US5835335A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Unbalanced bipolar electrostatic chuck power supplies and methods thereof
Assignee: Lam Research Corp
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Filing: 1997-03-26
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Granted: 1998-11-10
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Expires: 2017-03-26
Abstract
Abstract A method of providing unbalanced voltages to a bipolar electrostatic chuck of a substrate processing chamber. The method includes providing a variable balanced voltage power supply, which is configured for producing, responsive to a control signal, balanced differential output voltages on a first and second terminals of the variable balanced voltage power supply. The method further includes coupling the first terminal of the variable balanced voltage power supply to a first node. The first node is coupled to a first resistive element of a resistor bridge. The method also includes coupling the second terminal of the variable balanced voltage power supply to a second node. The second node is coupled to a second resistive element of the resistor bridge. The first resistive element is lower in resistance value than the second resistive element. There is further included coupling the first resistive element and the second resistive element to a common reference terminal, thereby producing, without employing a power supply other than the variable balanced voltage power supply, the unbalanced voltages at the first node and the second node when the variable balanced voltage power supply is turned on.
Inventors
- 👤 Charles P. Ross
- 👤 Canfeng Lai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 16:41
CPC Classifications
H; H10; H10P; H10P95/00; H10P72/00; H10P72/70; H10P72/72; H10P72/722; H02; H02N; H02N13/00; Y; Y10; Y10T; Y10T279/00; Y10T279/23
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
180 words
A method of providing unbalanced voltages to a bipolar electrostatic chuck of a substrate processing chamber, comprising: providing a variable balanced voltage power supply, said variable balanced voltage power supply being configured for producing, responsive to a control signal, balanced differential output voltages on a first and second terminals of said variable balanced voltage power supply; coupling said first terminal of said variable balanced voltage power supply to a first node, said first node being coupled to a first resistive element of a resistor bridge; coupling said second terminal of said variable balanced voltage power supply to a second node, said second node being coupled to a second resistive element of said resistor bridge, said first resistive element being lower in resistance value than said second resistive element; and coupling said first resistive element and said second resistive element to a common reference terminal, thereby producing, without employing a power supply other than said variable balanced voltage power supply, said unbalanced voltages at said first node and said second node when said variable balanced voltage power supply is turned on.
Claim 2
Independent Claim
180 words
A method of providing unbalanced voltages to a bipolar electrostatic chuck of a substrate processing chamber, comprising: providing a variable balanced voltage power supply, said variable balanced voltage power supply being configured for producing, responsive to a control signal, balanced differential output voltages on a first and second terminals of said variable balanced voltage power supply; coupling said first terminal of said variable balanced voltage power supply to a first node, said first node being coupled to a first resistive element of a resistor bridge; coupling said second terminal of said variable balanced voltage power supply to a second node, said second node being coupled to a second resistive element of said resistor bridge, said first resistive element being lower in resistance value than said second resistive element; and coupling said first resistive element and said second resistive element to a common reference terminal, thereby producing, without employing a power supply other than said variable balanced voltage power supply, said unbalanced voltages at said first node and said second node when said variable balanced voltage power supply is turned on.
Claim 3
Dependent Claim
60 words
The method of claim 1 further comprising coupling said common reference terminal to a peak detector circuit output, said peak detector circuit output representing a direct current signal produced responsive to a RF peak-to-peak voltage measured on said bipolar electrostatic chuck, thereby permitting magnitudes of said unbalanced voltages to vary responsive to a magnitude of said peak detector circuit output.
Claim 4
Dependent Claim
17 words
The method of claim 2 wherein said first resistive element has a value of about 1.001 MΩ.
Claim 5
Dependent Claim
17 words
The method of claim 3 wherein said second resistive element has a value of about 2 MΩ.
Claim 6
Dependent Claim
25 words
The method of claim 1 further comprising coupling said common reference terminal to ground, thereby substantially fixing magnitudes of said unbalanced voltages at predefined values.
Claim 7
Dependent Claim
44 words
The method of claim 1 further comprising: coupling said common reference terminal to a first end of a current limiting resistor; and coupling a second end of said current limiting resistor to ground, thereby substantially fixing magnitudes of said unbalanced voltages at predefined values.
Claim 8
Dependent Claim
58 words
The method of claim 6 further comprising obtaining a DC voltage at a first voltage monitor node, said first voltage monitor node being coupled to a first resistor of said first resistive element and a second resistor of said first resistive element, wherein said first resistive element comprises said first resistor coupled in series with said second resistor.
Claim 9
Dependent Claim
41 words
The method of claim 1 wherein said bipolar electrostatic chuck is of a donut-and-base configuration, said first node being coupled to a donut of said bipolar electrostatic chuck, said second node being coupled to a base of said bipolar electrostatic chuck.
Claim 10
Dependent Claim
196 words
An unbalanced differential voltage power supply configured for supplying unbalanced voltages to a bipolar electrostatic chuck of a substrate processing chamber, comprising: a variable balanced voltage power supply, said variable balanced voltage power supply being configured for producing, responsive to a control signal, balanced differential output voltages on a first and second terminals of said variable balanced voltage power supply; a first node, said first node being coupled to said first terminal of said variable balanced voltage power supply; a resistor bridge having a first resistive element coupled in parallel to a second resistive element, said first resistive element being coupled to said first node; a second node, said second node being coupled to said second terminal of said variable balanced voltage power supply and said second resistive element, said first resistive element being lower in resistance value than said second resistive element; and a common reference terminal coupled to said first resistive element and said second resistive element, whereby said unbalanced voltages are produced, without employing a power supply other than said variable balanced voltage power supply, at said first node and said second node when said variable balanced voltage power supply is turned on.
Claim 11
Dependent Claim
196 words
An unbalanced differential voltage power supply configured for supplying unbalanced voltages to a bipolar electrostatic chuck of a substrate processing chamber, comprising: a variable balanced voltage power supply, said variable balanced voltage power supply being configured for producing, responsive to a control signal, balanced differential output voltages on a first and second terminals of said variable balanced voltage power supply; a first node, said first node being coupled to said first terminal of said variable balanced voltage power supply; a resistor bridge having a first resistive element coupled in parallel to a second resistive element, said first resistive element being coupled to said first node; a second node, said second node being coupled to said second terminal of said variable balanced voltage power supply and said second resistive element, said first resistive element being lower in resistance value than said second resistive element; and a common reference terminal coupled to said first resistive element and said second resistive element, whereby said unbalanced voltages are produced, without employing a power supply other than said variable balanced voltage power supply, at said first node and said second node when said variable balanced voltage power supply is turned on.
Claim 12
Dependent Claim
70 words
The unbalanced differential voltage power supply of claim 9 further comprising an RF peak-to-peak voltage detector coupled to said common reference terminal, said RF peak-to-peak voltage detector measuring an RF peak-to-peak voltage measured on said bipolar electrostatic chuck and producing a direct current signal responsive thereto at said common reference terminal, thereby permitting magnitudes of said unbalanced voltages to vary responsive to a magnitude of said peak detector circuit output.
Claim 13
Dependent Claim
21 words
The unbalanced differential voltage power supply of claim 10 wherein said first resistive element has a value of about 1.001 MΩ.
Claim 14
Dependent Claim
21 words
The unbalanced differential voltage power supply of claim 11 wherein said second resistive element has a value of about 2 MΩ.
Claim 15
Dependent Claim
29 words
The unbalanced differential voltage power supply of claim 9 wherein said common reference terminal is coupled to ground, thereby substantially fixing magnitudes of said unbalanced voltages at predefined values.
Claim 16
Dependent Claim
22 words
The unbalanced differential voltage power supply of claim 13 wherein said predefined values are about -460 Volts and about 240 Volts, respectively.
Claim 17
Dependent Claim
48 words
The unbalanced differential voltage power supply of claim 9 wherein said common reference terminal is coupled to a first end of a current limiting resistor, a second end of said current limiting resistor is coupled to ground, thereby substantially fixing magnitudes of said unbalanced voltages at predefined values.
Claim 18
Dependent Claim
49 words
The unbalanced differential voltage power supply of claim 15 wherein said first resistive element comprises a first resistor coupled in series with a first voltage monitor node and a second resistor, said voltage monitoring node being configured for providing a DC voltage representing a fraction of said unbalanced voltages.
Claim 19
Dependent Claim
125 words
An unbalanced differential voltage power supply configured for supplying unbalanced voltages to a bipolar electrostatic chuck of a substrate processing chamber, comprising: a balanced voltage power supply, said balanced voltage power supply being configured for producing balanced differential output voltages on a first and second terminals of said balanced voltage power supply; means, coupled to said first terminal and said second terminal, for unbalancing said differential output voltages, thereby producing said unbalanced voltages, said means for unbalancing includes: a first resistive means coupled to said first terminal; a second resistive means coupled to said second terminal, said first resistive means being lower in resistance value than said second resistive means; and a reference terminal coupled to said first resistive means and said second resistive means.
Claim 20
Dependent Claim
125 words
An unbalanced differential voltage power supply configured for supplying unbalanced voltages to a bipolar electrostatic chuck of a substrate processing chamber, comprising: a balanced voltage power supply, said balanced voltage power supply being configured for producing balanced differential output voltages on a first and second terminals of said balanced voltage power supply; means, coupled to said first terminal and said second terminal, for unbalancing said differential output voltages, thereby producing said unbalanced voltages, said means for unbalancing includes: a first resistive means coupled to said first terminal; a second resistive means coupled to said second terminal, said first resistive means being lower in resistance value than said second resistive means; and a reference terminal coupled to said first resistive means and said second resistive means.
Claim 21
Dependent Claim
64 words
The unbalanced differential voltage power supply of claim 17 wherein said common reference terminal is coupled to a peak detector circuit output, said peak detector circuit output representing a direct current signal produced responsive to a RF peak-to-peak voltage measured on said bipolar electrostatic chuck, to permit magnitudes of said unbalanced voltages to vary responsive to a magnitude of said peak detector circuit output.
Claim 22
Dependent Claim
29 words
The unbalanced differential voltage power supply of claim 17 wherein said common reference terminal is coupled to ground to substantially fix magnitudes of said unbalanced voltages at predefined values.
Claim 23
Dependent Claim
48 words
The unbalanced differential voltage power supply of claim 17 wherein said common reference terminal is coupled to a first end of a current limiting resistor, a second end of said current limiting resistor is coupled to ground, to substantially fix magnitudes of said unbalanced voltages at predefined values.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-09 | 2002-05-11 | 2002-11-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-09 | 2006-05-11 | 2006-11-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-09 | 2010-05-11 | 2010-11-10 | $7700.00 | Window Closed / Lapsed |