US5609995A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for forming a thin uniform layer of resist for lithography
Assignee: Micron Technology Inc
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Filing: 1995-08-30
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Granted: 1997-03-11
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Expires: 2015-08-30
Abstract
Abstract A method for forming a layer of resist on a non-planar substrate includes the steps of: dispensing resist onto the substrate; spinning the substrate to spread the resist; and then vibrating the substrate to eliminate voids in the resist. Optionally, the substrate can be inverted and vibrated at the same time to distribute the resist over the sidewalls of any projections or plateaus on the non-planar substrate. Following the vibrating and optional inversion steps, the resist is partially hardened, an edge bead is removed and a backside of the resist is washed. These steps are followed by soft bake, exposure and development of the layer of resist.
Inventors
- 👤 Salman Akram
- 👤 Paul Shirley
- 👤 William Rericha
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 12:31
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/16; G03F7/168; G03F7/162
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
43 words
A method for forming a layer of resist on a non-planar substrate, said method comprising: dispensing resist onto the substrate; spinning the substrate to spread the resist; vibrating the substrate; removing an edge bead of resist from the substrate; and heating the resist.
Claim 2
Independent Claim
43 words
A method for forming a layer of resist on a non-planar substrate, said method comprising: dispensing resist onto the substrate; spinning the substrate to spread the resist; vibrating the substrate; removing an edge bead of resist from the substrate; and heating the resist.
Claim 3
Dependent Claim
17 words
The method as recited in claim 1 and further comprising spinning the substrate during the vibrating step.
Claim 4
Independent Claim
38 words
A method for forming a layer of resist on a non-planar substrate comprising; dispensing resist onto the substrate; spinning the substrate to spread the resist; vibrating the substrate; and back side washing the substrate following the vibrating step.
Claim 5
Independent Claim
38 words
A method for forming a layer of resist on a non-planar substrate comprising; dispensing resist onto the substrate; spinning the substrate to spread the resist; vibrating the substrate; and back side washing the substrate following the vibrating step.
Claim 6
Dependent Claim
17 words
The method as recited in claim 3 and further comprising inverting the substrate during the vibrating step.
Claim 7
Dependent Claim
17 words
The method as recited in claim 3 and further comprising spinning the substrate during the vibrating step.
Claim 8
Dependent Claim
17 words
The method as recited in claim 3 and further comprising exposing and developing the layer of resist.
Claim 9
Independent Claim
59 words
A method for forming a layer of resist on a substrate, said method comprising: providing a substrate having a non-planar surface; dispensing resist onto the substrate; spinning the substrate to spread the resist; vibrating the substrate to remove voids in the resist; removing an edge bead from the resist; washing a backside of the substrate; and heating the resist.
Claim 10
Independent Claim
59 words
A method for forming a layer of resist on a substrate, said method comprising: providing a substrate having a non-planar surface; dispensing resist onto the substrate; spinning the substrate to spread the resist; vibrating the substrate to remove voids in the resist; removing an edge bead from the resist; washing a backside of the substrate; and heating the resist.
Claim 11
Dependent Claim
17 words
The method as recited in claim 7 and further comprising spinning the substrate during the vibrating step.
Claim 12
Dependent Claim
17 words
The method as recited in claim 8 and further comprising inverting the substrate following the vibrating step.
Claim 13
Dependent Claim
17 words
The method as recited in claim 9 and further comprising spinning the substrate during the inverting step.
Claim 14
Dependent Claim
26 words
The method as recited in claim 10 and further comprising providing the non-planar substrate with raised projections and distributing the resist over sidewalls of the projections.
Claim 15
Dependent Claim
26 words
The method as recited in claim 10 and further comprising providing the non-planar substrate with various semiconductor devices and distributing the resist over the semiconductor devices.
Claim 16
Independent Claim
78 words
A method for forming a layer of resist on a substrate, said method comprising: providing a substrate having a non-planar surface including a plurality of raised projections having sidewalls; dispensing resist onto the substrate; spinning the substrate to distribute the resist over the substrate; vibrating the substrate to eliminate voids in the resist; inverting the substrate to distribute the resist on the sidewalls; and removing an edge bead from the resist and washing a backside of the substrate.
Claim 17
Independent Claim
78 words
A method for forming a layer of resist on a substrate, said method comprising: providing a substrate having a non-planar surface including a plurality of raised projections having sidewalls; dispensing resist onto the substrate; spinning the substrate to distribute the resist over the substrate; vibrating the substrate to eliminate voids in the resist; inverting the substrate to distribute the resist on the sidewalls; and removing an edge bead from the resist and washing a backside of the substrate.
Claim 18
Dependent Claim
28 words
The method as recited in claim 13 and wherein the substrate is vibrated during the vibrating step at a frequency of about one to 5000 cycles per second.
Claim 19
Dependent Claim
23 words
The method as recited in claim 14 and wherein the substrate is vibrated during the vibration step for about one to 60 seconds.
Claim 20
Dependent Claim
26 words
The method as recited in claim 15 and wherein the substrate is spun during the spinning step at a speed of about 2000 to 6000 rpms.
Claim 21
Dependent Claim
17 words
The method as recited in claim 16 and further comprising spinning the substrate during the vibrating step.
Claim 22
Dependent Claim
17 words
The method as recited in claim 17 and further comprising spinning the substrate during the inverting step.
Claim 23
Dependent Claim
28 words
The method as recited in claim 18 and further comprising spinning the substrate during the inverting and vibrating steps at a speed of from one to 2000 rpms.
Claim 24
Dependent Claim
21 words
The method as recited in claim 19 and further comprising partially hardening the resist prior to the edge bead removing step.
Claim 25
Independent Claim
93 words
A method for forming a layer of resist on a substrate, said method comprising the steps of: providing the substrate with a plurality of raised projections and a conductive layer thereon; dispensing resist onto the substrate; spinning the substrate to spread the resist over the substrate; vibrating and spinning the substrate to eliminate voids in the resist; inverting and spinning the substrate to distribute the resist over the projections; soft baking the resist; exposing the resist; developing the resist to form a resist mask; and etching the conductive layer using the resist mask.
Claim 26
Independent Claim
93 words
A method for forming a layer of resist on a substrate, said method comprising the steps of: providing the substrate with a plurality of raised projections and a conductive layer thereon; dispensing resist onto the substrate; spinning the substrate to spread the resist over the substrate; vibrating and spinning the substrate to eliminate voids in the resist; inverting and spinning the substrate to distribute the resist over the projections; soft baking the resist; exposing the resist; developing the resist to form a resist mask; and etching the conductive layer using the resist mask.
Claim 27
Dependent Claim
32 words
The method as recited in claim 21 and further comprising removing an edge bead of resist from the substrate and washing a backside of the substrate prior to soft baking the resist.
Claim 28
Dependent Claim
15 words
The method as recited in claim 21 and wherein the substrate is formed of silicon.
Claim 29
Dependent Claim
21 words
The method as recited in claim 21 and wherein the substrate is formed as an interconnect for testing unpackaged semiconductor dice.
Claim 30
Independent Claim
38 words
A method for forming a layer of resist on a substrate having a non-planar topography, said method comprising: dispensing resist onto the substrate; spinning the substrate; and inverting and vibrating the substrate to eliminate voids in the resist.
Claim 31
Independent Claim
38 words
A method for forming a layer of resist on a substrate having a non-planar topography, said method comprising: dispensing resist onto the substrate; spinning the substrate; and inverting and vibrating the substrate to eliminate voids in the resist.
Claim 32
Dependent Claim
19 words
The method as claimed in claim 25 and further comprising heating the resist following the inverting and vibrating step.
Claim 33
Dependent Claim
19 words
The method as claimed in claim 25 and further comprising spinning the substrate during the inverting and vibrating step.
Claim 34
Dependent Claim
23 words
The method as claimed in claim 25 and further comprising washing a back side of the substrate following the inverting and vibrating step.
Claim 35
Dependent Claim
23 words
The method as claimed in claim 25 and further comprising removing an edge bead from the resist following the inverting and vibrating step.
Claim 36
Dependent Claim
28 words
The method as claimed in claim 25 and further comprising providing the substrate with a plurality of raised projections and wherein the resist is dispensed over the projections.
Claim 37
Dependent Claim
40 words
The method as claimed in claim 25 and further comprising providing the substrate with a conductive layer, dispensing the resist over the conductive layer, and following the inverting and vibrating step, etching the conductive layer using the layer of resist.
Claim 38
Dependent Claim
17 words
The method as claimed in claim 25 and further comprising testing a semiconductor die using the substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-03-10 | 2000-09-09 | 2001-03-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-03-10 | 2004-09-09 | 2005-03-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-03-10 | 2008-09-09 | 2009-03-11 | $7700.00 | Window Closed / Lapsed |