US5798904A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High power electrostatic chuck contact
Assignee: Lam Research Corp
•
Filing: 1996-06-28
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Granted: 1998-08-25
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Expires: 2016-06-28
Abstract
Abstract In a vacuum processing chamber, an exemplary electrical contact assembly between an electrostatic chuck and a voltage source comprises a flexible wire connected at one end to the underside of the electrostatic chuck and at the other end to a conductive socket fixed in the electrode cap. An electrical contacting member which is connected to the voltage source is removably received into the socket so that the electrode cap can be replaced by lifting the electrode cap and socket off of the contacting member which is fixed in the electrode base.
Inventors
- 👤 Francois Guyot
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 21:09
CPC Classifications
H; H02; H02N; H02N13/00; H10; H10P; H10P72/00; H10P72/70; H10P72/72; H10P72/722
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
54 words
An electrostatic chuck for a vacuum processing chamber comprising: an electrode for clamping an article to the electrostatic chuck; a wire having a first end connected to the electrode; and a conductive socket connected to a second end of the wire, the conductive socket adapted to receive power through a removable electrical contacting member.
Claim 2
Dependent Claim
54 words
An electrostatic chuck for a vacuum processing chamber comprising: an electrode for clamping an article to the electrostatic chuck; a wire having a first end connected to the electrode; and a conductive socket connected to a second end of the wire, the conductive socket adapted to receive power through a removable electrical contacting member.
Claim 3
Dependent Claim
32 words
The electrostatic chuck of claim 1, wherein the socket has a surface area sufficient to receive power from an RF bias source to provide an RF bias in the vacuum processing chamber.
Claim 4
Dependent Claim
11 words
The electrostatic chuck of claim 1, wherein the wire is flexible.
Claim 5
Dependent Claim
28 words
The electrostatic chuck of claim 1 wherein the wire has a length which is sufficiently short to allow RF bias power to be transmitted through the electrostatic chuck.
Claim 6
Dependent Claim
28 words
The electrostatic chuck of claim 1, wherein a point at which the wire is connected to the electrode is offset from a longitudinal axis of the conductive socket.
Claim 7
Dependent Claim
11 words
The electrostatic chuck of claim 1, wherein the socket comprises brass.
Claim 8
Dependent Claim
71 words
An electrostatic chuck for a vacuum processing chamber comprising: an electrode for clamping an article to the electrostatic chuck; a wire having a first end connected to the electrode; and a conductive socket connected to a second end of the wire, the conductive socket adapted to receive power through a removable electrical contacting member, wherein the conductive socket is adapted to provide a friction fit with the removable electrical contacting member.
Claim 9
Dependent Claim
71 words
An electrostatic chuck for a vacuum processing chamber comprising: an electrode for clamping an article to the electrostatic chuck; a wire having a first end connected to the electrode; and a conductive socket connected to a second end of the wire, the conductive socket adapted to receive power through a removable electrical contacting member, wherein the conductive socket is adapted to provide a friction fit with the removable electrical contacting member.
Claim 10
Dependent Claim
85 words
A vacuum processing chamber comprising: an electrostatic chuck; a cable connected at a first end to the electrostatic chuck for supplying power to the electrostatic chuck; a socket having an inside surface which is electrically connected to a second end of the cable; and a contacting member which is removably received into the socket, wherein the electrical contacting member slides against the inside surface of the socket to make electrical contact with the inside surface of the socket to supply power to the electrostatic chuck.
Claim 11
Dependent Claim
85 words
A vacuum processing chamber comprising: an electrostatic chuck; a cable connected at a first end to the electrostatic chuck for supplying power to the electrostatic chuck; a socket having an inside surface which is electrically connected to a second end of the cable; and a contacting member which is removably received into the socket, wherein the electrical contacting member slides against the inside surface of the socket to make electrical contact with the inside surface of the socket to supply power to the electrostatic chuck.
Claim 12
Dependent Claim
21 words
The vacuum processing chamber of claim 8, wherein the cable is flexible so as to prevent damage to the electrostatic chuck.
Claim 13
Dependent Claim
12 words
The vacuum processing chamber of claim 8, wherein the socket comprises brass.
Claim 14
Dependent Claim
19 words
The vacuum processing chamber of claim 8, wherein the cable is surrounded by epoxy to electrically insulate the cable.
Claim 15
Dependent Claim
23 words
The vacuum processing chamber of claim 8, wherein the socket has a surface area sufficient to receive RF power from an RF source.
Claim 16
Dependent Claim
18 words
The vacuum processing chamber of claim 8, wherein the contacting member produces a friction fit with the socket.
Claim 17
Dependent Claim
28 words
The vacuum processing chamber of claim 8, wherein a point at which the cable connects to the electrostatic chuck is offset from a longitudinal axis of the socket.
Claim 18
Dependent Claim
29 words
The vacuum processing chamber of claim 8, wherein the cable has a length which is sufficiently short to allow RF bias energy to be transmitted through the electrostatic chuck.
Claim 19
Dependent Claim
70 words
An electrical connector for an electrostatic chuck comprising: a cable having a first end electrically connected to the electrostatic chuck; a socket including a side wall, said side wall electrically connected to a second end of the cable; and an electric contacting member for supplying power to the socket, wherein said contacting member is removably received into the socket to make electrical contact with said side wall of the socket.
Claim 20
Dependent Claim
70 words
An electrical connector for an electrostatic chuck comprising: a cable having a first end electrically connected to the electrostatic chuck; a socket including a side wall, said side wall electrically connected to a second end of the cable; and an electric contacting member for supplying power to the socket, wherein said contacting member is removably received into the socket to make electrical contact with said side wall of the socket.
Claim 21
Dependent Claim
18 words
The electrical connector of claim 16, wherein the cable is flexible to prevent damage to the electrostatic chuck.
Claim 22
Dependent Claim
32 words
The electrical connector of claim 16, wherein the socket has a surface area sufficient to receive RF power from an RF source and to transmit the RF power through the electrostatic chuck.
Claim 23
Independent Claim
113 words
A method of assembling an electrostatic chuck in a vacuum processing chamber comprising the steps of: slidably attaching a removable cap including an electrostatic chuck and a first electrical contacting member to a support member including a second electrical contacting member such that the first and second contacting members are electrically connected together; and securing the cap to the support member with at least one fastening members, wherein the first electrical contacting member comprises an electrically conductive socket and the second electrical contacting member comprises a contact extending outwardly away from a surface of the support member which faces the cap, the contact being frictionally engaged with the socket during the attaching step.
Claim 24
Independent Claim
113 words
A method of assembling an electrostatic chuck in a vacuum processing chamber comprising the steps of: slidably attaching a removable cap including an electrostatic chuck and a first electrical contacting member to a support member including a second electrical contacting member such that the first and second contacting members are electrically connected together; and securing the cap to the support member with at least one fastening members, wherein the first electrical contacting member comprises an electrically conductive socket and the second electrical contacting member comprises a contact extending outwardly away from a surface of the support member which faces the cap, the contact being frictionally engaged with the socket during the attaching step.
Claim 25
Dependent Claim
25 words
The method of claim 19, wherein the at least one fastening member comprises a plurality of bolts, the bolts being tightened during the securing step.
Claim 26
Independent Claim
115 words
A method of assembling an electrostatic chuck in a vacuum processing chamber comprising the steps of: slidably attaching a removable cap including an electrostatic chuck and a first electrical contacting member to a support member including a second electrical contacting member such that the first and second contacting members are electrically connected together; and securing the cap to the support member with at least one fastening member, wherein the first electrical contacting member comprises a plurality of sockets and the second electrical contacting member comprises a plurality of contacts extending outwardly away from a surface of the support member which faces the cap, the contacts being frictionally engaged with the sockets during the attaching step.
Claim 27
Independent Claim
115 words
A method of assembling an electrostatic chuck in a vacuum processing chamber comprising the steps of: slidably attaching a removable cap including an electrostatic chuck and a first electrical contacting member to a support member including a second electrical contacting member such that the first and second contacting members are electrically connected together; and securing the cap to the support member with at least one fastening member, wherein the first electrical contacting member comprises a plurality of sockets and the second electrical contacting member comprises a plurality of contacts extending outwardly away from a surface of the support member which faces the cap, the contacts being frictionally engaged with the sockets during the attaching step.
Claim 28
Dependent Claim
41 words
The method of claim 19, further comprising clamping a substrate on the electrostatic chuck and applying an RF bias to the substrate by supplying DC current and RF power to the electrostatic chuck through the first and second electrical contacting members.
Claim 29
Dependent Claim
77 words
An electrostatic chuck for a vacuum processing chamber comprising: an electrode for clamping an article to the electrostatic chuck; a wire having a first end connected to the electrode; and a conductive socket including at least a side wall, wherein at least a first electrical contacting member connects a second end of the wire to said sidewall, and said electrode receives power through a removable second electrical contacting member via said side wall of the conductive socket.
Claim 30
Dependent Claim
77 words
An electrostatic chuck for a vacuum processing chamber comprising: an electrode for clamping an article to the electrostatic chuck; a wire having a first end connected to the electrode; and a conductive socket including at least a side wall, wherein at least a first electrical contacting member connects a second end of the wire to said sidewall, and said electrode receives power through a removable second electrical contacting member via said side wall of the conductive socket.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-08-24 | 2002-02-23 | 2002-08-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-08-24 | 2006-02-23 | 2006-08-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-08-24 | 2010-02-23 | 2010-08-25 | $7700.00 | Window Closed / Lapsed |