US5866805A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cantilevers for a magnetically driven atomic force microscope
Assignee: Keysight Technologies Inc
•
Filing: 1996-09-12
•
Granted: 1999-02-02
•
Expires: 2016-09-12
Abstract
Abstract A force sensing cantilever for use in a scanning probe microscope has both a top side and a bottom side. From the bottom side extends a probe tip. The bottom side is coated with a thin film of a first material and the top side is coated with a thin film of a second material. The first and second materials may be the same or they may be different. The materials and thicknesses of the respective films are selected so as to create opposing forces to counter the tendency of such cantilevers to bend when a thin film is applied to only one side thereof.
Inventors
- 👤 Wenhai Han
- 👤 Stuart M. Lindsay
- 👤 Tianwei Jing
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 14:05
CPC Classifications
G; G01; G01Q; G01Q10/00; G01Q10/04; G01Q10/06; B; B82; B82Y; B82Y35/00; G01Q30/00; G01Q30/08; G01Q30/12; G01Q30/14; G01Q60/00; G01Q60/24; G01Q60/32; G01Q60/38; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/865; Y10S977/871; Y10S977/872; Y10S977/873; Y10S977/875
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
116 words
A force sensing cantilever for use in a scanning probe microscope, said cantilever comprising: a cantilever structure having a top side and a bottom side, said bottom side including a probe tip disposed downwardly therefrom; a film of a first material which is not magnetizable disposed over said bottom side and said probe tip; and a film of a second material which is magnetizable disposed over said top side, and wherein said first material is different from said second material, said first and second materials and the thicknesses of the respective films being selected so as to counter the tendency of said cantilever structure to bend when a film is applied only to one side thereof.
Claim 2
Dependent Claim
116 words
A force sensing cantilever for use in a scanning probe microscope, said cantilever comprising: a cantilever structure having a top side and a bottom side, said bottom side including a probe tip disposed downwardly therefrom; a film of a first material which is not magnetizable disposed over said bottom side and said probe tip; and a film of a second material which is magnetizable disposed over said top side, and wherein said first material is different from said second material, said first and second materials and the thicknesses of the respective films being selected so as to counter the tendency of said cantilever structure to bend when a film is applied only to one side thereof.
Claim 3
Dependent Claim
14 words
A cantilever according to claim 1 in which said cantilever structure comprises silicon nitride.
Claim 4
Dependent Claim
12 words
A cantilever according to claim 1 wherein said second material comprises Nd/Fe/Bo.
Claim 5
Dependent Claim
82 words
A force sensing cantilever for use in a scanning probe microscope, said cantilever comprising: a cantilever structure having a top side and a bottom side, said bottom side including a probe tip disposed downwardly therefrom; a film of a first material comprising Cr which is not magnetizable disposed over said bottom side and said probe tip; and a film of a second material which is magnetizable disposed over said top side, and wherein said first material is different from said second material.
Claim 6
Dependent Claim
82 words
A force sensing cantilever for use in a scanning probe microscope, said cantilever comprising: a cantilever structure having a top side and a bottom side, said bottom side including a probe tip disposed downwardly therefrom; a film of a first material comprising Cr which is not magnetizable disposed over said bottom side and said probe tip; and a film of a second material which is magnetizable disposed over said top side, and wherein said first material is different from said second material.
Claim 7
Dependent Claim
12 words
A cantilever according to claim 4 wherein said second material comprises Nd/Fe/Bo.
Claim 8
Independent Claim
132 words
A method of fabricating a force sensing cantilever for a scanning probe microscope comprising the steps of: forming a cantilever structure having a top side, a bottom side, and a probe tip extending downwardly from said bottom side; placing the cantilever in a sputter deposition chamber; sputter depositing a first material which is not a magnetizable material onto the bottom side of the cantilever to form a film of said first material; and sputter depositing a second material which is magnetizable onto the top side of the cantilever to form a film of said second material, said first and second materials and the thicknesses of the respective films being selected so as to counter the tendency of said cantilever structure to bend when a film is applied only to one side thereof.
Claim 9
Independent Claim
132 words
A method of fabricating a force sensing cantilever for a scanning probe microscope comprising the steps of: forming a cantilever structure having a top side, a bottom side, and a probe tip extending downwardly from said bottom side; placing the cantilever in a sputter deposition chamber; sputter depositing a first material which is not a magnetizable material onto the bottom side of the cantilever to form a film of said first material; and sputter depositing a second material which is magnetizable onto the top side of the cantilever to form a film of said second material, said first and second materials and the thicknesses of the respective films being selected so as to counter the tendency of said cantilever structure to bend when a film is applied only to one side thereof.
Claim 10
Dependent Claim
16 words
A method according to claim 6 wherein said first material and said second material are different.
Claim 11
Dependent Claim
18 words
A method according to claim 7 further comprising the step of: magnetizing the cantilever in a selected direction.
Claim 12
Dependent Claim
18 words
A method according to claim 6 further comprising the step of: magnetizing the cantilever in a selected direction.
Claim 13
Independent Claim
102 words
A method of fabricating a force sensing cantilever for a scanning probe microscope comprising the steps of: forming a cantilever structure having a top side, a bottom side and a probe tip extending downwardly from said bottom side; placing the cantilever in a sputter deposition chamber; selecting a non-magnetic material and thin film thickness to counter the bending force that will be applied by a deposited film of a selected magnetic material; sputter depositing said non-magnetic material onto the bottom side of the cantilever to said selected thickness; and sputter depositing said selected magnetic material onto the top side of the cantilever.
Claim 14
Independent Claim
102 words
A method of fabricating a force sensing cantilever for a scanning probe microscope comprising the steps of: forming a cantilever structure having a top side, a bottom side and a probe tip extending downwardly from said bottom side; placing the cantilever in a sputter deposition chamber; selecting a non-magnetic material and thin film thickness to counter the bending force that will be applied by a deposited film of a selected magnetic material; sputter depositing said non-magnetic material onto the bottom side of the cantilever to said selected thickness; and sputter depositing said selected magnetic material onto the top side of the cantilever.
Claim 15
Dependent Claim
12 words
A method according to claim 10 wherein said cantilever comprises silicon nitride.
Claim 16
Dependent Claim
12 words
A method according to claim 11 wherein said non-magnetic material comprises Cr.
Claim 17
Dependent Claim
15 words
A method according to claim 12 wherein said magnetic material comprises a rare-earth magnetic alloy.
Claim 18
Dependent Claim
13 words
A method according to claim 13 wherein said rare-earth magnetic alloy comprises Nd/Fe/Bo.
Claim 19
Dependent Claim
30 words
A method according to claim 13 wherein said magnetic material comprises an alloy selected from the group consisting of: Nd/Fe/Bo, samarium cobalt, aluminum nickel cobalt, and combinations of the foregoing.
Claim 20
Dependent Claim
126 words
A force sensing cantilever for use in a scanning probe microscope, said cantilever comprising: a cantilever structure with a spring constant of less than 1 N/m and having a top side and a bottom side, said bottom side including a probe tip disposed downwardly therefrom; a film of a first material which is not magnetizable disposed over said bottom side and said probe tip; and a film of a second material which is magnetizable disposed over said top side, and wherein said first material is different from said second material, said first and second materials and the thicknesses of the respective films being selected so as to counter the tendency of said cantilever structure to bend when a film is applied only to one side thereof.
Claim 21
Dependent Claim
126 words
A force sensing cantilever for use in a scanning probe microscope, said cantilever comprising: a cantilever structure with a spring constant of less than 1 N/m and having a top side and a bottom side, said bottom side including a probe tip disposed downwardly therefrom; a film of a first material which is not magnetizable disposed over said bottom side and said probe tip; and a film of a second material which is magnetizable disposed over said top side, and wherein said first material is different from said second material, said first and second materials and the thicknesses of the respective films being selected so as to counter the tendency of said cantilever structure to bend when a film is applied only to one side thereof.
Claim 22
Dependent Claim
14 words
A cantilever according to claim 16 in which said cantilever structure comprises silicon nitride.
Claim 23
Dependent Claim
35 words
A cantilever according to claim 16 wherein said second material comprises a rare earth magnetic material comprising alloys selected from the group consisting of: Nd/Fe/Bo, samarium cobalt, aluminum nickel cobalt, and combinations of the foregoing.
Claim 24
Independent Claim
141 words
A method of fabricating a force sensing cantilever for a scanning probe microscope comprising the steps of: forming a cantilever structure having a spring constant of less than 1 N/m, a top side, a bottom side, and a probe tip extending downwardly from said bottom side; placing the cantilever in a sputter deposition chamber; sputter depositing a first material which is not magnetizable onto the bottom side of the cantilever to form a film of said first material; and sputter depositing a second material which is magnetizable onto the top side of the cantilever to form a film of said second material, wherein said first and second materials are different and the thicknesses of the respective films are selected so as to counter the tendency of said cantilever structure to bend when a film is applied only to one side thereof.
Claim 25
Independent Claim
141 words
A method of fabricating a force sensing cantilever for a scanning probe microscope comprising the steps of: forming a cantilever structure having a spring constant of less than 1 N/m, a top side, a bottom side, and a probe tip extending downwardly from said bottom side; placing the cantilever in a sputter deposition chamber; sputter depositing a first material which is not magnetizable onto the bottom side of the cantilever to form a film of said first material; and sputter depositing a second material which is magnetizable onto the top side of the cantilever to form a film of said second material, wherein said first and second materials are different and the thicknesses of the respective films are selected so as to counter the tendency of said cantilever structure to bend when a film is applied only to one side thereof.
Claim 26
Dependent Claim
18 words
A method according to claim 19 further comprising the step of: magnetizing the cantilever in a selected direction.
Claim 27
Independent Claim
110 words
A method of fabricating a force sensing cantilever for a scanning probe microscope comprising the steps of: forming a cantilever structure having a spring constant of less than 1 N/m, a top side, a bottom side, and a probe tip extending downwardly from said bottom side; placing the cantilever in a sputter deposition chamber; selecting a non-magnetic material and thin film thickness to counter the bending force that will be applied by a deposited film of a selected magnetic material; sputter depositing said non-magnetic material onto the bottom side of the cantilever to said selected thickness; and sputter depositing said selected magnetic material onto the top side of the cantilever.
Claim 28
Independent Claim
110 words
A method of fabricating a force sensing cantilever for a scanning probe microscope comprising the steps of: forming a cantilever structure having a spring constant of less than 1 N/m, a top side, a bottom side, and a probe tip extending downwardly from said bottom side; placing the cantilever in a sputter deposition chamber; selecting a non-magnetic material and thin film thickness to counter the bending force that will be applied by a deposited film of a selected magnetic material; sputter depositing said non-magnetic material onto the bottom side of the cantilever to said selected thickness; and sputter depositing said selected magnetic material onto the top side of the cantilever.
Claim 29
Dependent Claim
12 words
A method according to claim 21 wherein said cantilever comprises silicon nitride.
Claim 30
Dependent Claim
12 words
A method according to claim 22 wherein said non-magnetic material comprises Cr.
Claim 31
Dependent Claim
15 words
A method according to claim 23 wherein said magnetic material comprises a rare-earth magnetic alloy.
Claim 32
Dependent Claim
31 words
A method according to claim 24 wherein said rare-earth magnetic alloy comprises a material selected from the group consisting of: Nd/Fe/Bo, samarium cobalt, aluminum nickel cobalt, and combinations of the foregoing.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-02-01 | 2002-08-03 | 2003-02-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-02-01 | 2006-08-03 | 2007-02-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-02-01 | 2010-08-03 | 2011-02-02 | $7700.00 | Window Closed / Lapsed |