US5779928A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Film dissolution method of dissolving silica-based coating film formed on surface of a substrate
Assignee: Screen Semiconductor Solutions Co Ltd
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Filing: 1997-02-12
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Granted: 1998-07-14
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Expires: 2017-02-12
Abstract
Abstract A film dissolving liquid is ejected from a needle-shaped nozzle onto a peripheral edge portion of a substrate surface of a SOG film, while being subjected to the film dissolving liquid. The substrate is rotated in order to dissolve and remove the SOG film from the peripheral edge portion of the substrate. The film dissolving liquid is a solvent or mixture of two or more solvents selected from the group cyclohexanone, γ-butyrolactone, ethyl lactate or ethyl pyruvate. As a result, a swelling of the SOG film is not created at the edge portion of the substrate. A crack is not therefore created at the edge portion of the SOG film, and generation of particles due to a damage at the film swelling portion thereof is prevented.
Inventors
- 👤 Tetsuro Yamashita
- 👤 Tsuyoshi Mitsuhashi
- 👤 Manabu Yabe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 02:48
CPC Classifications
H; H10; H10P; H10P76/00; H10P72/00; H10P72/04; H10P72/0448; B; B08; B08B; B08B3/00; B08B3/04; B08B3/08; C; C11; C11D; C11D7/00; C11D7/50; C11D7/5004; C11D7/5022; H10P50/00; H10P50/20; H10P50/28; H10P50/286; H10P50/287; C11D2111/00; C11D2111/10; C11D2111/14; C11D2111/22
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
121 words
A film dissolution method of dissolving a silica-based coating film formed on a surface of a substrate; comprising the steps of: (a) preparing a needle-shaped nozzle; (b) preparing a substrate on a surface of which a silica-based coating film is formed: (c) obtaining, as film dissolving liquid, a solvent or a mixture of two or more solvents selected from a group which consists of γ-butyrolactone, ethyl lactate and ethyl pyruvate; (d) holding said substrate horizontally; (e) rotating said substrate around a vertical axis; and (f) injecting said film dissolving liquid from said needle-shaped nozzle onto a peripheral edge portion of said substrate so that an unwanted coating film is dissolved at and removed from said peripheral edge portion of said substrate.
Claim 2
Dependent Claim
121 words
A film dissolution method of dissolving a silica-based coating film formed on a surface of a substrate; comprising the steps of: (a) preparing a needle-shaped nozzle; (b) preparing a substrate on a surface of which a silica-based coating film is formed: (c) obtaining, as film dissolving liquid, a solvent or a mixture of two or more solvents selected from a group which consists of γ-butyrolactone, ethyl lactate and ethyl pyruvate; (d) holding said substrate horizontally; (e) rotating said substrate around a vertical axis; and (f) injecting said film dissolving liquid from said needle-shaped nozzle onto a peripheral edge portion of said substrate so that an unwanted coating film is dissolved at and removed from said peripheral edge portion of said substrate.
Claim 3
Dependent Claim
17 words
The film dissolution method of claim 1, wherein said silica-based coating film is an organic SOG material.
Claim 4
Dependent Claim
26 words
The film dissolution method of claim 2, wherein said step (c) comprises a step of obtaining, as said film dissolving liquid, a solvent of ethyl pyruvate.
Claim 5
Dependent Claim
49 words
The film dissolution method of claim 3, wherein said silica-based coating film is a material which can not suppress swelling to less than 10,000 Å at an end portion of said silica-based coating film after isopropyl alcohol as said film dissolving liquid is supplied onto said peripheral edge portion.
References Cited (Backward Citations)
US4011351A
Cited
JPH0230132A
Cited
JPH04171820A
Cited
US5328871A
Cited
JPH0897205A
Cited
JPH08264412A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-07-13 | 2002-01-12 | 2002-07-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-07-13 | 2006-01-12 | 2006-07-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-07-13 | 2010-01-12 | 2010-07-14 | $7700.00 | Window Closed / Lapsed |