US5529936A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of etching a lens for a semiconductor solid state image sensor
Assignee: LSI Corp
•
Filing: 1994-10-21
•
Granted: 1996-06-25
•
Expires: 2014-10-21
Abstract
Abstract Methods of etching optical elements in association with photosensitive elements are described. In some of the arrangements, the optical elements are formed integrally with a substrate containing the photosensitive elements. In other arrangements, an optical element is mounted to a package, or the like, containing the substrate and photosensitive elements. In other arrangements, two or more optical elements are employed, including conventional refractive elements, refractive focusing elements, and refractive beam splitting elements. Utility as solid state image sensors is discussed. Utility for monochromatic and color imaging is discussed.
Inventors
- 👤 Michael D. Rostoker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 22:10
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/80; H10F39/804; H10F39/806; H10F39/8063; H10F77/00; H10F77/40; H10F77/413; Y; Y10; Y10S; Y10S148/00; Y10S148/099
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
167 words
A method of making a solid state image sensor, comprising: providing a semiconductor substrate; forming an array of photosensitive elements over a surface of the substrate; providing an optically-transmissive layer over the substrate, on the same side of the substrate as the photosensitive elements, the optically-transmissive layer overlying the photosensitive elements; shaping the optically-transmissive layer so that is has an optical property of focussing light impinging onto the substrate onto the underlying photosensitive elements; wherein the optically-transmissive layer is formed to have a plurality of lenslets; each lenslet covers, and is associated with, three of the photosensitive elements; and each lenslet is formed to diffract light of a first wavelength impinging on the substrate to a first of the three photosensitive elements associated therewith, to diffract light of a second wavelength impinging on the substrate to a second of the three photosensitive elements associated therewith, and to diffract light of a third wavelength impinging on the substrate to a third of the three photosensitive elements associated therewith.
Claim 2
Independent Claim
167 words
A method of making a solid state image sensor, comprising: providing a semiconductor substrate; forming an array of photosensitive elements over a surface of the substrate; providing an optically-transmissive layer over the substrate, on the same side of the substrate as the photosensitive elements, the optically-transmissive layer overlying the photosensitive elements; shaping the optically-transmissive layer so that is has an optical property of focussing light impinging onto the substrate onto the underlying photosensitive elements; wherein the optically-transmissive layer is formed to have a plurality of lenslets; each lenslet covers, and is associated with, three of the photosensitive elements; and each lenslet is formed to diffract light of a first wavelength impinging on the substrate to a first of the three photosensitive elements associated therewith, to diffract light of a second wavelength impinging on the substrate to a second of the three photosensitive elements associated therewith, and to diffract light of a third wavelength impinging on the substrate to a third of the three photosensitive elements associated therewith.
Claim 3
Dependent Claim
21 words
The method of claim 1, further comprising: disposing an additional optically-transmissive layer between the shaped optically-transmissive layer and the photosensitive elements.
Claim 4
Dependent Claim
35 words
The method of claim 1, further comprising: placing a discrete lens element at a fixed distance away from said optically-transmissive layer, so that light impinging on the substrate must first pass through the lens element.
Claim 5
Dependent Claim
14 words
The method of claim 3, wherein: said discrete lens element is a binary lens.
Claim 6
Dependent Claim
32 words
The method of claim 1, further comprising: disposing an optically-opaque layer between the optically-transmissive layer and the photosensitive elements; and forming openings in the optically-opaque layer in registration with the photosensitive elements.
References Cited (Backward Citations)
US3816847A
Cited
US3999280A
Cited
US4034466A
Cited
US3981023A
Cited
US4553036A
Cited
US4425501A
Cited
US4410804A
Cited
US4528446A
Cited
US4667092A
Cited
US4636631A
Cited
US4524127A
Cited
US4695719A
Cited
US4689652A
Cited
US4671851A
Cited
US4944836A
Cited
US4985911A
Cited
US4733096A
Cited
US4694185A
Cited
JPS63172219A
Cited
US4953196A
Cited
US4856045A
Cited
US5081347A
Cited
US4895790A
Cited
US5161059A
Cited
US5077784A
Cited
US5162644A
Cited
US5003167A
Cited
US4899174A
Cited
US4993799A
Cited
US4910155A
Cited
US4998806A
Cited
US5161040A
Cited
US5170427A
Cited
US5113067A
Cited
US4994664A
Cited
US4970381A
Cited
US4966446A
Cited
US5130531A
Cited
US5191219A
Cited
JPH03152971A
Cited
US5164979A
Cited
JPH03182152A
Cited
US5124843A
Cited
US5210400A
Cited
US5144484A
Cited
US5132251A
Cited
US5153772A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-06-25 | 1999-12-25 | 2000-06-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-06-25 | 2003-12-25 | 2004-06-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-06-25 | 2007-12-25 | 2008-06-25 | $7700.00 | Window Closed / Lapsed |