US5458732A
Expired / Lapsed
US
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Method and system for identifying process conditions
Assignee: Texas Instruments Inc
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Filing: 1994-01-28
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Granted: 1995-10-17
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Expires: 2014-01-28
Abstract
Abstract A plasma processing system 10 for fabricating a semiconductor wafer 24 is disclosed. The system includes a plasma processing tool 12 and an RF energy source 20 coupled to the plasma processing tool 12. An optional matching network 22 may be included between the RF energy source 20 and the plasma processing tool 12. Circuitry 18 for monitoring the RF energy to obtain a measurement characteristic is also provided. At least one transducer 14 or 16 is coupled between the plasma processing tool 12 and the circuitry 18 for monitoring the RF energy. The RF energy is typically applied at a fundamental frequency and the electrical characteristic is monitored at a second frequency different than the fundamental frequency. Also included is circuitry 19, such as a computer, for interpreting the measurement to determine a condition of the processing system 10. Other systems and methods are also disclosed.
Inventors
- 👤 Stephanie W. Butler
- 👤 Keith J. Brankner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 12:56
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/32174; H01J37/32917; H01J37/32935; H10; H10P; H10P74/00; H10P74/23; H10P74/238
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
93 words
A method of determining the condition of a processing system comprising the steps of: providing a processing system including an electromagnetic power source and a processing chamber; applying electromagnetic energy at a fundamental frequency to said processing system; monitoring at least one electrical characteristic of said electromagnetic energy to obtain a measurement characteristic wherein said electromagnetic energy is applied at said fundamental frequency and said electrical characteristic is monitored at at least one associated frequency different than said fundamental frequency; and interpreting said measurement characteristic to determine the condition of said processing system.
Claim 2
Independent Claim
93 words
A method of determining the condition of a processing system comprising the steps of: providing a processing system including an electromagnetic power source and a processing chamber; applying electromagnetic energy at a fundamental frequency to said processing system; monitoring at least one electrical characteristic of said electromagnetic energy to obtain a measurement characteristic wherein said electromagnetic energy is applied at said fundamental frequency and said electrical characteristic is monitored at at least one associated frequency different than said fundamental frequency; and interpreting said measurement characteristic to determine the condition of said processing system.
Claim 3
Dependent Claim
17 words
The method of claim 1 wherein said measurement characteristic indicates information about impurities in said processing chamber.
Claim 4
Dependent Claim
21 words
The method of claim 1 wherein said measurement characteristic indicates information about a pressure or control thereof in said processing chamber.
Claim 5
Dependent Claim
47 words
The method of claim 1 and further comprising the steps of: providing a wafer in said processing chamber, said wafer including a first material formed thereon; and etching said first material wherein said measurement characteristic indicates information about the etch rate or uniformity of said first material.
Claim 6
Dependent Claim
45 words
The method of claim 1 and further comprising the steps off providing a wafer in said processing chamber; and depositing a first material on a surface of said wafer wherein said measurement characteristic indicates information about the deposition rate or uniformity of said first material.
Claim 7
Dependent Claim
10 words
The method of claim 5 said information comprises endpoint information.
Claim 8
Dependent Claim
29 words
The method of claim 1 and further comprising the step of cleaning said processing chamber wherein said cleaning is controlled at least in part based upon said measurement characteristic.
Claim 9
Dependent Claim
18 words
The method of claim 7 wherein said cleaning step comprises leaving said process chamber under substantially vacuum conditions.
Claim 10
Dependent Claim
14 words
The method of claim 1 wherein said processing chamber comprises a plasma processing chamber.
Claim 11
Dependent Claim
28 words
The method of claim 1 wherein said electrical characteristic is chosen from the group consisting of power, phase, RMS voltage, RMS current, peak-to-peak voltage, peak-to-peak current, and impedance.
Claim 12
Dependent Claim
22 words
The method of claim 1 and further comprising the step of monitoring said at least one electrical characteristic at said fundamental frequency.
Claim 13
Dependent Claim
16 words
The method of claim 1 wherein said measurement characteristic is obtained by monitoring combinations of signals.
Claim 14
Dependent Claim
16 words
The method of claim 12 wherein said combinations of signals are measured at a single frequency.
Claim 15
Independent Claim
103 words
A method of controlling a machine condition of a processing system, comprising the steps off providing a processing system including an electromagnetic power source and a processing chamber; applying electromagnetic energy at a fundamental frequency to said processing system; monitoring at least one electrical characteristic of said electromagnetic energy at an associated frequency different than said fundamental frequency to obtain a measurement characteristic, said measurement characteristic providing information about a machine condition; interpreting said measurement characteristic to determine said information about said machine condition; and affecting said machine condition, wherein said affecting step is controlled at least in part based upon said information.
Claim 16
Independent Claim
103 words
A method of controlling a machine condition of a processing system, comprising the steps off providing a processing system including an electromagnetic power source and a processing chamber; applying electromagnetic energy at a fundamental frequency to said processing system; monitoring at least one electrical characteristic of said electromagnetic energy at an associated frequency different than said fundamental frequency to obtain a measurement characteristic, said measurement characteristic providing information about a machine condition; interpreting said measurement characteristic to determine said information about said machine condition; and affecting said machine condition, wherein said affecting step is controlled at least in part based upon said information.
Claim 17
Dependent Claim
26 words
The method of claim 14 wherein said machine condition comprises contamination on a wall of said processing chamber and said affecting step comprises cleaning said wall.
Claim 18
Dependent Claim
21 words
The method of claim 15 wherein said step of cleaning said wall comprises maintaining said process chamber at a low pressure.
Claim 19
Dependent Claim
24 words
The method of claim 14 wherein said machine condition comprises a pressure within said processing chamber and said affecting step comprises changing said pressure.
Claim 20
Dependent Claim
13 words
The method of claim 17 wherein said changing step comprises lowering said pressure.
Claim 21
Independent Claim
120 words
A method of fabricating a device comprising the steps of: providing a processing system including an electromagnetic power source and a processing chamber; providing a device to be fabricated within said processing chamber; applying electromagnetic energy at a fundamental frequency to said processing system; performing a process step on said device; monitoring at least one electrical characteristic of said electromagnetic energy at said fundamental frequency and at an associated frequency different than said fundamental frequency to obtain a measurement characteristic, said measurement characteristic providing information about said device to be fabricated; interpreting said measurement characteristic to determine said information about said device; and controlling said process step wherein said controlling step is at least in part based upon said information.
Claim 22
Independent Claim
120 words
A method of fabricating a device comprising the steps of: providing a processing system including an electromagnetic power source and a processing chamber; providing a device to be fabricated within said processing chamber; applying electromagnetic energy at a fundamental frequency to said processing system; performing a process step on said device; monitoring at least one electrical characteristic of said electromagnetic energy at said fundamental frequency and at an associated frequency different than said fundamental frequency to obtain a measurement characteristic, said measurement characteristic providing information about said device to be fabricated; interpreting said measurement characteristic to determine said information about said device; and controlling said process step wherein said controlling step is at least in part based upon said information.
Claim 23
Dependent Claim
20 words
The method of claim 19 wherein said step of performing a process step comprises depositing a material upon said device.
Claim 24
Dependent Claim
12 words
The method of claim 20 wherein said information comprises deposition uniformity information.
Claim 25
Dependent Claim
14 words
The method of claim 20 wherein said information comprises deposition rate and endpoint information.
Claim 26
Dependent Claim
20 words
The method of claim 19 wherein said step of performing a process step comprises etching a material from said device.
Claim 27
Dependent Claim
12 words
The method of claim 20 wherein said information comprises etch uniformity information.
Claim 28
Dependent Claim
78 words
A processing system comprising: a processing tool; an electromagnetic energy source coupled to said processing tool for applying electromagnetic energy at a fundamental frequency to said processing tool; circuitry for monitoring said electromagnetic energy at an associated frequency different than said fundamental frequency to obtain a measurement characteristic; a transducer coupled between said processing tool and said circuitry for monitoring said electromagnetic energy; and circuitry for interpreting said measurement characteristic to determine a condition of said processing system.
Claim 29
Dependent Claim
78 words
A processing system comprising: a processing tool; an electromagnetic energy source coupled to said processing tool for applying electromagnetic energy at a fundamental frequency to said processing tool; circuitry for monitoring said electromagnetic energy at an associated frequency different than said fundamental frequency to obtain a measurement characteristic; a transducer coupled between said processing tool and said circuitry for monitoring said electromagnetic energy; and circuitry for interpreting said measurement characteristic to determine a condition of said processing system.
Claim 30
Dependent Claim
16 words
The system of claim 25 wherein said processing tool comprises a capacitively coupled plasma processing chamber.
Claim 31
Dependent Claim
16 words
The system of claim 25 wherein said processing tool comprises an inductively coupled plasma processing chamber.
Claim 32
Dependent Claim
21 words
The system of claim 25 and further comprising a matching network coupled between said electromagnetic energy source and said processing tool.
Claim 33
Dependent Claim
28 words
The system of claim 25 wherein said measurement characteristic is chosen from the group consisting of power, phase, RMS voltage, RMS current, peak-to-peak voltage, peak-to-peak current, and impedance.
Claim 34
Dependent Claim
17 words
The system of claim 25 wherein said associated frequency is a rational multiple of said fundamental frequency.
Claim 35
Dependent Claim
15 words
The system of claim 30 wherein said associated frequency is less than said fundamental frequency
Claim 36
Dependent Claim
18 words
The system of claim 25 wherein said transducer is coupled between said processing tool and a reference potential.
Claim 37
Dependent Claim
19 words
The system of claim 25 wherein said transducer is coupled between said processing tool and said electromagnetic energy source.
Claim 38
Dependent Claim
20 words
The system of claim 33 and further comprising a second transducer coupled between said processing tool and a reference potential.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-10-16 | 1999-04-17 | 1999-10-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-10-16 | 2003-04-17 | 2003-10-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-10-16 | 2007-04-17 | 2007-10-17 | $7700.00 | Window Closed / Lapsed |