US5504026A
Expired / Lapsed
US
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Methods for planarization and encapsulation of micromechanical devices in semiconductor processes
Assignee: Analog Devices Inc
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Filing: 1995-04-14
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Granted: 1996-04-02
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Expires: 2015-04-14
Abstract
Abstract A method for fabricating a micromechanical device and a semiconductor circuit on a substrate includes the steps of forming the micromechanical device on a device area of the substrate, the micromechanical device being embedded in a sacrificial material, selectively depositing a planarization layer on the substrate in a circuit area thereof, forming the semiconductor circuit on the planarization layer in the circuit area and removing the sacrificial material from the embedded micromechanical device. In a preferred embodiment, the planarization layer is an epitaxial silicon layer. A protective cap may be formed over the micromechanical device, so that it is completely encapsulated and is thereby protected against particulate contamination.
Inventors
- 👤 Joseph T. Kung
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 00:51
CPC Classifications
G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/0802; B; B81; B81C; B81C1/00; B81C1/00436; B81C1/00555; B81C1/00611; G01P1/00; G01P1/02; G01P1/023; B81C2201/00; B81C2201/01; B81C2201/0101; B81C2201/0118; B81C2201/0119; G01P2015/0805; G01P2015/0822; G01P2015/0825; G01P2015/0828
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
114 words
A method for fabricating a micromechanical device in a device area of a substrate and a semiconductor circuit in a circuit area of the substrate, comprising the steps of: forming a micromechanical device on the device area of said substrate, said micromechanical device being embedded in a sacrificial material and having an upper surface; forming a planarization layer on said substrate in said circuit area, said planarization layer being formed with an upper surface that is substantially coplanar with the upper surface of said micromechanical device; forming a semiconductor circuit comprising at least one semiconductor device on said planarization layer in said circuit area; and removing the sacrificial material from said embedded micromechanical device.
Claim 2
Independent Claim
114 words
A method for fabricating a micromechanical device in a device area of a substrate and a semiconductor circuit in a circuit area of the substrate, comprising the steps of: forming a micromechanical device on the device area of said substrate, said micromechanical device being embedded in a sacrificial material and having an upper surface; forming a planarization layer on said substrate in said circuit area, said planarization layer being formed with an upper surface that is substantially coplanar with the upper surface of said micromechanical device; forming a semiconductor circuit comprising at least one semiconductor device on said planarization layer in said circuit area; and removing the sacrificial material from said embedded micromechanical device.
Claim 3
Dependent Claim
39 words
A method as defined in claim 1 wherein the step of forming said planarization layer includes selectively depositing said planarization layer such that the upper surface thereof is substantially coplanar with the upper surface of said embedded micromechanical device.
Claim 4
Dependent Claim
58 words
A method as defined in claim 1 wherein the step of forming said planarization layer includes selectively depositing said planarization layer at least slightly above the upper surface of said embedded micromechanical device and grinding said planarization layer until an upper surface of said planarization layer is substantially coplanar with the upper surface of said embedded micromechanical device.
Claim 5
Dependent Claim
26 words
A method as defined in claim 1 wherein the step of forming a planarization layer includes conditioning the surface of said substrate in said circuit area.
Claim 6
Dependent Claim
28 words
A method as defined in claim 1 wherein said micromechanical device comprises an acceleration sensor and said semiconductor circuit comprises a sensing circuit connected to said acceleration sensor.
Claim 7
Dependent Claim
37 words
A method as defined in claim 1 wherein the step of forming said planarization layer includes selectively depositing an epitaxial layer such that epitaxial deposition does not occur on the upper surface of said embedded micromechanical device.
Claim 8
Dependent Claim
37 words
A method as defined in claim 1 wherein the step of forming said planarization layer includes selectively depositing an epitaxial layer such that a polysilicon layer is formed on the upper surface of said embedded micromechanical device.
Claim 9
Dependent Claim
42 words
A method as defined in claim 4 further including the steps of forming a buffer layer on said substrate prior to the step of forming said planarization layer, and etching said buffer layer to leave a sidewall spacer on said micromechanical device.
Claim 10
Dependent Claim
37 words
A method as defined in claim 8 wherein said sidewall spacer comprises conductive polysilicon and further including the step of forming an electrical connection to said sidewall spacer for interconnecting said sidewall spacer to a reference potential.
Claim 11
Dependent Claim
20 words
A method as defined in claim 8 wherein said sidewall spacer comprises a polysilicon layer and a silicon nitride layer.
Claim 12
Dependent Claim
26 words
A method as defined in claim 1 further including the step of forming at least one electrical connection between said micromechanical device and said semiconductor circuit.
Claim 13
Dependent Claim
25 words
A method as defined in claim 1 wherein the step of removing the sacrificial material from said embedded micromechanical device includes a wet etch process.
Claim 14
Dependent Claim
34 words
A method as defined in claim 1 further including the step of forming a protective cap over said micromechanical device, said protective cap permitting removal of the sacrificial material from said embedded micromechanical device.
Claim 15
Dependent Claim
18 words
A method as defined in claim 13 wherein said protective cap comprises a polysilicon cap having openings therethrough.
Claim 16
Independent Claim
111 words
A method for fabricating a micromechanical device on a substrate, comprising the steps of: forming a micromechanical device on a device area of said substrate, said micromechanical device being embedded in sacrificial material and having an upper surface; exposing a circuit area of said substrate; selectively depositing an epitaxial layer on said substrate in said circuit area, said epitaxial layer being formed with an upper surface that is substantially coplanar with the upper surface of said embedded micromechanical device; forming a semiconductor circuit comprising at least one semiconductor device on the upper surface of said epitaxial layer in said circuit area; and removing the sacrificial material from said embedded micromechanical device.
Claim 17
Independent Claim
111 words
A method for fabricating a micromechanical device on a substrate, comprising the steps of: forming a micromechanical device on a device area of said substrate, said micromechanical device being embedded in sacrificial material and having an upper surface; exposing a circuit area of said substrate; selectively depositing an epitaxial layer on said substrate in said circuit area, said epitaxial layer being formed with an upper surface that is substantially coplanar with the upper surface of said embedded micromechanical device; forming a semiconductor circuit comprising at least one semiconductor device on the upper surface of said epitaxial layer in said circuit area; and removing the sacrificial material from said embedded micromechanical device.
Claim 18
Dependent Claim
39 words
A method as defined in claim 15 wherein the step of exposing the circuit area of said substrate includes removing the sacrificial material deposited in the circuit area of said substrate during the step of forming said micromechanical device.
Claim 19
Dependent Claim
37 words
A method as defining claim 15 wherein the step of forming said micromechanical device includes forming an acceleration sensor and the step of forming said semiconductor circuit includes forming a sensor circuit connected to said acceleration sensor.
Claim 20
Dependent Claim
46 words
A method as defined in claim 15 further including the steps of forming a buffer layer on said substrate prior to the step of selectively depositing an epitaxial layer on said substrate, and etching said buffer layer to leave a sidewall spacer on said micromechanical device.
Claim 21
Dependent Claim
37 words
A method as defined in claim 18 wherein said sidewall spacer comprises conductive polysilicon and further including the step of forming an electrical connection to said sidewall spacer for interconnecting said sidewall spacer to a reference potential.
Claim 22
Dependent Claim
34 words
A method as defined in claim 15 further including the step of forming a protective cap over said micromechanical device, said protective cap permitting removal of said sacrificial material from said embedded micromechanical device.
Claim 23
Dependent Claim
26 words
A method as defined in claim 15 further including the step of forming at least one electrical interconnection between said micromechanical device and said semiconductor circuit.
Claim 24
Dependent Claim
39 words
A method as defined in claim 15 wherein the step of depositing said epitaxial layer includes forming said epitaxial layer with a thickness that is approximately equal to the total thickness of said embedded micromechanical device above said substrate.
Claim 25
Dependent Claim
43 words
A method as defined in claim 15 further including the steps of forming at least one electrical interconnect between said micromechanical device and said semiconductor circuit and forming a layer having a low dielectric constant between said electrical interconnect and said epitaxial layer.
Claim 26
Dependent Claim
18 words
A method as defined in claim 23 wherein said layer having a low dielectric constant comprises silicon oxide.
Claim 27
Dependent Claim
35 words
A method as defined in claim 24 further including the step of forming a sidewall spacer on a sidewall of said micromechanical device, said sidewall spacer comprising a polysilicon layer and a silicon nitride layer.
Claim 28
Dependent Claim
52 words
A method as defined in claim 15 wherein the step of selectively depositing an epitaxial layer on said substrate in said circuit area includes selectively depositing a first layer having a first doping characteristic on said substrate and selectively depositing a second layer having a second doping characteristic on said first layer.
Claim 29
Independent Claim
126 words
A method for fabricating a micromechanical device on a substrate, comprising the steps: forming a first epitaxial layer on said substrate; forming a micromechanical device on a device area of said first epitaxial layer, said micromechanical device being embedded in sacrificial material and having an upper surface; exposing a circuit area of said first epitaxial layer; forming a second epitaxial layer on said first epitaxial layer in said circuit area, said second epitaxial layer being formed with an upper surface that is substantially coplanar with the upper surface of said embedded micromechanical device; forming a semiconductor circuit comprising at least one semiconductor device on the upper surface of said second epitaxial layer in said circuit area; and removing the sacrificial material from said embedded micromechanical device.
Claim 30
Independent Claim
126 words
A method for fabricating a micromechanical device on a substrate, comprising the steps: forming a first epitaxial layer on said substrate; forming a micromechanical device on a device area of said first epitaxial layer, said micromechanical device being embedded in sacrificial material and having an upper surface; exposing a circuit area of said first epitaxial layer; forming a second epitaxial layer on said first epitaxial layer in said circuit area, said second epitaxial layer being formed with an upper surface that is substantially coplanar with the upper surface of said embedded micromechanical device; forming a semiconductor circuit comprising at least one semiconductor device on the upper surface of said second epitaxial layer in said circuit area; and removing the sacrificial material from said embedded micromechanical device.
References Cited (Backward Citations)
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