US5498294A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus and method for washing substrates
Assignee: Tokyo Electron Ltd
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Filing: 1993-11-19
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Granted: 1996-03-12
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Expires: 2013-11-19
Abstract
Abstract A substrates-cleaning apparatus including a first unit provided with a scrubber for scrubbing a single side of a substrate, a second unit provided with a turning mechanism for turning the substrate upside down or vice versa, and a carrier robot for carrying the substrate between the first and the second unit.
Inventors
- 👤 Michiaki Matsushita
- 👤 Yutaka Yamahira
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 17:13
CPC Classifications
H; H10; H10P; H10P52/00; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
189 words
An apparatus for washing a substrate, comprising: scrubber means for scrubbing a single surface of the substrate; a first unit having the scrubber means disposed therein; turning means, having a horizontal holding shaft for holding a substrate substantially horizontal, for turning the substrate about the horizontal holding shaft to cause front and back surfaces of the substrate to face upward alternately; a second unit having the turning means disposed therein; carrier means for carrying the substrate between the first and second units; and a stage for mounting a substrate thereon, the stage being movable in a vertical direction within the second unit, thus enabling the substrate to be transferred between the carrier means and the turning means via the stage, wherein the front surface of the substrate is scrubbed by the scrubber means, the substrate is carried by the carrier means from the first unit to the second unit, the substrate is turned upside down by the turning means, the substrate is carried by the carrier means from the second unit to the first unit, and the back surface of the substrate is then scrubbed by the scrubber means.
Claim 2
Independent Claim
189 words
An apparatus for washing a substrate, comprising: scrubber means for scrubbing a single surface of the substrate; a first unit having the scrubber means disposed therein; turning means, having a horizontal holding shaft for holding a substrate substantially horizontal, for turning the substrate about the horizontal holding shaft to cause front and back surfaces of the substrate to face upward alternately; a second unit having the turning means disposed therein; carrier means for carrying the substrate between the first and second units; and a stage for mounting a substrate thereon, the stage being movable in a vertical direction within the second unit, thus enabling the substrate to be transferred between the carrier means and the turning means via the stage, wherein the front surface of the substrate is scrubbed by the scrubber means, the substrate is carried by the carrier means from the first unit to the second unit, the substrate is turned upside down by the turning means, the substrate is carried by the carrier means from the second unit to the first unit, and the back surface of the substrate is then scrubbed by the scrubber means.
Claim 3
Dependent Claim
126 words
The apparatus according to claim 1 further comprising: a spin chuck mounted below the stage such that, when the stage is moved downward, the spin chuck passes smoothly through a central opening of the stage so as to attract the substrate thereon; means for rotating the spin chuck; a photosensitive sensor for detecting whether or not an orientation flat of the substrate is aligned; and control means for controlling the rotating means based on a signal generated from the photosensitive sensor, wherein the spin chuck is lifted and passes through the central opening of the stage, the substrate is transferred from the stage to the spin chuck and, while the substrate is rotating, the substrate is detected by the photosensitive sensor to align the orientation flat.
Claim 4
Dependent Claim
128 words
The apparatus according to claim 1, wherein said turning means includes a pair of holder members for holding the substrate therebetween, a stepping motor for rotating the substrate together with the holder members round the horizontal holding shaft, and a motor drive circuit for driving an excited coil of each phase of the stepping motor; and wherein said motor drive circuit includes means for detecting exciting current flowing to drive for enabling and shutting the flow of the excited coils, a switch for enabling and shutting the flow of the exciting current, and switch control means for turning on the switch to shut the flow of exciting current when the value of the exciting current detected by the exciting current detector means becomes equal to a threshold value.
Claim 5
Dependent Claim
131 words
The apparatus according to claim 1, wherein said carrier means includes a pair of holder members for holding the substrate therebetween, a rod connected to these holder members, a stepping motor for rotating the substrate together with the holder members around the rod, and a motor drive circuit for driving an excited coil of each phase of the stepping motor; and wherein said motor drive circuit includes means for detecting exciting current flowing to drive transistors connected to the excited coils, a switch for enabling and shutting the flow of the exciting current, and a switch control means for turning on the switch to shut the flow of the exciting current when the value of the exciting current detected by the exciting current detector means becomes equal to a threshold value.
Claim 6
Dependent Claim
14 words
The apparatus according to claim 1, wherein said first unit has two scrubber means.
Claim 7
Dependent Claim
14 words
The apparatus according to claim 1, wherein said second unit has two turning means.
Claim 8
Dependent Claim
22 words
The apparatus according to claim 6, wherein said means for aligning the substrate is attached only to one of the turning means.
Claim 9
Independent Claim
205 words
An apparatus for washing a substrate, comprising: scrubber means for scrubbing a single surface of the substrate; a first unit having the scrubber means disposed therein; turning means, having a horizontal holding shaft for holding the substrate substantially horizontal, for turning the substrate about the horizontal holding shaft to cause front and back surfaces of the substrate to face upward alternatively; a stage movable in a vertical direction and having a substrate supported thereon in substantially a horizontal direction; a second unit having the turning means and stage disposed therein, the stage being movable in the vertical direction within the unit; and carrier means for carrying the substrate between the first and second units; wherein the front surface of the substrate is scrubbed by the scrubber means; the substrate is carried by the carrier means from the first unit to the second unit; the substrate is disposed on the stage; the stage is moved downward to transfer the substrate from the stage to the turning means; the substrate is turned upside down by the turning means; the stage is moved upward to transfer the substrate from the turning means to the stage; and the back surface of the substrate is scrubbed by the scrubber means.
Claim 10
Independent Claim
205 words
An apparatus for washing a substrate, comprising: scrubber means for scrubbing a single surface of the substrate; a first unit having the scrubber means disposed therein; turning means, having a horizontal holding shaft for holding the substrate substantially horizontal, for turning the substrate about the horizontal holding shaft to cause front and back surfaces of the substrate to face upward alternatively; a stage movable in a vertical direction and having a substrate supported thereon in substantially a horizontal direction; a second unit having the turning means and stage disposed therein, the stage being movable in the vertical direction within the unit; and carrier means for carrying the substrate between the first and second units; wherein the front surface of the substrate is scrubbed by the scrubber means; the substrate is carried by the carrier means from the first unit to the second unit; the substrate is disposed on the stage; the stage is moved downward to transfer the substrate from the stage to the turning means; the substrate is turned upside down by the turning means; the stage is moved upward to transfer the substrate from the turning means to the stage; and the back surface of the substrate is scrubbed by the scrubber means.
Claim 11
Independent Claim
201 words
A method for washing a substrate comprising the steps of: preparing an apparatus for washing a substrate, the apparatus comprising scrubber means for scrubbing a single surface of the substrate, a first unit having the scrubber means disposed therein, turning means, having a horizontal holding shaft for holding a substrate substantially horizontal, for turning the substrate about the horizontal holding shaft to cause the front and back surfaces of the substrate to face upward alternatively, a stage being movable in a vertical direction and having a substrate supported thereon in substantially a horizontal direction, a second unit having the turning means and stage disposed therein, and carrier means for carrying the substrate between the first and second units; scrubbing the front surface of the substrate by the scrubber means; carrying the substrate by the carrier means from the first unit to the second unit; disposing the substrate on the stage; moving the stage downward to transfer the substrate from the stage to the turning means; turning the substrate upside down by the turning means; moving the stage upward to transfer the substrate from the turning means to the stage; and scrubbing the back surface of the substrate by the scrubber means.
Claim 12
Independent Claim
201 words
A method for washing a substrate comprising the steps of: preparing an apparatus for washing a substrate, the apparatus comprising scrubber means for scrubbing a single surface of the substrate, a first unit having the scrubber means disposed therein, turning means, having a horizontal holding shaft for holding a substrate substantially horizontal, for turning the substrate about the horizontal holding shaft to cause the front and back surfaces of the substrate to face upward alternatively, a stage being movable in a vertical direction and having a substrate supported thereon in substantially a horizontal direction, a second unit having the turning means and stage disposed therein, and carrier means for carrying the substrate between the first and second units; scrubbing the front surface of the substrate by the scrubber means; carrying the substrate by the carrier means from the first unit to the second unit; disposing the substrate on the stage; moving the stage downward to transfer the substrate from the stage to the turning means; turning the substrate upside down by the turning means; moving the stage upward to transfer the substrate from the turning means to the stage; and scrubbing the back surface of the substrate by the scrubber means.
Claim 13
Dependent Claim
144 words
The method according to claim 9, further comprising the steps of: preparing a spin chuck mounted below the stage such that, when the stage is moved downward, the spin chuck passes smoothly through a central opening of the stage so as to attract the substrate thereon, means for rotating the spin chuck, a photosensitive sensor for detecting whether or not an orientation flat of the substrate is aligned, and control means for controlling the rotating means based on a signal generated from the photosensitive sensor; moving the stage downward to cause the top portion of the spin chuck to pass through the central opening of the stage so as to be brought into contact with the substrate; allowing the spin chuck to attract the substrate; and rotating the substrate on a horizontal plane while detecting the direction of the substrate by a photosensitive sensor.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-03-12 | 1999-09-11 | 2000-03-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-03-12 | 2003-09-11 | 2004-03-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-03-12 | 2007-09-11 | 2008-03-12 | $7700.00 | Window Closed / Lapsed |