US5702956A
Expired / Lapsed
US
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Test site and a method of monitoring via etch depths for semiconductor devices
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1996-08-26
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Granted: 1997-12-30
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Expires: 2016-08-26
Abstract
Abstract The present invention provides a test site on a product wafer for measuring via etch depth and a method of monitoring the depth of the vias using the test site. A substrate is provided having a test site area and a circuit area. A test site via is formed in the test site area. The test site via is used in measuring the depth of the insulating layers remaining in a test site via and the depth of the test site via. The measurements are taking using an in-line non-destructible measurement tool, such as an ellipsometer or spectrophotometer. The test site is specifically designed to be large enough to have the via depth measured by an in-line measuring tool. The depth of the oxide remaining in the test site via is measured after the via etch and is correlated to the amount of titanium nitride removed from the tops of the metal lines in the circuit areas. The via etch process is then adjusted to center the via etch at the optimum point to ensure that enough the vias are deep enough without removing too much of the top barrier layer (e.g., titanium nitride) film over the metal lines.
Inventors
- 👤 Shu-Lan Ying
- 👤 Yuan-Chang Huang
- 👤 Jue-Jye Chen
- 👤 Yuh-Jier Mii
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 10:50
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/27; H10P74/277; H10P74/20; H10P74/203
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
170 words
A method of monitoring the via etch removal of a top barrier layer over a metal layer on a semiconductor substrate comprising: a) providing a semiconductor substrate having at least a test site area and a circuit area; b) forming field oxide regions and semiconductor elements over portions of said substrate in said test site area and said circuit area; c) forming an interlevel dielectric layer over said field oxide regions and said semiconductor elements; d) forming first metal lines having a top barrier layer over portions of said circuit area; e) an intermetal dielectric layer over said metal lines and said interlevel dielectric layer; f) etching a test site via through portions of said intermetal dielectric layer in said test site area and simultaneously etching circuit vias through at least portions of said inter metal dielectric layer in said circuit area over said metal lines; and g) measuring the thicknesses of said field oxide region, said interlevel dielectric layer and said intermetal dielectric layer under said test site via.
Claim 2
Independent Claim
170 words
A method of monitoring the via etch removal of a top barrier layer over a metal layer on a semiconductor substrate comprising: a) providing a semiconductor substrate having at least a test site area and a circuit area; b) forming field oxide regions and semiconductor elements over portions of said substrate in said test site area and said circuit area; c) forming an interlevel dielectric layer over said field oxide regions and said semiconductor elements; d) forming first metal lines having a top barrier layer over portions of said circuit area; e) an intermetal dielectric layer over said metal lines and said interlevel dielectric layer; f) etching a test site via through portions of said intermetal dielectric layer in said test site area and simultaneously etching circuit vias through at least portions of said inter metal dielectric layer in said circuit area over said metal lines; and g) measuring the thicknesses of said field oxide region, said interlevel dielectric layer and said intermetal dielectric layer under said test site via.
Claim 3
Dependent Claim
96 words
The method of claim 1 wherein the etching of said circuit vias removes a portion of said top barrier layer over said metal lines, the etching performed by a via etch process, and which further includes correlating the measured thicknesses of said field oxide region, said interlevel dielectric layer and said intermetal dielectric layer under said test site via to the remaining thickness of said top barrier layer over said metal lines and adjusting the via etch process to minimize the amount of top barrier layer removed in a subsequent via etch of a subsequent wafer.
Claim 4
Dependent Claim
21 words
The method of claim 1 wherein said field oxide regions have a final thickness of between about 3000 and 5000 Å.
Claim 5
Dependent Claim
35 words
The method of claim 1 wherein said first metal lines are formed of a material selected from the group consisting of: aluminum/copper and aluminum/copper/silicon, and have a thickness of between about 2000 and 6000 Å.
Claim 6
Dependent Claim
29 words
The method of claim 1 wherein said top barrier layer is composed of titanium nitride film and has a thickness in a range of about 250 and 1400 Å.
Claim 7
Dependent Claim
39 words
The method of claim 1 wherein said intermetal dielectric layer is formed of a material selected from the group consisting of: plasma enhanced oxide, SACVD oxide and spin-on-glass, and has a thickness of between about 8000 and 12,000 Å.
Claim 8
Dependent Claim
32 words
The method of claim 1 wherein said test site via has a depth of between about 10,000 and 20,000 Å and a length and width of between about 60 and 100 μm.
Claim 9
Dependent Claim
22 words
The method of claim 1 wherein said test site via has an area of between about 3600 and 10,000 μm 2 .
Claim 10
Dependent Claim
39 words
The method of claim 1 wherein the etching of said circuit vias removes a thickness of said top barrier layer over said first metal line of between about 500 and 1000 Å, said top barrier layer composed of TiN.
Claim 11
Independent Claim
256 words
A method of monitoring via depth by forming a test site via in an intermetal dielectric layer and measuring the depth of said test site via, comprising; a) providing a semiconductor substrate having at least a test site area and a circuit area; said circuit area having a shallow via area and a deep via area; b) forming field oxide regions in said test site area and said circuit area; c) forming a polycide layer over portions of said field oxide regions in at least said shallow via area; d) forming an interlevel dielectric (ILD) layer over the resultant surface; e) forming first metal lines over said interlevel dielectric layer in said shallow via area and in said deep via area; f) forming a top barrier layer composed of titanium nitride over said first metal lines; g) forming an intermetal dielectric (IMD) layer over the resultant surface; h) forming a via photoresist layer over said intermetal dielectric layer, said via photoresist layer having openings over said circuit area and said test site area; i) etching portions of said inter metal dielectric layer and said top barrier layer using said via photoresist layer as a mask, forming at least a test site via in said test site area, forming a shallow via in said shallow via area, and forming a deep via in said deep via area; j) measuring and correlating the depth of the test site via to the thickness of said top barrier layer in said circuit area removed by the etching in step (i).
Claim 12
Independent Claim
256 words
A method of monitoring via depth by forming a test site via in an intermetal dielectric layer and measuring the depth of said test site via, comprising; a) providing a semiconductor substrate having at least a test site area and a circuit area; said circuit area having a shallow via area and a deep via area; b) forming field oxide regions in said test site area and said circuit area; c) forming a polycide layer over portions of said field oxide regions in at least said shallow via area; d) forming an interlevel dielectric (ILD) layer over the resultant surface; e) forming first metal lines over said interlevel dielectric layer in said shallow via area and in said deep via area; f) forming a top barrier layer composed of titanium nitride over said first metal lines; g) forming an intermetal dielectric (IMD) layer over the resultant surface; h) forming a via photoresist layer over said intermetal dielectric layer, said via photoresist layer having openings over said circuit area and said test site area; i) etching portions of said inter metal dielectric layer and said top barrier layer using said via photoresist layer as a mask, forming at least a test site via in said test site area, forming a shallow via in said shallow via area, and forming a deep via in said deep via area; j) measuring and correlating the depth of the test site via to the thickness of said top barrier layer in said circuit area removed by the etching in step (i).
Claim 13
Dependent Claim
96 words
The method of claim 10 wherein the etching of said circuit vias removes a portion of said top barrier layer over said metal lines, the etching performed by a via etch process, and which further includes correlating the measured thicknesses of said field oxide region, said interlevel dielectric layer and said intermetal dielectric layer under said test site via to the remaining thickness of said top barrier layer over said metal lines and adjusting the via etch process to minimize the amount of top barrier layer removed in a subsequent via etch of a subsequent wafer.
Claim 14
Dependent Claim
21 words
The method of claim 10 wherein said field oxide regions have a final thickness of between about 3000 and 5000 Å.
Claim 15
Dependent Claim
35 words
The method of claim 10 wherein polycide layer is formed of a layer of polysilicon and a layer of tungsten silicide and said polycide layer has a thickness of between about 2500 and 5000 Å.
Claim 16
Dependent Claim
37 words
The method of claim 10 wherein said interlevel dielectric layer is formed of a material selected from the group consisting of: 03-TEOS, PSG and PE oxide, and has a thickness of between about 2500 and 5000 Å.
Claim 17
Dependent Claim
34 words
The method of claim 10 wherein first metal lines are formed of a material selected from the group consisting of: aluminum/copper and aluminum/copper/silicon, and have a thickness of between about 2000 and 6000 Å.
Claim 18
Dependent Claim
25 words
The method of claim 10 wherein said top barrier layer is composed of TiN and has a thickness of between about 250 and 1400 Å.
Claim 19
Dependent Claim
38 words
The method of claim 10 wherein said intermetal dielectric layer is formed of a material selected from the group consisting of: PE oxide, SACVD oxide and spin-on-glass, and has a thickness of between about 8000 and 12,000 Å.
Claim 20
Dependent Claim
32 words
The method of claim 10 wherein said test site via has a depth of between about 10,000 and 20,000 Å and a length and width of between about 60 and 100 μm.
Claim 21
Dependent Claim
22 words
The method of claim 10 wherein said test side via has an area of between about 3600 and 10,000 μm 2 .
Claim 22
Dependent Claim
26 words
The method of claim 10 wherein the etch in step (i) removes a thickness of said top barrier layer of between about 500 and 1000 Å.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2000-12-29 | 2001-06-30 | 2001-12-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-12-29 | 2005-06-30 | 2005-12-30 | $3760.00 | Window Closed / Lapsed |
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