US5573962A — Low cycle time CMOS process

Claim 1

Independent Claim 796 words

A method for fabricating complimentary metal oxide semiconductor, (CMOS), devices, on a semiconductor substrate, comprising the steps of: forming a field oxide region in a portion of said semiconductor substrate; growing a first insulator layer on first and second regions of said semiconductor substrate, not covered by said field oxide region; forming a photoresist well pattern on said first region of said semiconductor substrate; firsts ion implanting a first conductivity imparting dopant into area of said semiconductor substrate, not covered by said photoresist well pattern, to form N well region; second ion implanting a second conductivity imparting dopant through said photoresist well pattern into said semiconductor substrate, to form a P well region in said semiconductor substrate, underlying said photoresist well pattern and said N well region, while not interfering with said N well region, in area of said semiconductor substrate, not covered by said photoresist well pattern; removing said photoresist well pattern after said second implanting; third ion implanting a third conductivity imparting dopant into said semiconductor substrate including said well regions, not covered by said field oxide region; removing of said first insulator layer after said third implanting; growing a second insulator layer on said semiconductor substrate including said well regions, not covered by said field oxide region, to be used as a gate insulator; depositing a polysilicon layer on said gate insulator, and on said field oxide regions; fourth ion implanting a fourth conductivity imparting dopant into said polysilicon layer; patterning said implanted polysilicon layer to form polysilicon gate structure; depositing a third insulator layer on said polysilicon gate structure, on said gate insulator not covered by said polysilicon gate structure, and on said field oxide region; anisotropic etching of said third insulator layer to form an insulator sidewall spacer on sides of said polysilicon gate structure; forming a photoresist P well pattern on said N well region and to expose said P well region; fifth ion implanting a fifth conductivity imparting dopant into said P well region, not covered by said polysilicon gate structure, but including ion implantation under said insulator sidewall spacer, to form lightly doped source and drain regions; sixth ion implanting a sixth conductivity imparting dopant into said P well region, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacer, to form heavily doped source and drain regions; removing of said photoresist P well pattern after said sixth implanting; growth of a thick fourth insulator layer on said heavily doped source and drain regions, in said P well region, while growing a thinner fourth insulator layer in N well region, not covered by said polysilicon gate structure; removing said thinner fourth insulator layer from said N well region, while leaving some said thick fourth insulator layer on said heavily doped source and drain regions in said P well region; deposition of a borosilicate glass layer on same said thick fourth insulator layer, over said heavily doped source and drain regions, in said P well region, and on said N well region; rapid thermal annealing to form heavily doped source and drain regions in N well region, not covered by said polysilicon gate structure; removing said borosilicate glass layer, and some said thick fourth insulator layer, over said heavily doped source and drain regions in P well region after said annealing; depositing a fifth insulator layer on said P well, and said N well regions; forming an initial phase photoresist pattern on said fifth insulator layer, with a wide opening in a first photoresist layer, directly overlying said heavily doped source and drain regions of both said N well region, and said P well region; anisotropic etching, to remove only a top portion of said fifth insulator layer, in said wide opening in said first photoresist layer, to create a wide hole opening, extending partially into said fifth insulator layer; removing said initial phase, photoresist pattern after forming said wide hole opening; forming a second phase photoresist pattern on said fifth insulator layer, with a narrow opening in a second photoresist layer, exposing said wide hole opening in said fifth insulator layer, directly overlying said heavily doped source and drain regions of both said N well region, and said P well region; anisotropic etching of said fifth insulator layer, in said narrow opening in said second photoresist layer, to create a contact hole to said heavily doped region in said N well region, and to said heavily doped source and drain regions in said P well region, with a narrow opening at the bottom of said contact hole, and a wide opening at the top of said contact hole; removing said second phase, photoresist pattern after forming said contact hole; and depositing a metallization layer, and etching said metallization layer to a metal structure.

Claim 2

Independent Claim 796 words

A method for fabricating complimentary metal oxide semiconductor, (CMOS), devices, on a semiconductor substrate, comprising the steps of: forming a field oxide region in a portion of said semiconductor substrate; growing a first insulator layer on first and second regions of said semiconductor substrate, not covered by said field oxide region; forming a photoresist well pattern on said first region of said semiconductor substrate; firsts ion implanting a first conductivity imparting dopant into area of said semiconductor substrate, not covered by said photoresist well pattern, to form N well region; second ion implanting a second conductivity imparting dopant through said photoresist well pattern into said semiconductor substrate, to form a P well region in said semiconductor substrate, underlying said photoresist well pattern and said N well region, while not interfering with said N well region, in area of said semiconductor substrate, not covered by said photoresist well pattern; removing said photoresist well pattern after said second implanting; third ion implanting a third conductivity imparting dopant into said semiconductor substrate including said well regions, not covered by said field oxide region; removing of said first insulator layer after said third implanting; growing a second insulator layer on said semiconductor substrate including said well regions, not covered by said field oxide region, to be used as a gate insulator; depositing a polysilicon layer on said gate insulator, and on said field oxide regions; fourth ion implanting a fourth conductivity imparting dopant into said polysilicon layer; patterning said implanted polysilicon layer to form polysilicon gate structure; depositing a third insulator layer on said polysilicon gate structure, on said gate insulator not covered by said polysilicon gate structure, and on said field oxide region; anisotropic etching of said third insulator layer to form an insulator sidewall spacer on sides of said polysilicon gate structure; forming a photoresist P well pattern on said N well region and to expose said P well region; fifth ion implanting a fifth conductivity imparting dopant into said P well region, not covered by said polysilicon gate structure, but including ion implantation under said insulator sidewall spacer, to form lightly doped source and drain regions; sixth ion implanting a sixth conductivity imparting dopant into said P well region, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacer, to form heavily doped source and drain regions; removing of said photoresist P well pattern after said sixth implanting; growth of a thick fourth insulator layer on said heavily doped source and drain regions, in said P well region, while growing a thinner fourth insulator layer in N well region, not covered by said polysilicon gate structure; removing said thinner fourth insulator layer from said N well region, while leaving some said thick fourth insulator layer on said heavily doped source and drain regions in said P well region; deposition of a borosilicate glass layer on same said thick fourth insulator layer, over said heavily doped source and drain regions, in said P well region, and on said N well region; rapid thermal annealing to form heavily doped source and drain regions in N well region, not covered by said polysilicon gate structure; removing said borosilicate glass layer, and some said thick fourth insulator layer, over said heavily doped source and drain regions in P well region after said annealing; depositing a fifth insulator layer on said P well, and said N well regions; forming an initial phase photoresist pattern on said fifth insulator layer, with a wide opening in a first photoresist layer, directly overlying said heavily doped source and drain regions of both said N well region, and said P well region; anisotropic etching, to remove only a top portion of said fifth insulator layer, in said wide opening in said first photoresist layer, to create a wide hole opening, extending partially into said fifth insulator layer; removing said initial phase, photoresist pattern after forming said wide hole opening; forming a second phase photoresist pattern on said fifth insulator layer, with a narrow opening in a second photoresist layer, exposing said wide hole opening in said fifth insulator layer, directly overlying said heavily doped source and drain regions of both said N well region, and said P well region; anisotropic etching of said fifth insulator layer, in said narrow opening in said second photoresist layer, to create a contact hole to said heavily doped region in said N well region, and to said heavily doped source and drain regions in said P well region, with a narrow opening at the bottom of said contact hole, and a wide opening at the top of said contact hole; removing said second phase, photoresist pattern after forming said contact hole; and depositing a metallization layer, and etching said metallization layer to a metal structure.

Claim 3

Dependent Claim 66 words

The method of claim 1, wherein said first conductivity imparting dopants, used to form said N well region, are arsenic, ion implanted at an energy between about 100 to 300 Kev., at a dose between about 1E11 to 1E12 atoms/ 2 , and phosphorous, ion implanted at an energy between about 400 to 1000 Kev., at a dose between about 1E12 to 1E13 atoms/cm 2 .

Claim 4

Dependent Claim 42 words

The method of claim 1, wherein said second conductivity imparting dopant, used to form said P well region, is boron, ion implanted at an energy between about 1000 to 2000 Kev., at a dose between about 1E12 to 1E13 atoms/ 2 .

Claim 5

Dependent Claim 42 words

The method of claim 1, wherein said third conductivity imparting dopant, used for threshold voltage adjustment, is BF 2 , ion implanted at an energy between about 20 to 60 Kev., at a dose between about 1E11 to 1E12 atoms/ 2 .

Claim 6

Dependent Claim 36 words

The method of claim 1, wherein said gate insulator is silicon dioxide, thermally grown in an oxygen--steam ambient, at a temperature between about 850° to 950° C., to a thickness between about 50 to 200 Angstroms.

Claim 7

Dependent Claim 32 words

The method of claim 1, wherein said polysilicon layer is deposited using LPCVD processing, at a temperature between about 550° to 650° C., to a thickness between about 2000 to 4000 Angstroms.

Claim 8

Dependent Claim 49 words

The method of claim 1, wherein said third insulator layer, used for said insulator sidewall spacer, is silicon oxide, deposited using either LPCVD or PECVD processing at a temperature between about 400° to 700° C., to a thickness between about 1000 to 3000 Angstroms, using tetraethylorthosilicate as a source.

Claim 9

Dependent Claim 28 words

The method of claim 1, wherein said insulator sidewall spacer is formed via anisotropic, reactive ion etching of said third insulator layer, using CHF 3 as an etchant.

Claim 10

Dependent Claim 70 words

The method of claim 1, wherein said fifth conductivity imparting dopant, used to create said lightly doped source and drain region in said P well region, is phosphorous, ion implanted at an energy between about 40 to 100 Kev., at a dose between about 1E13 to 1E14 atoms/ 2 , and at an implant angle between about 30° to 60°, needed to place said phosphorous under said insulator sidewall spacer.

Claim 11

Dependent Claim 59 words

The method of claim 1, wherein said sixth conductivity imparting dopant, used to create said heavily doped source and drain regions in said P well region, is arsenic, ion implanted at an energy between about 50 to 100 Kev., at a dose between about 1E15 to 5E15 atoms/ 2 , at an implant angle between about 0° to 7°.

Claim 12

Dependent Claim 65 words

The method of claim 1, wherein said fourth insulator layer is silicon dioxide, thermally grown in an oxygen--steam ambient at a temperature between about 600° to 800° C., to a thickness between about 100 to 200 Angstroms on said N well region, and to a thickness between about 400 to 800 Angstroms on said heavily doped source and drain regions, in said P well region.

Claim 13

Dependent Claim 25 words

The method of claim 1, wherein said fourth insulator layer, on said N well region, is removed via use of a buffered hydrofluoric acid solution.

Claim 14

Dependent Claim 42 words

The method of claim 1, wherein said borosilicate glass layer is deposited using LPCVD processing, at a temperature between about 600° to 800° C., to a thickness between about 1000 to 2000 Angstroms, with a boron content between about 2 to 5%.

Claim 15

Dependent Claim 42 words

The method of claim 1, wherein said rapid thermal annealing, used to create said source and drain regions in N well region, is performed at a temperature between about 1050° to 1150° C., for a time between about 30 to 90 seconds.

Claim 16

Dependent Claim 75 words

The method of claim 1, wherein said contact hole to said heavily doped source and drain region of said P well region, and to said source and drain region of said N well region, is created via a two stage photolithographic and reactive ion etching process, using CHF 3 as an etchant, resulting in a narrow opening at the bottom of said contact hole, and a wide opening at the top of said contact hole.

Claim 17

Independent Claim 885 words

A method for fabricating CMOS devices, on a semiconductor substrate, through a first level metallization, using only six photomasking steps, comprising the steps of: depositing an oxidation resistant insulator an said substrate; forming a first photoresist pattern on said oxidation resistant insulator; anisotropic, reactive ion etching of said oxidation resistant insulator, using first photoresist pattern as a mask, to form an oxidation resistant insulator mask; removing said first photoresist pattern after forming said insulator mask; forming a field oxide region in said semiconductor substrate, in region not covered by said oxidation resistant insulator mask; removing said oxidation resistant insulator mask after forming said field oxide region; growing a first insulator layer on first and second regions of said semiconductor substrate, not covered by said field oxide region; forming a second photoresist pattern on said first region of said semiconductor substrate; first ion implanting a first conductivity imparting dopant into said semiconductor substrate, not covered by said second photoresist pattern, to form a N well region; second ion implanting a second conductivity imparting dopant into said semiconductor substrate, to form a P well region, in said semiconductor substrate underlying said second photoresist pattern and said N well region, while not interfering with said N well region of said semiconductor substrate, not covered by said second photoresist pattern; removing said second photoresist pattern after said second implanting; third ion implanting a third conductivity imparting dopant into said semiconductor substrate including said well regions, not covered by said field oxide region, for threshold voltage adjustment; removing said first insulator layer after third implanting; growing a second insulator layer on said semiconductor substrate including said well regions, not covered by said field oxide region, to be used as a gate insulator; depositing a polysilicon layer on said gate insulator, and on said field oxide region; fourth ion implanting a third conductivity imparting dopant into said polysilicon layer; forming a third photoresist pattern on said implanted polysilicon layer; anisotropic, reactive ion etching of said implanted polysilicon layer, using said third photoresist pattern as a mask, to form a polysilicon gate structure; removal of said third photoresist pattern; depositing a third insulator layer on said polysilicon gate structure, on said gate insulator, not covered by said polysilicon gate structure, and on said field oxide region; anisotropic, reactive ion etching of said third insulator layer to form an insulator sidewall spacer on sides of said polysilicon gate structure; forming a fourth photoresist pattern on said N well region and, to expose said P well region; fifth ion implanting a fifth conductivity imparting dopant into said P well region, not covered by said polysilicon gate structure, but including ion implantation under said insulator sidewall spacer, to form N type, lightly doped source and drain regions; sixth ion implanting a sixth conductivity imparting dopant into said P well region, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacer, to form N type, heavily doped source and drain regions; removing said fourth photoresist pattern after said sixth implanting; growth of a thick fourth insulator layer on said N type, heavily doped source and drain regions, while growing a thinner fourth insulator in N well region, not covered by said polysilicon gate structure; removing said thinner fourth insulator layer from said N well region, while leaving some said thick fourth insulator layer on said N type, heavily doped source and drain regions; deposition of a borosilicate glass layer on some said thick fourth insulator layer, over said N type, heavily doped source and drain region, and on said N well region; rapid thermal annealing to create P type, heavily doped source and drain region in said N well region, not covered by said polysilicon gate structure; removing of said borosilicate glass layer, and some said thick fourth insulator layer, over said N type, heavily doped source and drain regions after said annealing; depositing a fifth insulator layer on said P well and said N well regions; forming a fifth photoresist pattern on said fifth insulator layer, with a wide opening in a first photoresist layer, directly over said P type, heavily doped source and drain regions, and directly over said N type, heavily doped source and drain regions; anisotropic, reactive ion etching, to remove only a portion of said fifth insulator layer, in said wide opening in said first photoresist layer, to create a wide hole opening, extending partially into said fifth insulator layer; removing said fifth photoresist pattern after forming said via hole opening; forming a sixth photoresist pattern on said fifth insulator layer, with a narrow opening in a second photoresist layer, exposing said wide hole opening in said fifth insulator layer, and directly over said N type, heavily doped source and drain region, and directly over P type, heavily doped source and drain region; anisotropic reactive ion etching, of said fifth insulator layer, in said narrow opening in said second photoresist layer, to create a contact hole to said P type, heavily doped source and drain region, and to N type, heavily doped source and drain region, with a narrow opening at bottom of said contact hole, and a wide opening at the top of said contact hole; removing said sixth photoresist pattern; depositing a metallization layer, and etching said metallization layer to of a metal structure.

Claim 18

Independent Claim 885 words

A method for fabricating CMOS devices, on a semiconductor substrate, through a first level metallization, using only six photomasking steps, comprising the steps of: depositing an oxidation resistant insulator an said substrate; forming a first photoresist pattern on said oxidation resistant insulator; anisotropic, reactive ion etching of said oxidation resistant insulator, using first photoresist pattern as a mask, to form an oxidation resistant insulator mask; removing said first photoresist pattern after forming said insulator mask; forming a field oxide region in said semiconductor substrate, in region not covered by said oxidation resistant insulator mask; removing said oxidation resistant insulator mask after forming said field oxide region; growing a first insulator layer on first and second regions of said semiconductor substrate, not covered by said field oxide region; forming a second photoresist pattern on said first region of said semiconductor substrate; first ion implanting a first conductivity imparting dopant into said semiconductor substrate, not covered by said second photoresist pattern, to form a N well region; second ion implanting a second conductivity imparting dopant into said semiconductor substrate, to form a P well region, in said semiconductor substrate underlying said second photoresist pattern and said N well region, while not interfering with said N well region of said semiconductor substrate, not covered by said second photoresist pattern; removing said second photoresist pattern after said second implanting; third ion implanting a third conductivity imparting dopant into said semiconductor substrate including said well regions, not covered by said field oxide region, for threshold voltage adjustment; removing said first insulator layer after third implanting; growing a second insulator layer on said semiconductor substrate including said well regions, not covered by said field oxide region, to be used as a gate insulator; depositing a polysilicon layer on said gate insulator, and on said field oxide region; fourth ion implanting a third conductivity imparting dopant into said polysilicon layer; forming a third photoresist pattern on said implanted polysilicon layer; anisotropic, reactive ion etching of said implanted polysilicon layer, using said third photoresist pattern as a mask, to form a polysilicon gate structure; removal of said third photoresist pattern; depositing a third insulator layer on said polysilicon gate structure, on said gate insulator, not covered by said polysilicon gate structure, and on said field oxide region; anisotropic, reactive ion etching of said third insulator layer to form an insulator sidewall spacer on sides of said polysilicon gate structure; forming a fourth photoresist pattern on said N well region and, to expose said P well region; fifth ion implanting a fifth conductivity imparting dopant into said P well region, not covered by said polysilicon gate structure, but including ion implantation under said insulator sidewall spacer, to form N type, lightly doped source and drain regions; sixth ion implanting a sixth conductivity imparting dopant into said P well region, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacer, to form N type, heavily doped source and drain regions; removing said fourth photoresist pattern after said sixth implanting; growth of a thick fourth insulator layer on said N type, heavily doped source and drain regions, while growing a thinner fourth insulator in N well region, not covered by said polysilicon gate structure; removing said thinner fourth insulator layer from said N well region, while leaving some said thick fourth insulator layer on said N type, heavily doped source and drain regions; deposition of a borosilicate glass layer on some said thick fourth insulator layer, over said N type, heavily doped source and drain region, and on said N well region; rapid thermal annealing to create P type, heavily doped source and drain region in said N well region, not covered by said polysilicon gate structure; removing of said borosilicate glass layer, and some said thick fourth insulator layer, over said N type, heavily doped source and drain regions after said annealing; depositing a fifth insulator layer on said P well and said N well regions; forming a fifth photoresist pattern on said fifth insulator layer, with a wide opening in a first photoresist layer, directly over said P type, heavily doped source and drain regions, and directly over said N type, heavily doped source and drain regions; anisotropic, reactive ion etching, to remove only a portion of said fifth insulator layer, in said wide opening in said first photoresist layer, to create a wide hole opening, extending partially into said fifth insulator layer; removing said fifth photoresist pattern after forming said via hole opening; forming a sixth photoresist pattern on said fifth insulator layer, with a narrow opening in a second photoresist layer, exposing said wide hole opening in said fifth insulator layer, and directly over said N type, heavily doped source and drain region, and directly over P type, heavily doped source and drain region; anisotropic reactive ion etching, of said fifth insulator layer, in said narrow opening in said second photoresist layer, to create a contact hole to said P type, heavily doped source and drain region, and to N type, heavily doped source and drain region, with a narrow opening at bottom of said contact hole, and a wide opening at the top of said contact hole; removing said sixth photoresist pattern; depositing a metallization layer, and etching said metallization layer to of a metal structure.

Claim 19

Dependent Claim 66 words

The method of claim 16, wherein said first conductivity imparting dopants, used to form said N well region, are arsenic, ion implanted at an energy between about 100 to 300 Kev., at a dose between about 1E11 to 1E12 atoms/ 2 , and phosphorous, ion implanted at an energy between about 400 to 1000 Kev., at a dose between about 1E12 to 1E13 atoms/ 2 .

Claim 20

Dependent Claim 42 words

The method of claim 16, wherein said second conductivity imparting dopant, used to form said P well region, is boron, ion implanted at an energy between about 1000 to 2000 Kev., at a dose between about 1E12 to 1E13 atoms/ 2 .

Claim 21

Dependent Claim 42 words

The method of claim 16, wherein said third conductivity imparting dopant, used for threshold voltage adjustment, is BF 2 , ion implanted at an energy between about 20 to 60 Kev., at a dose between about 1E11 to 1E12 atoms/ 2 .

Claim 22

Dependent Claim 36 words

The method of claim 16, wherein said gate insulator is silicon dioxide, thermally grown in an oxygen--steam ambient, at a temperature between about 850° to 950° C., to a thickness between about 50 to 200 Angstroms.

Claim 23

Dependent Claim 32 words

The method of claim 16, wherein said polysilicon layer is deposited using LPCVD processing, at a temperature between about 550° to 650° C., to a thickness between about 2000 to 4000 Angstroms.

Claim 24

Dependent Claim 49 words

The method of claim 16, wherein said third insulator layer, used for said insulator sidewall spacer, is silicon oxide, deposited using either LPCVD or PECVD processing, at a temperature between about 400° to 700° C., to a thickness between about 1000 to 3000 Angstroms, using tetraethylorthosilicate as a source.

Claim 25

Dependent Claim 28 words

The method of claim 16, wherein said insulator sidewall spacer is formed via anisotropic, reactive ion etching of said third insulator layer, using CHF 3 as an etchant.

Claim 26

Dependent Claim 66 words

The method of claim 16, wherein said fifth conductivity imparting dopant, used to create said N type, lightly doped source and drain region, is phosphorous, ion implanted at an energy between about 40 to 100 Kev., at a dose between about 1E13 to 1E14 atoms/ 2 , and at an implant angle between about 30° to 60°, needed to place phosphorous under said insulator sidewall spacer.

Claim 27

Dependent Claim 57 words

The method of claim 16, wherein said sixth conductivity imparting dopant, used to create said N type, heavily doped source and drain region, is arsenic, ion implanted at an energy between about 50 to 100 Kev., at a dose between about 1E15 to 5E15 atoms/ 2 , and at an implant angle between about 0° to 7°.

Claim 28

Dependent Claim 74 words

The method of claim 16, wherein said thick fourth insulator layer, grown on said N type, heavily doped source and drain region, is silicon dioxide, thermally grown in an oxygen--steam ambient, at a temperature between about 600° to 800° C., to a thickness between about 400 to 800 Angstroms, while said thin fourth insulator layer, of silicon dioxide, is grown on said N well region, to a thickness between about 100 to 200 Angstroms.

Claim 29

Dependent Claim 25 words

The method of claim 16, wherein said thin fourth insulator layer, on said N well region, is removed via use a buffered hydrofluoric acid solution.

Claim 30

Dependent Claim 42 words

The method of claim 16, wherein said borosilicate glass layer is deposited using LPCVD processing, at a temperature between about 600° to 800° C., to a thickness between about 1000 to 2000 Angstroms, with a boron content between about 2 to 5%.

Claim 31

Dependent Claim 41 words

The method of claim 16, wherein said rapid thermal annealing, used to create P type, heavily doped source and drain regions, is performed at a temperature between about 1050° to 1150° C., for a time between about 30 to 90 seconds.

Claim 32

Dependent Claim 83 words

The method of claim 16, wherein said contact hole to said P type, heavily doped source and drain region, and to said N type, heavily doped source and drain region, is created via a two stage photolithographic and reactive ion etching process, using CHF 3 as an etchant, resulting in a wide opening, between about 1.0 to 1.3 μM, at the top of said contact hole, and a narrow opening, between about 0.4 to 0.6 μM, at the bottom of said contact hole.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1999-11-12	2000-05-13	2000-11-12	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2003-11-12	2004-05-13	2004-11-12	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2007-11-12	2008-05-13	2008-11-12	$7700.00	Window Closed / Lapsed

Low cycle time CMOS process

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