US5550887A
Expired / Lapsed
US
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Phase contrast X-ray microscope
Assignee: Carl Zeiss AG
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Filing: 1995-05-16
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Granted: 1996-08-27
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Expires: 2015-05-16
Abstract
Abstract An X-ray microscope has the following features: a pulsed x-ray source that delivers an intense line radiation, an annular condenser that focuses the radiation of the X-ray source on the object to be investigated, an X-ray optics constructed as a micro zone plate that images the object with high resolution on an X-ray detector, and a phase ring positioned in the rear focal plane of the micro zone plate and applies to the zero order X-ray radiation coming from the object a phase shift, with respect to the higher order radiation deflected by the object structures, which is determined by the thickness and material of the phase ring. The phase shift amounts, for example, to 90° or 270°.
Inventors
- 👤 Gunter Schmal
- 👤 Dietbert Rudolph
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 04:22
CPC Classifications
G; G21; G21K; G21K7/00; G21K1/00; G21K1/06; G21K2207/00; G21K2207/005
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
109 words
Phase contrast X-ray microscope comprising: a pulsed X-ray source for generating an intense line radiation, an annular condenser for focusing radiation from said X-ray source on an object to be investigated, an X-ray detector X-ray optics constructed as a micro zone plate with a rear focal plane, for imaging said object at high resolution on said X-ray detector, and a phase ring in said rear focal plane of said micro zone plate, for applying to zero order X-ray radiation coming from said object a phase shift with respect to higher order radiation deflected by said object, which phase shift is determined by thickness and material of said phase ring.
Claim 2
Dependent Claim
109 words
Phase contrast X-ray microscope comprising: a pulsed X-ray source for generating an intense line radiation, an annular condenser for focusing radiation from said X-ray source on an object to be investigated, an X-ray detector X-ray optics constructed as a micro zone plate with a rear focal plane, for imaging said object at high resolution on said X-ray detector, and a phase ring in said rear focal plane of said micro zone plate, for applying to zero order X-ray radiation coming from said object a phase shift with respect to higher order radiation deflected by said object, which phase shift is determined by thickness and material of said phase ring.
Claim 3
Dependent Claim
18 words
Phase contrast X-ray microscope according to claim 1, wherein said condenser comprises an annular mirror for grazing incidence.
Claim 4
Dependent Claim
16 words
Phase contrast X-ray microscope according to claim 1, wherein said condenser comprises an annular zone plate.
Claim 5
Dependent Claim
26 words
Phase contrast X-ray microscope according to claim 1, wherein said condenser comprises a combination of an annular mirror for grazing incidence with an annular zone plate.
Claim 6
Dependent Claim
20 words
Phase contrast X-ray microscope according to claim 1, wherein said condenser comprises an annular mirror coated with a multiple layer.
Claim 7
Dependent Claim
27 words
Phase contrast X-ray microscope according to claim 1, wherein said condenser comprises a combination of a mirror coated with a multiple layer and an annular zone plate.
Claim 8
Dependent Claim
26 words
Phase contrast X-ray microscope according to claim 1, wherein said phase ring is located on a carrier foil that is sufficiently transparent to X-ray radiation used.
Claim 9
Dependent Claim
16 words
Phase contrast X-ray microscope according to claim 7, wherein said carrier foil comprises a silicon foil.
Claim 10
Dependent Claim
30 words
Phase contrast x-ray microscope according to claim 1, wherein said phase ring comprises a copper ring, 0.46 μm in thickness, located on a silicon foil about 0.1-0.3 μm in thickness.
Claim 11
Dependent Claim
21 words
Phase contrast X-ray microscope according to claim 1, wherein said phase ring comprises a combination of at least two different materials.
Claim 12
Dependent Claim
24 words
Phase contrast X-ray microscope according to claim 1, wherein said phase ring is arranged to phase shift said zero order X-ray radiation by 90°.
Claim 13
Dependent Claim
24 words
Phase contrast X-ray microscope according to claim 1, wherein said phase ring is arranged to phase shift said zero order X-ray radiation by 270°.
Claim 14
Dependent Claim
43 words
Phase contrast X-ray microscope according to claim 1, wherein said phase ring is arranged to apply a combination of absorption and phase shift to said zero order X-ray radiation to minimize radiation dosage to which said object is exposed to produce an image.
References Cited (Backward Citations)
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US4953188A
Cited
US5119411A
Cited
US5204887A
Cited
EP0475093A1
Cited
US5434901A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-08-27 | 2000-02-26 | 2000-08-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-08-27 | 2004-02-26 | 2004-08-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-08-27 | 2008-02-26 | 2008-08-27 | $7700.00 | Window Closed / Lapsed |