat panel display according to claim 3 wherein said ferroelectric thin film is a polycrystalline ferroelectric thin film having (001) crystal orientation.
Claim 6
Dependent Claim
22 words
A flat panel display according to claim 1 wherein said luminescent layer is on said second electrode, opposite said ferroelectric thin film.
Claim 7
Dependent Claim
24 words
A flat panel display according to claim 1 wherein said luminescent layer is spaced apart from said second electrode to define a gap therebetween.
Claim 8
Dependent Claim
32 words
A flat panel display according to claim 1 further comprising a third electrode adjacent said luminescent layer, said third electrode accelerating emitted electrons from said ferroelectric thin film to said luminescent layer.
Claim 9
Dependent Claim
49 words
A flat panel display according to claim 1 wherein said ferroelectric thin film is about 2 microns or less in thickness and wherein said flat panel display further comprises means for applying a predetermined voltage of about 50 volts or less between said first and second spaced apart electrodes.
Claim 10
Dependent Claim
29 words
A flat panel display according to claim 1 wherein said second electrode is a patterned second electrode and wherein said electron emission path passes through said patterned second electrode.
Claim 11
Dependent Claim
21 words
A flat panel display according to claim 1 wherein said electron emission path is transverse to said first and second electrodes.
Claim 12
Dependent Claim
103 words
A flat panel display comprising: first and second spaced apart electrodes, said first and second spaced apart electrodes producing an electric field therebetween upon application of a predetermined voltage therebetween; a polycrystalline ferroelectric thin film having (001) crystal orientation and having thickness of about 2 microns or less, between said first and second spaced apart electrodes, said ferroelectric thin film emitting electrons therefrom in an electron emission path upon application of said predetermined voltage between said first and second spaced apart electrodes; and a luminescent layer in said electron emission path, said luminescent layer producing luminescence upon impingement of the emitted electrons thereon.
Claim 13
Dependent Claim
103 words
A flat panel display comprising: first and second spaced apart electrodes, said first and second spaced apart electrodes producing an electric field therebetween upon application of a predetermined voltage therebetween; a polycrystalline ferroelectric thin film having (001) crystal orientation and having thickness of about 2 microns or less, between said first and second spaced apart electrodes, said ferroelectric thin film emitting electrons therefrom in an electron emission path upon application of said predetermined voltage between said first and second spaced apart electrodes; and a luminescent layer in said electron emission path, said luminescent layer producing luminescence upon impingement of the emitted electrons thereon.
Claim 14
Dependent Claim
22 words
A flat panel display according to claim 11 wherein said luminescent layer is on said second electrode, opposite said ferroelectric thin film.
Claim 15
Dependent Claim
24 words
A flat panel display according to claim 11 wherein said luminescent layer is spaced apart from said second electrode to define a gap therebetween.
Claim 16
Dependent Claim
32 words
A flat panel display according to claim 11 further comprising a third electrode adjacent said luminescent layer, said third electrode accelerating emitted electrons from said ferroelectric thin film to said luminescent layer.
Claim 17
Dependent Claim
49 words
A flat panel display according to claim 11 wherein said ferroelectric thin film is about 2 microns or less in thickness and wherein said flat panel display further comprises means for applying a predetermined voltage of about 50 volts or less between said first and second spaced apart electrodes.
Claim 18
Dependent Claim
14 words
A flat panel display according to claim 11 wherein said luminescent layer includes phosphor.
Claim 19
Dependent Claim
29 words
A flat panel display according to claim 11 wherein said second electrode is a patterned second electrode and wherein said electron emission path passes through said patterned second electrode.
Claim 20
Dependent Claim
21 words
A flat panel display according to claim 11 wherein said electron emission path is transverse to said first and second electrodes.
Claim 21
Dependent Claim
105 words
A flat panel display comprising: first and second electrode arrays, said first and second electrode arrays being spaced apart from one another to define an array of electrode pairs, said electrode pairs producing an electric field therebetween upon application of a predetermined voltage therebetween; a ferroelectric thin film between each of said electrode pairs, said ferroelectric thin film emitting electrons therefrom in an electron emission path for each electrode pair, upon application of said predetermined voltage between said electrode pair; and a luminescent layer in said electron emission path of each electrode pair, said luminescent layer producing luminescence upon impingement of the emitted electrons thereon.
Claim 22
Dependent Claim
105 words
A flat panel display comprising: first and second electrode arrays, said first and second electrode arrays being spaced apart from one another to define an array of electrode pairs, said electrode pairs producing an electric field therebetween upon application of a predetermined voltage therebetween; a ferroelectric thin film between each of said electrode pairs, said ferroelectric thin film emitting electrons therefrom in an electron emission path for each electrode pair, upon application of said predetermined voltage between said electrode pair; and a luminescent layer in said electron emission path of each electrode pair, said luminescent layer producing luminescence upon impingement of the emitted electrons thereon.
Claim 23
Dependent Claim
21 words
A flat panel display according to claim 19 wherein said ferroelectric thin film is about 2 microns or less in thickness.
Claim 24
Dependent Claim
19 words
A flat panel display according to claim 20 wherein said ferroelectric thin film is a polycrystalline ferroelectric thin film.
Claim 25
Dependent Claim
23 words
A flat panel display according to claim 21 wherein said ferroelectric thin film is a polycrystalline ferroelectric thin film having (001) crystal orientation.
Claim 26
Dependent Claim
23 words
A flat panel display according to claim 19 wherein said luminescent layer is on said second electrode array, opposite said ferroelectric thin film.
Claim 27
Dependent Claim
25 words
A flat panel display according to claim 19 wherein said luminescent layer is spaced apart from said second electrode array to define a gap therebetween.
Claim 28
Dependent Claim
32 words
A flat panel display according to claim 19 further comprising a third electrode adjacent said luminescent layer, said third electrode accelerating emitted electrons from said ferroelectric thin film to said luminescent layer.
Claim 29
Dependent Claim
49 words
A flat panel display according to claim 19 wherein said ferroelectric thin film is about 2 microns or less in thickness and wherein said flat panel display further comprises means for applying a predetermined voltage of about 50 volts or less between said first and second spaced apart electrodes.
Claim 30
Dependent Claim
35 words
A flat panel display according to claim 19 wherein the electrodes in said second electrode array are patterned electrodes and wherein said electron emission path from each electrode pair passes through the corresponding patterned electrode.
Claim 31
Dependent Claim
37 words
A flat panel display according to claim 27 wherein each of said electrodes in said first and second arrays extend in a direction along the respective first and second arrays, to form top and bottom electrode pairs.
Claim 32
Dependent Claim
30 words
A flat panel display according to claim 19 wherein said electron emission path from each electrode pair is parallel to said first and second electrodes of the corresponding electrode pair.
Claim 33
Dependent Claim
36 words
A flat panel display according to claim 29 wherein each of said electrodes in said first and second arrays extend in a direction transverse to the respective first and second arrays, to form side electrode pairs.
Claim 34
Dependent Claim
52 words
A visible image displaying method comprising the steps of: applying a voltage of about fifty volts or less across a ferroelectric thin film of about two microns or less in thickness, to produce electron emission from said ferroelectric thin film; and impinging the emitted electrons onto a luminescent layer to produce luminescence.
Claim 35
Dependent Claim
52 words
A visible image displaying method comprising the steps of: applying a voltage of about fifty volts or less across a ferroelectric thin film of about two microns or less in thickness, to produce electron emission from said ferroelectric thin film; and impinging the emitted electrons onto a luminescent layer to produce luminescence.
Claim 36
Dependent Claim
33 words
A method according to claim 31 wherein said applying step comprises the step of applying a voltage of about fifty volts or less across a polycrystalline ferroelectric thin film having (001) crystal orientation.
Claim 37
Dependent Claim
31 words
A method according to claim 31 wherein said impinging step comprises the step of impinging the emitted electrons from said ferroelectric thin film, across a gap and onto said luminescent layer.
Claim 38
Dependent Claim
32 words
A method according to claim 31 wherein the following step is preformed between said applying step and said impinging step: accelerating the emitted electrons from said ferroelectric layer to said luminescent layer.
Claim 39
Independent Claim
89 words
A method of fabricating a flat panel display comprising the steps of: forming a first electrode array on a substrate; forming a polycrystalline ferroelectric thin film on said first electrode array; forming a second electrode array on said polycrystalline ferroelectric thin film to define an electron emission path from said polycrystalline ferroelectric thin film upon application of a predetermined voltage between said first and second electrode arrays; and forming a luminescent layer in said electron emission path such that said luminescent layer produces luminescence upon impingement of electrons thereon.
Claim 40
Independent Claim
89 words
A method of fabricating a flat panel display comprising the steps of: forming a first electrode array on a substrate; forming a polycrystalline ferroelectric thin film on said first electrode array; forming a second electrode array on said polycrystalline ferroelectric thin film to define an electron emission path from said polycrystalline ferroelectric thin film upon application of a predetermined voltage between said first and second electrode arrays; and forming a luminescent layer in said electron emission path such that said luminescent layer produces luminescence upon impingement of electrons thereon.
Claim 41
Dependent Claim
108 words
A method according to claim 35: wherein said step of forming a first electrode array on a substrate comprises the step of forming a connecting electrode array on the substrate; wherein the step of forming a polycrystalline ferroelectric thin film is followed by the step of forming a plurality of first electrodes in said polycrystalline ferroelectric thin film, electrically contacting connecting electrode array; and wherein the step of forming a second electrode array comprises the step of forming a second electrode array in said polycrystalline ferroelectric thin film, such that said first electrodes and said second electrode array form pairs of side electrodes for said flat panel display.
Claim 42
Dependent Claim
28 words
A method according to claim 35 wherein said step of forming a polycrystalline ferroelectric thin film comprises the step of forming a highly oriented polycrystalline ferroelectric thin film.
Claim 43
Dependent Claim
34 words
A method according to claim 35 wherein said step of forming a second electrode array is followed by the step of removing said polycrystalline ferroelectric layer between adjacent electrodes of said second electrode array.
Claim 44
Dependent Claim
35 words
A method according to claim 35 wherein said step of forming a luminescent layer comprises the steps of: forming a luminescent layer on a second substrate; and mounting said second substrate adjacent said luminescent layer.
Claim 45
Dependent Claim
26 words
A method according to claim 39 wherein said mounting step comprises the step of mounting said second substrate adjacent, and spaced apart from, said luminescent layer.
Claim 46
Dependent Claim
29 words
A method according to claim 35 wherein said step of forming a luminescent layer comprises the step of forming an luminescent layer on said polycrystalline thin film ferroelectric layer.
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