US5557156A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Scan control for scanning probe microscopes
Assignee: Veeco Instruments Inc
•
Filing: 1994-12-02
•
Granted: 1996-09-17
•
Expires: 2014-12-02
Abstract
Abstract A method of controlling a scanner, particularly a scanner for use in scanning probe microscopes such as an atomic force microscope, including the steps of generating a scan voltage which varies as a parametric function of time, applying the scan voltage to the scanner, sensing plural positions of the scanner upon application of the scan voltage, fitting a parametric function to the sensed scanner positions, and controlling at least one parameter of the scan voltage function based on the parametric function fitted to the sensed scanner positions in the fitting step. In a preferred embodiment, the scan voltage is a polynomial parametric function of time and the order of terms of the polynomial is set in relation to the size of the scan being controlled, with small scans having at least one order term and relatively larger scans having plural order terms. Thus, the sensed position data are used, not to control the motion of the scanner directly in a closed loop system, but instead to optimize the transducer calibration parameters for subsequent open looped scan control of a portion of a total scan, with the calibration of the transducer scan voltage parameters periodically occurring.
Inventors
- 👤 Virgil Elings
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 12:50
CPC Classifications
G; G01; G01Q; G01Q40/00; G01B; G01B7/00; G01B7/003; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/85; Y10S977/851
Claims Analysis
Total Claims: 48
Claim 1
Independent Claim
116 words
In a method of controlling a scanning motion for a scanning probe microscope with a scanner having an attached end and a free end in which positioning of the free end is controlled by application of a scan voltage to the scanner, the improvement comprising the steps of: a) applying to said scanner a scan voltage which varies as a predetermined parametric function to generate a scanning motion; b) monitoring said scanning motion with a position sensor by sensing plural position data of said free end along a selected coordinate; and c) updating parameters of said predetermined parametric function based on the sensed plural position data to produce a linear scan of certain size and offset.
Claim 2
Dependent Claim
116 words
In a method of controlling a scanning motion for a scanning probe microscope with a scanner having an attached end and a free end in which positioning of the free end is controlled by application of a scan voltage to the scanner, the improvement comprising the steps of: a) applying to said scanner a scan voltage which varies as a predetermined parametric function to generate a scanning motion; b) monitoring said scanning motion with a position sensor by sensing plural position data of said free end along a selected coordinate; and c) updating parameters of said predetermined parametric function based on the sensed plural position data to produce a linear scan of certain size and offset.
Claim 3
Dependent Claim
26 words
The method of claim 1 further comprising the step of: selecting the number of parameters which are updated in relation to decreasing position sensor signal-to-noise ratio.
Claim 4
Dependent Claim
21 words
The method of claim 1, comprising: selecting a scanner which includes materials selected from the group consisting of piezoelectrics or electrostrictives.
Claim 5
Dependent Claim
36 words
The method of claim 1, wherein said step of monitoring the scanning motion includes the step of: sensing plural position data with a position sensor selected from the group consisting of optical interferometers and capacitive sensors.
Claim 6
Dependent Claim
47 words
The method of claim 1, wherein said step of applying said scan voltage comprises the step of: choosing as said parametric function a nonlinear waveform V(t), given by: V(t)=a+bt+ct.sup.2 +dt.sup.3 where a,b,c . . . are adjustable parameters and t is the time along a scan line.
Claim 7
Dependent Claim
40 words
The method of claim 1, wherein said step of monitoring said scanning movement includes the step of: calculating from said position data parameters of a position function describing said scanning movement; and storing the position function parameters in a memory.
Claim 8
Dependent Claim
58 words
The method of claim 6 wherein said step of controlling a parameter of said scan voltage parametric function includes the step of: comparing said position function parameters to desired scan parameters set by an operator; and, compensating for any difference between said position function parameters and said desired scan parameters by adjusting the parameters of said scan voltage.
Claim 9
Dependent Claim
44 words
The method of claim 6, wherein said step of calculating the parameters of a position includes the step of: determining the parameters of a general position function by a least-squares fit of a polynomial of a predetermined order to the motion sensor position data.
Claim 10
Dependent Claim
60 words
The method of claim 8 wherein said step of calculating the parameters of a polynomial position function includes the step of: selecting the order of the terms of the polynomial in relation to the size of the scanning motion with at least a first order term being determined for small scans and plural order terms being determined for larger scans.
Claim 11
Dependent Claim
30 words
The method of claim 5, wherein the higher order coefficients of said nonlinear waveform are fixed at predetermined values while the lower order parameters are adjusted to control scanner motion.
Claim 12
Dependent Claim
30 words
The method of claim 1, wherein said step of monitoring said scanning movement includes the step of: collecting image data at the time of said sensing of scanner position data.
Claim 13
Dependent Claim
36 words
The method of claim 1, wherein said step of applying a scan voltage to the scanner includes the step of: calculating a voltage increment to be added to said scan voltage at least twice during scanning.
Claim 14
Dependent Claim
109 words
The method of claim 1 wherein said step of updating the parameters of the scan voltage parametric function includes at least one of the steps of: updating the parameters of said scan voltage parametric function prior to scanning an image; updating the parameters of said scan voltage parametric function at selected intervals within a scan; updating the parameters of said scan voltage parametric function iteratively; updating the parameters of said scan voltage parametric function based on the scan voltage function parameters stored in a memory; and continuously updating the parameters of said scan voltage parametric function while scanning an image by extrapolating from parameter values obtained from previous scans.
Claim 15
Dependent Claim
41 words
The method of claim 6 wherein said step of monitoring said scanning movement includes the step of: calculating the parameters of a position function from the data for the forward scan direction and from the data for the backward scan direction.
Claim 16
Dependent Claim
29 words
The method of claim 1, wherein said step of monitoring said scanning movement includes the step of: sensing plural position data with an optical interferometer having a periodic output.
Claim 17
Dependent Claim
79 words
The method of claim 15, wherein said step of updating the parameters of said scan voltage parametric function includes the step of: adjusting the parameters of the scan voltage parametric function until the differences between the parameters of the position function for the forward scan direction and the parameters of the position function for the backward scan direction are minimized, whereby parameters of the scan voltage parametric function are established to compensate for the nonlinearity of the piezoelectric scanner.
Claim 18
Dependent Claim
48 words
The method of claim 15 wherein said step of sensing plural position data with an optical interferometer includes the step of: storing in a memory during a scan a motion sensor waveform from the optical interferometer; and comparing the motion sensor waveforms from subsequent scans by cross correlation.
Claim 19
Dependent Claim
40 words
The method of claim 1, wherein scanning is performed along two, generally orthogonal axes, and said monitoring step includes sensing plural position data along both of said axes, and said controlling step controls scanning motion along both of said axes.
Claim 20
Dependent Claim
177 words
In a method of controlling a scanning motion for a scanning probe microscope with a scanner having an attached end and a free end in which positioning of the free end is controlled by application of a scan voltage to the scanner, the improvement comprising the steps of: a) applying to said scanner a scan voltage which varies as a predetermined parametric function to generate a scanning motion; b) monitoring said scanning motion with a position sensor by sensing plural position data of said free end along a selected coordinate; c) calculating parameters of a scan position function from the scanner position data; d) storing the parameters of said scan position function in a memory; e) comparing the scan position function parameters with parameters set by an operator and parameters stored in the memory to obtain a measure of the error in the scan; and f) using a look-up table relating the measured error in the scan to the scan voltage parameters to adjust the scan voltage parameters in order to reduce the error in the scan.
Claim 21
Dependent Claim
177 words
In a method of controlling a scanning motion for a scanning probe microscope with a scanner having an attached end and a free end in which positioning of the free end is controlled by application of a scan voltage to the scanner, the improvement comprising the steps of: a) applying to said scanner a scan voltage which varies as a predetermined parametric function to generate a scanning motion; b) monitoring said scanning motion with a position sensor by sensing plural position data of said free end along a selected coordinate; c) calculating parameters of a scan position function from the scanner position data; d) storing the parameters of said scan position function in a memory; e) comparing the scan position function parameters with parameters set by an operator and parameters stored in the memory to obtain a measure of the error in the scan; and f) using a look-up table relating the measured error in the scan to the scan voltage parameters to adjust the scan voltage parameters in order to reduce the error in the scan.
Claim 22
Dependent Claim
127 words
The method of claim 19, wherein said look-up table relating the error in the scan to the adjustable scan voltage parameters is obtained by a precalibration procedure including the steps of: a) driving the scanner with a waveform determined by the scan voltage parametric function to scan a known subject surface containing a distance calibration marking and produce scanner position data regarding the characteristics of said known subject surface; b) calculating parameters of a scan position function from the scanner position data; c) comparing the scan position function parameters with parameters set by an operator to obtain a measure of the error in the scan; and d) storing in a memory the position function parameters, the measured error in the scan and the scan voltage function parameters.
Claim 23
Dependent Claim
72 words
The method of claim 1 or claim 2 or claim 3 or claim 4 or claim 5 or claim 6 or claim 7 or claim 8 or claim 9 or claim 10 or claim 11 or claim 12 or claim 13 or claim 14 or claim 15 or claim 16 or claim 17 or claim 18 or claim 19 or claim 20 wherein said scanning probe microscope is an atomic force microscope.
Claim 24
Dependent Claim
31 words
The method of claim 21 wherein said scanning probe microscope is an atomic force microscope, and wherein said scanner is driven, at least in part, by at least one piezoelectric element.
Claim 25
Dependent Claim
72 words
The method of claim 1 or claim 2 or claim 3 or claim 4 or claim 5 or claim 6 or claim 7 or claim 8 or claim 9 or claim 10 or claim 11 or claim 12 or claim 13 or claim 14 or claim 15 or claim 16 or claim 17 or claim 18 or claim 19 or claim 20 wherein said scanning probe microscope is a scanning tunnelling microscope.
Claim 26
Dependent Claim
31 words
The method of claim 23 wherein said scanning probe microscope is a scanning tunneling microscope, and wherein said scanner is driven, at least in part, by at least one piezoelectric element.
Claim 27
Dependent Claim
32 words
The method of claim 21 wherein the number of parameters in the parametric functions which are updated depends on the scan size, and wherein said number is smaller for smaller scan sizes.
Claim 28
Dependent Claim
32 words
The method of claim 22 wherein the number of parameters in the parametric functions which are updated depends on the scan size, and wherein said number is smaller for smaller scan sizes.
Claim 29
Dependent Claim
32 words
The method of claim 23 wherein the number of parameters in the parametric functions which are updated depends on the scan size, and wherein said number is smaller for smaller scan sizes.
Claim 30
Dependent Claim
32 words
The method of claim 24 wherein the number of parameters in the parametric functions which are updated depends on the scan size, and wherein said number is smaller for smaller scan sizes.
Claim 31
Dependent Claim
86 words
In a method of controlling scanning of a scanning probe microscope with a scanner having a moveable probe attached to said scanner, said probe having a free end, the steps of applying to said scanner a scan voltage which varies according to a parametric equation to generate scanning motion of said scanner, sensing plural position data of said free end of said probe during said scanning, and updating parameters of said parametric equation based on said plural position data to produce linear scanning of said scanner.
Claim 32
Dependent Claim
86 words
In a method of controlling scanning of a scanning probe microscope with a scanner having a moveable probe attached to said scanner, said probe having a free end, the steps of applying to said scanner a scan voltage which varies according to a parametric equation to generate scanning motion of said scanner, sensing plural position data of said free end of said probe during said scanning, and updating parameters of said parametric equation based on said plural position data to produce linear scanning of said scanner.
Claim 33
Dependent Claim
29 words
The method of claim 29, wherein said updating includes the step of selecting a number of parameters to be updated in relation to increasing or decreasing sensed signal-to-noise ratio.
Claim 34
Dependent Claim
17 words
The method of claim 29, comprising: selecting a scanner including at least one piezoelectric or electrostrictive element.
Claim 35
Dependent Claim
35 words
The method of claim 29, wherein said step of monitoring said scanning includes the steps of: sensing plural position data with a position sensor selected from the group consisting of optical interferometers and capacitive sensors.
Claim 36
Dependent Claim
50 words
The method of claim 29, wherein said step of applying said scan voltage comprises the step of: choosing as said parametric function a nonlinear waveform V(t), given by: V(t)=a+bt+ct.sup.2 or dt.sup.3 where a, b, c, . . . are adjustable parameters and t is the time along the scan line.
Claim 37
Dependent Claim
16 words
The method of claim 29, further comprising collecting image data at the time of said sensing.
Claim 38
Dependent Claim
24 words
The method of claim 29, further comprising calculating a voltage increment to be added to said scan voltage at least twice during said scanning.
Claim 39
Dependent Claim
67 words
The method of claim 29, wherein said step of updating said parameters includes at least one of the steps of: updating said parameters before scanning an image; updating said parameters at selected intervals within a scan; updating said parameters iteratively; updating said parameters based on parameters stored in a memory; and updating said parameters while scanning an image by extrapolating from parameter values obtained from previous scans.
Claim 40
Dependent Claim
36 words
The method of claim 29 or claim 30 or claim 31 or claim 23 or claim 33 or claim 34 or claim 35 or claim 36 wherein said scanning probe microscope is an atomic force microscope.
Claim 41
Dependent Claim
20 words
The method of claim 37 wherein said scanner is driven, at least in part, by at least one piezoelectric element.
Claim 42
Dependent Claim
36 words
The method of claim 29 or claim 30 or claim 31 or claim 23 or claim 33 or claim 34 or claim 35 or claim 36 wherein said scanning probe microscope is a scanning tunneling microscope.
Claim 43
Dependent Claim
20 words
The method of claim 39 wherein said scanner is driven, at least in part, by at least one piezoelectric element.
Claim 44
Dependent Claim
15 words
The method of claim 37 wherein said parametric function is a parametric function of time.
Claim 45
Dependent Claim
15 words
The method of claim 38 wherein said parametric function is a parametric function of time.
Claim 46
Dependent Claim
15 words
The method of claim 39 wherein said parametric function is a parametric function of time.
Claim 47
Dependent Claim
15 words
The method of claim 40 wherein said parametric function is a parametric function of time.
Claim 48
Dependent Claim
108 words
The method of claim 1 or claim 2 or claim 3 or claim 4 or claim 11 or claim 12 or claim 13 or claim 14 or claim 15 or claim 16 or claim 17 or claim 19 or claim 20 or claim 29 or claim 30 or claim 31 or claim 32 or claim 34 or claim 35 or claim 36 or claim 37 or claim 38 or claim 39 or claim 40 or claim 41 or claim 42 or claim 43 or claim 44 wherein, for small scans, the number of parameters that are updated are 2, corresponding to the scan size and average scan position.
References Cited (Backward Citations)
US5051646A
Cited
US5404349A
Cited
US5107113A
Cited
US5210410A
Cited
US5243359A
Cited
US5436448A
Cited
US5448399A
Cited
US5221954A
Cited
US5418363A
Cited
US5418363B1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-09-17 | 2000-03-18 | 2000-09-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-09-17 | 2004-03-18 | 2004-09-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-09-17 | 2008-03-18 | 2008-09-17 | $7700.00 | Window Closed / Lapsed |