US5456561A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Robot prealigner
Assignee: ADE Corp
•
Filing: 1994-07-12
•
Granted: 1995-10-10
•
Expires: 2014-07-12
Abstract
Abstract An alignment station for elements such as semiconductor wafers on a robot arm uses a rotating support and edge detector which in combination are operative to place a wafer on the rotating support, detect wafer alignment, move the wafer to bring it into alignment either on the rotating support itself or onto a separate station.
Inventors
- 👤 Noel S. Poduje
- 👤 Roy S. Mallory
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 21:57
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/50; H10P72/53; B; B25; B25J; B25J13/00; B25J13/08; B25J13/088; B25J9/00; B25J9/02; B25J9/04; B25J9/041; B25J9/042; B25J9/16; B25J9/1679
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
183 words
A system for combined element transport and alignment comprising: a pedestal having a reference position; means for determining a first position of an element having a centroid and a flat on said pedestal relative to said reference position, said first position having associated therewith an offset of the centroid and an angle of the flat relative to said reference position; a linear manipulator having an element holder on an articulated two leg arm, said manipulator having means for angling the legs of the arm to produce a first direction of motion for said holder along a straight line, having means for providing both a second direction of motion about an axis and a third direction of motion in elevation, and having means for maintaining the angular position of the holder during motion of the holder in the first direction of motion; and means for controlling the movement of the linear manipulator to move said element on said holder from said first position to a second position, wherein said second position has associated therewith a predetermined offset and angle relative to said reference position.
Claim 2
Independent Claim
183 words
A system for combined element transport and alignment comprising: a pedestal having a reference position; means for determining a first position of an element having a centroid and a flat on said pedestal relative to said reference position, said first position having associated therewith an offset of the centroid and an angle of the flat relative to said reference position; a linear manipulator having an element holder on an articulated two leg arm, said manipulator having means for angling the legs of the arm to produce a first direction of motion for said holder along a straight line, having means for providing both a second direction of motion about an axis and a third direction of motion in elevation, and having means for maintaining the angular position of the holder during motion of the holder in the first direction of motion; and means for controlling the movement of the linear manipulator to move said element on said holder from said first position to a second position, wherein said second position has associated therewith a predetermined offset and angle relative to said reference position.
Claim 3
Dependent Claim
33 words
The system recited in claim 1 wherein said pedestal comprises a rotatable holding means for holding said element and wherein said reference position corresponds to a center of rotation of said holding means.
Claim 4
Dependent Claim
22 words
The system recited in claim 1 wherein said second position is along said straight line associated with said first direction of motion.
Claim 5
Dependent Claim
15 words
The system recited in claim 1 wherein said second position corresponds to said reference position.
Claim 6
Dependent Claim
44 words
The system recited in claim 1 wherein said legs of the arm of said linear manipulator are coupled to move at an angular rate relative to each other which is twice the angular rate by which either leg moves relative to said element holder.
Claim 7
Dependent Claim
25 words
The system recited in claim 1 wherein said controlling means can move said linear manipulator to deliver said element on said holder to a workstation.
Claim 8
Dependent Claim
13 words
The system recited in claim 1 wherein said element is a semiconductor wafer.
Claim 9
Dependent Claim
32 words
The system recited in claim 1 wherein said means for determining said first position comprises means for rotating said element on said pedestal to detect an edge of said element during rotation.
Claim 10
Independent Claim
188 words
A system for combined element transport and alignment comprising: a pedestal having a reference position;. means for characterizing a first position of an element having a centroid and a flat on said pedestal, said first position including an offset of the centroid and an angle of the flat of said element relative to said reference position and means for positioning the element in a second position having a predetermined angle relative to said reference position; a linear manipulator having an element holder on an articulated two leg arm, having means for angling the legs of the arm to produce a first direction of motion for said holder along a straight line coinciding with said predetermined angle of said second position, having means for providing both a second direction of motion about an axis and a third direction of motion in elevation, and having means for maintaining the angular position of the holder during motion of the holder in the first direction; and means for controlling the movement of the linear manipulator to move said element on said holder in said straight line as a function of said offset.
Claim 11
Independent Claim
188 words
A system for combined element transport and alignment comprising: a pedestal having a reference position;. means for characterizing a first position of an element having a centroid and a flat on said pedestal, said first position including an offset of the centroid and an angle of the flat of said element relative to said reference position and means for positioning the element in a second position having a predetermined angle relative to said reference position; a linear manipulator having an element holder on an articulated two leg arm, having means for angling the legs of the arm to produce a first direction of motion for said holder along a straight line coinciding with said predetermined angle of said second position, having means for providing both a second direction of motion about an axis and a third direction of motion in elevation, and having means for maintaining the angular position of the holder during motion of the holder in the first direction; and means for controlling the movement of the linear manipulator to move said element on said holder in said straight line as a function of said offset.
Claim 12
Dependent Claim
27 words
The system recited in claim 9 wherein said characterizing and positioning means comprises means for rotating said element and detecting an edge of said element during rotation.
Claim 13
Dependent Claim
38 words
The system recited in claim 9 wherein said linear manipulator legs are coupled to move at an angular rate relative to each other which is twice the angular rate by which either leg moves relative to said holder.
Claim 14
Dependent Claim
33 words
The system recited in claim 9 wherein said pedestal comprises a rotatable holding means for holding said element and wherein said reference position corresponds to a center of rotation of said holding means.
Claim 15
Dependent Claim
13 words
The system recited in claim 9 wherein said element is a semiconductor wafer.
Claim 16
Dependent Claim
25 words
The system recited in claim 9 wherein said controlling means can move said manipulator to place said element on said pedestal at said reference position.
Claim 17
Dependent Claim
42 words
The system recited in claim 9 wherein said angling means, said means for providing a second direction of motion about an axis and a third direction of motion in elevation are operative to deliver said element on said holder to a workstation.
Claim 18
Independent Claim
165 words
A method for combined element transport and alignment comprising the steps of: determining a first position of an element having a centroid and a flat on a pedestal, said first position including an offset of the centroid and an angle of the flat of said element relative to a reference position of said pedestal; supporting said element on an element holder comprising an articulated two leg arm having means for angling the legs of the arm to produce a first direction of motion for said holder along a straight line, having means for providing both a second direction of motion about an axis and a third direction of motion in elevation, and having means for maintaining the angular position of the holder during motion of the holder in the first direction; and moving said element on said holder to a second position, wherein said second position has associated therewith a predetermined offset of the centroid and angle of the flat relative to said reference position.
Claim 19
Independent Claim
165 words
A method for combined element transport and alignment comprising the steps of: determining a first position of an element having a centroid and a flat on a pedestal, said first position including an offset of the centroid and an angle of the flat of said element relative to a reference position of said pedestal; supporting said element on an element holder comprising an articulated two leg arm having means for angling the legs of the arm to produce a first direction of motion for said holder along a straight line, having means for providing both a second direction of motion about an axis and a third direction of motion in elevation, and having means for maintaining the angular position of the holder during motion of the holder in the first direction; and moving said element on said holder to a second position, wherein said second position has associated therewith a predetermined offset of the centroid and angle of the flat relative to said reference position.
Claim 20
Dependent Claim
29 words
The method recited in claim 16 wherein said determining step comprises the steps of rotating said element on said pedestal and detecting an edge of said element during rotation.
Claim 21
Dependent Claim
47 words
The method recited in claim 16 wherein said step of supporting said element on said holder comprises the step of moving said manipulator legs at an angular rate relative to each other which is twice the angular rate by which either leg moves relative to said holder.
Claim 22
Dependent Claim
38 words
The method recited in claim 16 wherein said moving step comprises the step of moving said element to said second position with said predetermined angle of said flat associated with said second position corresponding to said straight line.
Claim 23
Dependent Claim
28 words
The method recited in claim 16 wherein said moving step further comprises the step of placing said element on said pedestal with said centroid at said reference position.
Claim 24
Dependent Claim
20 words
The method recited in claim 16 wherein said moving step comprises the step of placing said element on a workstation.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-10-09 | 1999-04-10 | 1999-10-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-10-09 | 2003-04-10 | 2003-10-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-10-09 | 2007-04-10 | 2007-10-10 | $7700.00 | Window Closed / Lapsed |