US5637190A
Expired / Lapsed
US
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Plasma purge method for plasma process particle control
Assignee: Vanguard International Semiconductor Corp
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Filing: 1995-09-15
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Granted: 1997-06-10
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Expires: 2015-09-15
Abstract
Abstract A method for limiting contaminant particle deposition upon integrated circuit layers within plasma assisted process reactor chambers. First, a plasma assisted process is undertaken upon an integrated circuit layer within a plasma assisted process reactor chamber. The plasma assisted process employs a first reactant gas composition, a first radio frequency power and a first reactor chamber pressure appropriate to the plasma assisted process and the integrated circuit layer. Immediately following the plasma assisted process is undertaken a first plasma purge step. The first plasma purge step employs a first concentration of an oxidizing reactant gas, a first concentration of a non-oxidizing reactant gas, a second radio frequency power and a second reactor chamber pressure. The second radio frequency power is lower than the first radio frequency power and the second reactor chamber pressure is higher than the first reactor chamber pressure. Finally, there is undertaken immediately following the first plasma purge step a second plasma purge step. The second plasma purge step employs a second concentration of the oxidizing reactant gas, a second concentration of the non-oxidizing reactant gas, a third radio frequency power and a third reactor chamber pressure. The third radio frequency power is less than the second radio frequency power, and the third reactor chamber pressure is lower than the second reactor chamber pressure.
Inventors
- 👤 Chih-Cherng Liao
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 20:44
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32798; H01J37/32853; H01J37/32862; H01J37/32009; H01J37/32082; H01J2237/00; H01J2237/02; H01J2237/022; Y; Y10; Y10S; Y10S438/00; Y10S438/905
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
211 words
A method for limiting contaminant particle deposition upon integrated circuit layers within plasma assisted process reactor chambers comprising: undertaking a plasma assisted process upon an integrated circuit layer within a plasma assisted process reactor chamber, the plasma assisted process employing a first reactant gas composition, a first radio frequency power and a first reactor chamber pressure; undertaking a first plasma purge step for a first purge time immediately following the plasma assisted process, the first plasma purge step employing a first concentration of an oxidizing reactant gas, a first concentration of a non-oxidizing reactant gas, a second radio frequency power and a second reactor chamber pressure, the second radio frequency power being lower than the first radio frequency power and the second reactor chamber pressure being higher than the first reactor chamber pressure; undertaking a second plasma purge step for a second purge time immediately following the first plasma purge step, the second plasma purge step employing a second concentration of the oxidizing reactant gas, a second concentration of the non-oxidizing reactant gas, a third radio frequency power and a third reactor chamber pressure, the third radio frequency power being less than the second radio frequency power, and the third reactor chamber pressure being lower than the second reactor chamber pressure.
Claim 2
Independent Claim
211 words
A method for limiting contaminant particle deposition upon integrated circuit layers within plasma assisted process reactor chambers comprising: undertaking a plasma assisted process upon an integrated circuit layer within a plasma assisted process reactor chamber, the plasma assisted process employing a first reactant gas composition, a first radio frequency power and a first reactor chamber pressure; undertaking a first plasma purge step for a first purge time immediately following the plasma assisted process, the first plasma purge step employing a first concentration of an oxidizing reactant gas, a first concentration of a non-oxidizing reactant gas, a second radio frequency power and a second reactor chamber pressure, the second radio frequency power being lower than the first radio frequency power and the second reactor chamber pressure being higher than the first reactor chamber pressure; undertaking a second plasma purge step for a second purge time immediately following the first plasma purge step, the second plasma purge step employing a second concentration of the oxidizing reactant gas, a second concentration of the non-oxidizing reactant gas, a third radio frequency power and a third reactor chamber pressure, the third radio frequency power being less than the second radio frequency power, and the third reactor chamber pressure being lower than the second reactor chamber pressure.
Claim 3
Independent Claim
216 words
A method for limiting contaminant particle deposition upon silicon oxide integrated circuit layers deposited within plasma assisted process reactor chambers comprising: depositing through a plasma assisted process a silicon oxide integrated circuit layer within a plasma assisted process reactor chamber, the plasma assisted process employing a first reactant gas composition, a first radio frequency power and a first reactor chamber pressure; undertaking a first plasma purge step for a first purge time immediately following the plasma assisted process, the first plasma purge step employing a first concentration of an oxidizing reactant gas, a first concentration of a non-oxidizing reactant gas, a second radio frequency power and a second reactor chamber pressure, the second radio frequency power being lower than the first radio frequency power and the second reactor chamber pressure being higher than the first reactor chamber pressure; undertaking a second plasma purge step for a second purge time immediately following the first plasma purge step, the second plasma purge step employing a second concentration of the oxidizing reactant gas, a second concentration of the non-oxidizing reactant gas, a third radio frequency power and a third reactor chamber pressure, the third radio frequency power being less than the second radio frequency power, and the third reactor chamber pressure being lower than the second reactor chamber pressure.
Claim 4
Independent Claim
216 words
A method for limiting contaminant particle deposition upon silicon oxide integrated circuit layers deposited within plasma assisted process reactor chambers comprising: depositing through a plasma assisted process a silicon oxide integrated circuit layer within a plasma assisted process reactor chamber, the plasma assisted process employing a first reactant gas composition, a first radio frequency power and a first reactor chamber pressure; undertaking a first plasma purge step for a first purge time immediately following the plasma assisted process, the first plasma purge step employing a first concentration of an oxidizing reactant gas, a first concentration of a non-oxidizing reactant gas, a second radio frequency power and a second reactor chamber pressure, the second radio frequency power being lower than the first radio frequency power and the second reactor chamber pressure being higher than the first reactor chamber pressure; undertaking a second plasma purge step for a second purge time immediately following the first plasma purge step, the second plasma purge step employing a second concentration of the oxidizing reactant gas, a second concentration of the non-oxidizing reactant gas, a third radio frequency power and a third reactor chamber pressure, the third radio frequency power being less than the second radio frequency power, and the third reactor chamber pressure being lower than the second reactor chamber pressure.
Claim 5
Dependent Claim
38 words
The method of claim 1 wherein the integrated circuit layer is chosen from the group of integrated circuit layers consisting of integrated circuit conductor layers, integrated circuit insulator layers, integrated circuit semiconductor layers and integrated circuit photo-active layers.
Claim 6
Dependent Claim
33 words
The method of claim 1 wherein the first radio frequency power is from about 200 to about 950 watts and the first reactor chamber pressure is from about 200 to about 3000 mTorr.
Claim 7
Dependent Claim
18 words
The method of claim 1 wherein the first purge time is from about 5 to about 15 seconds.
Claim 8
Dependent Claim
44 words
The method of claim 1 wherein the second radio frequency power is from about 25 to about 50 percent of the first radio frequency power and the second reactor chamber pressure is from about 200 to about 400 percent the first reactor chamber pressure.
Claim 9
Dependent Claim
19 words
The method of claim 1 wherein the oxidizing reactant gas is oxygen and the non-oxidizing reactant gas is argon.
Claim 10
Dependent Claim
37 words
The method of claim 7 wherein the first concentration of oxidizing reactant gas is from about 80 to about 500 sccm and the first concentration of non-oxidizing reactant gas is from about 100 to about 500 sccm.
Claim 11
Dependent Claim
18 words
The method of claim 1 wherein the second purge time is from about 5 to about 15 seconds.
Claim 12
Dependent Claim
44 words
The method of claim 1 wherein the third radio frequency power is from about 20 to about 50 percent of the second radio frequency power and the third reactor chamber pressure is no greater than about 50 percent of the second reactor chamber pressure.
Claim 13
Dependent Claim
37 words
The method of claim 7 wherein the second concentration of oxidizing reactant gas is from about 80 to about 500 sccm and the second concentration of non-oxidizing reactant gas is from about 100 to about 500 sccm.
Claim 14
Dependent Claim
15 words
The method of claim 1 further comprising a magnetic assistance to the plasma assisted process.
Claim 15
Dependent Claim
17 words
The methodof claim 12 wherein the magnetic assistance is provided at about 20 to about 100 gauss.
Claim 16
Independent Claim
216 words
A method for limiting contaminant particle deposition upon silicon oxide integrated circuit layers etched within plasma assisted process reactor chambers comprising: etching through a plasma assisted process a silicon oxide integrated circuit layer within a plasma assisted process reactor chamber, the plasma assisted process employing a first reactant gas composition, a first radio frequency power and a first reactor chamber pressure; undertaking a first plasma purge step for a first purge time immediately following the plasma assisted process, the first plasma purge step employing a first concentration of an oxidizing reactant gas, a first concentration of a non-oxidizing reactant gas, a second radio frequency power and a second reactor chamber pressure, the second radio frequency power being lower than the first radio frequency power and the second reactor chamber pressure being higher than the first reactor chamber pressure; undertaking a second plasma purge step for a second purge time immediately following the first plasma purge step, the second plasma purge step employing a second concentration of the oxidizing reactant gas, a second concentration of the non-oxidizing reactant gas, a third radio frequency power and a third reactor chamber pressure, the third radio frequency power being less than the second radio frequency power, and the third reactor chamber pressure being lower than the second reactor chamber pressure.
Claim 17
Independent Claim
216 words
A method for limiting contaminant particle deposition upon silicon oxide integrated circuit layers etched within plasma assisted process reactor chambers comprising: etching through a plasma assisted process a silicon oxide integrated circuit layer within a plasma assisted process reactor chamber, the plasma assisted process employing a first reactant gas composition, a first radio frequency power and a first reactor chamber pressure; undertaking a first plasma purge step for a first purge time immediately following the plasma assisted process, the first plasma purge step employing a first concentration of an oxidizing reactant gas, a first concentration of a non-oxidizing reactant gas, a second radio frequency power and a second reactor chamber pressure, the second radio frequency power being lower than the first radio frequency power and the second reactor chamber pressure being higher than the first reactor chamber pressure; undertaking a second plasma purge step for a second purge time immediately following the first plasma purge step, the second plasma purge step employing a second concentration of the oxidizing reactant gas, a second concentration of the non-oxidizing reactant gas, a third radio frequency power and a third reactor chamber pressure, the third radio frequency power being less than the second radio frequency power, and the third reactor chamber pressure being lower than the second reactor chamber pressure.
Claim 18
Dependent Claim
81 words
The method of claim 14 wherein: the first radio frequency power is from about 600 to about 950 watts; the first reactor chamber pressure is from about 200 to about 300 mTorr; and the first reactant gas composition is comprised of tri-fluoro-methane at about 10 to about 100 standard cubic centimeters per minute (sccm), carbon-tetra-fluoride at about 65 to about 95 standard cubic centimeters per minute (sccm) and argon at about 40 to about 80 standard cubic centimeters per minute (sccm).
Claim 19
Dependent Claim
69 words
The method of claim 14 wherein: the first concentration of oxidizing reactant gas is comprised of oxygen at about 80 to about 150 sccm; the first concentration of non-oxidizing reactant gas is comprised of argon at about 100 to about 200 sccm; the second radio frequency power is from about 250 to about 350 watts; and the second reactor chamber pressure is from about 400 to about 900 mTorr.
Claim 20
Dependent Claim
68 words
The method of claim 14 wherein: the second concentration of oxidizing reactant gas is comprised of oxygen at about 80 to about 150 sccm; the second concentration of non-oxidizing reactant gas is comprised of argon at about 100 to about 200 sccm; the third radio frequency power is from about 50 to about 150 watts; and the third reactor chamber pressure is no greater than about 200 mTorr.
Claim 21
Dependent Claim
44 words
The method of claim 14 further comprising a magnetic assistance to the plasma assisted etch process, the first plasma purge step and the second plasma purge step, the magnetic assistance being provided at a magnetic field strength of about 20 to about 100 gauss.
Claim 22
Dependent Claim
68 words
The method of claim 2 wherein: the second concentration of oxidizing reactant gas is comprised of oxygen at about 100 to about 500 sccm; the second concentration of non-oxidizing reactant gas is comprised of argon at about 10 to about 500 sccm; the third radio frequency power is from about 20 to about 150 watts; and the third reactor chamber pressure is no greater than about 500 mTorr.
Claim 23
Dependent Claim
58 words
The method of claim 2 wherein: the first radio frequency power is from about 200 to about 700 watts; the first reactor chamber pressure is from about 500 to about 3000 mTorr; and the first reactant gas composition is comprised of Tetra Ethyl Ortho Silicate (TEOS) at about 100 to about 600 standard cubic centimeters per minute (sccm).
Claim 24
Dependent Claim
69 words
The method of claim 2 wherein: the first concentration of oxidizing reactant gas is comprised of oxygen at about 100 to about 500 sccm; the first concentration of non-oxidizing reactant gas is comprised of argon at about 100 to about 500 sccm; the second radio frequency power is from about 50 to about 300 watts; and the second reactor chamber pressure is from about 2000 to about 7000 mTorr.
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