US5642196A
Expired / Lapsed
US
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Method and apparatus for measuring the thickness of a film using low coherence reflectometry
Assignee: Agilent Technologies Inc
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Filing: 1995-08-28
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Granted: 1997-06-24
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Expires: 2015-08-28
Abstract
Abstract An apparatus and method for measuring the thickness of a film having top and bottom surfaces. The apparatus includes a first coupler for generating a first probe light signal and a second probe light signal from a low coherence light source. The first probe light signal is directed toward the top surface of the film and the light leaving the top surface of the film is collected. Similarly, the second probe light signal is directed toward the bottom surface of the film and the light leaving the bottom surface of the film is also collected. Top and bottom partially reflecting reference surfaces are provided for generating reflections. The top reference surface reflects part of the light leaving the top surface back toward the top surface, and the bottom reference surface reflects light leaving the bottom surface of the film back toward the bottom surface of the film. The collected light is combined to form a collected light signal which is input to a receiver that determines the time delay between light reflected from the top surface of the film and the top reference surface and between the bottom surface of the film and the bottom reference surface. In the preferred embodiment of the present invention, the receiver is constructed from an optical autocorrelator or an optical spectrum analyzer that includes circuitry for providing the Fourier transform of the frequency domain spectrum measured from the collected light signal.
Inventors
- 👤 Ronald V. Alves
- 👤 Wayne V. Sorin
- 👤 Steven A. Newton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 23:46
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/06
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
200 words
An apparatus for measuring the thickness of a film having top and bottom surfaces, said apparatus comprising: means for generating a first probe light signal and a second probe light signal from a low coherence light source; means for directing said first probe light signal toward said top surface of said film and for collecting light leaving said top surface of said film; a top reference surface for partially reflecting light leaving said top surface of said film back toward said top surface of said film; means for directing said second probe light signal toward said bottom surface of said film and for collecting light leaving said bottom surface of said film; a bottom reference surface for partially reflecting light leaving said bottom surface of said film back toward said bottom surface of said film; means for combining said light collected from said top and bottom surfaces of said film to form a collected light signal; and a receiver for receiving said collected light signal and for determining therefrom the time delay between light reflected from said top surface of said film and said top reference surface and from said bottom surface of said film and said bottom reference surface.
Claim 2
Independent Claim
200 words
An apparatus for measuring the thickness of a film having top and bottom surfaces, said apparatus comprising: means for generating a first probe light signal and a second probe light signal from a low coherence light source; means for directing said first probe light signal toward said top surface of said film and for collecting light leaving said top surface of said film; a top reference surface for partially reflecting light leaving said top surface of said film back toward said top surface of said film; means for directing said second probe light signal toward said bottom surface of said film and for collecting light leaving said bottom surface of said film; a bottom reference surface for partially reflecting light leaving said bottom surface of said film back toward said bottom surface of said film; means for combining said light collected from said top and bottom surfaces of said film to form a collected light signal; and a receiver for receiving said collected light signal and for determining therefrom the time delay between light reflected from said top surface of said film and said top reference surface and from said bottom surface of said film and said bottom reference surface.
Claim 3
Dependent Claim
12 words
The apparatus of claim 1 wherein said receiver comprises an optical autocorrelator.
Claim 4
Dependent Claim
12 words
The apparatus of claim 1 wherein said receiver comprises an optical reflectometer.
Claim 5
Dependent Claim
13 words
The apparatus of claim 1 wherein said receiver comprises an optical spectrum analyzer.
Claim 6
Dependent Claim
61 words
The apparatus of claim 1 wherein said means for directing said first probe light signal toward said top surface of said film comprises an optical fiber and a first lens for directing light leaving said first optical fiber onto said film and for collecting light leaving said top surface of said film and said collected light into said first optical fiber.
Claim 7
Dependent Claim
50 words
The apparatus of claim 5 wherein said first lens comprises a surface between said lens and said top surface of said film, said surface reflecting a portion of any light leaving said film in a direction toward said surface back onto said film, said surface providing said top reference surface.
Claim 8
Dependent Claim
38 words
The apparatus of claim 1 wherein said means for directing said first probe light signal toward said top surface of said film comprises an optical fiber having a polished end, said polished end comprising said top reference surface.
Claim 9
Dependent Claim
26 words
The apparatus if claim 1 wherein said means for combining said collected light from said first and second surfaces of said film comprises an optical coupler.
Claim 10
Dependent Claim
40 words
The apparatus of claim 1 wherein said means for generating said first and second probe light signals and said means for combining said collected light signals from said first and second surfaces of said film comprise a single optical coupler.
Claim 11
Independent Claim
195 words
A method for measuring the thickness of a film having top and bottom surfaces, said method comprising the steps of: generating a first probe light signal and a second probe light signal from a low coherence light source; directing said first probe light signal toward said top surface of said film and for collecting light leaving said top surface of said film; providing a top reference surface for partially reflecting light leaving said top surface of said film back toward said top surface of said film; directing said second probe light signal toward said bottom surface of said film and collecting light leaving said bottom surface of said film; providing a bottom reference surface for partially reflecting light leaving said bottom surface of said film back toward said bottom surface of said film; combining said light collected from said top and bottom surfaces of said film to form a collected light signal; and analyzing said collected light signal in a receiver to determine therefrom the time delay between light reflected from said top surface of said film and said top reference surface and from said bottom surface of said film and said bottom reference surface.
Claim 12
Independent Claim
195 words
A method for measuring the thickness of a film having top and bottom surfaces, said method comprising the steps of: generating a first probe light signal and a second probe light signal from a low coherence light source; directing said first probe light signal toward said top surface of said film and for collecting light leaving said top surface of said film; providing a top reference surface for partially reflecting light leaving said top surface of said film back toward said top surface of said film; directing said second probe light signal toward said bottom surface of said film and collecting light leaving said bottom surface of said film; providing a bottom reference surface for partially reflecting light leaving said bottom surface of said film back toward said bottom surface of said film; combining said light collected from said top and bottom surfaces of said film to form a collected light signal; and analyzing said collected light signal in a receiver to determine therefrom the time delay between light reflected from said top surface of said film and said top reference surface and from said bottom surface of said film and said bottom reference surface.
Claim 13
Dependent Claim
12 words
The method of claim 10 wherein said receiver comprises an optical autocorrelator.
Claim 14
Dependent Claim
12 words
The method of claim 10 wherein said receiver comprises an optical reflectometer.
Claim 15
Dependent Claim
13 words
The method of claim 10 wherein said receiver comprises an optical spectrum analyzer.
Claim 16
Dependent Claim
62 words
The method of claim 10 wherein said step of directing said first probe light signal toward said top surface of said film comprises providing an optical fiber and a first lens for directing light leaving said first optical fiber onto said film and for collecting light leaving said top surface of said film and said collected light into said first optical fiber.
Claim 17
Dependent Claim
50 words
The method of claim 14 wherein said first lens comprises a surface between said lens and said top surface of said film, said surface reflecting a portion of any light leaving said film in a direction toward said surface back onto said film, said surface providing said top reference surface.
Claim 18
Dependent Claim
39 words
The method of claim 10 wherein said step of directing said first probe light signal toward said top surface of said film comprises providing an optical fiber having a polished end, said polished end comprising said top reference surface.
Claim 19
Dependent Claim
27 words
The method of claim 10 wherein said step of combining said collected light from said first and second surfaces of said film comprises providing an optical coupler.
Claim 20
Dependent Claim
38 words
The method of claim 10 wherein said steps of generating said first and second probe light signals and combining said collected light signals from said first and second surfaces of said film comprises providing a single optical coupler.
References Cited (Backward Citations)
US5323229A
Cited
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