Capacitively coupled RF voltage probe having optimized flux linkage

Claim 2

A voltage sensor for coupling to a power carrying transmission line to sense voltage on said transmission line, comprising: a center conductor coupled serially in-line to said transmission line; a housing surrounding said center conductor to shield said center conductor and to provide a return path for said transmission line; a plate disposed between said center conductor and said housing, having a first side of said plate proximal to and facing said center conductor, in which said center conductor and said plate function as capacitor plates to form a capacitor; a sensing line having a characteristic impedance of a resistive load coupled to terminate on an opposite side of said plate, wherein the resistive load of said sensing line and the capacitor forming a resistive-capacitive circuit, said plate being sufficiently short in length as compared to said center conductor, said center conductor being closer to said plate than said housing at a point on said center conductor where said plate is located and the opposite side of said plate being coupled to said resistive load, which places the opposite side of said plate at a potential near that of said housing, allowing for electric flux linkage from said center conductor to be coupled to both sides of said plate to reduce flux loss at the point where said center conductor is sensed; said sensing line providing a sensing voltage signal which is indicative of transmission line voltage.

Claim 3

The voltage sensor of claim 1 wherein said center conductor is axisymmetric in shape and said plate is placed near the center of its axisymmetric-shaped length.

Claim 4

The voltage sensor of claim 2 wherein said center conductor is cylindrically-shaped and said plate is placed proximal to a mid-point along said cylindrically-shaped length.

Claim 5

The voltage sensor of claim 3 wherein said plate is curved to have a bend radius which is concentric to said cylindrically-shaped center conductor.

Claim 6

The voltage sensor of claim 3 wherein said plate is flat on both sides.

Claim 7

A radio frequency (RF) voltage sensor for coupling to a power carrying transmission line to sense RF voltage on said transmission line, comprising: a center conductor for coupling serially in-line to an RF driven conductor of said transmission line, said center conductor coupled at each end to said transmission line; a sensor housing surrounding said center conductor to shield said center conductor and to provide a return path for said transmission line; a plate disposed within said housing and having a first side of said plate proximal to and facing said center conductor, in which said center conductor and said plate function as capacitor plates to form a capacitor; a sensing line having a characteristic impedance of a resistive load coupled to terminate on an opposite side of said plate, wherein the resistive load of said sensing line and the capacitor forming a resistive-capacitive circuit; said plate being sufficiently short in length as compared to said center conductor, said center conductor being closer to said plate than said housing at a point on said center conductor where said plate is located and the opposite side of said plate being coupled to said resistive load, which places the opposite side of said plate at a potential near that of said housing, allowing for electric flux linkage from said center conductor to be coupled to both sides of said plate to reduce flux loss at the point where said center conductor is sensed; said sensing line providing a sensing voltage signal which is indicative of transmission line voltage.

Claim 8

A radio frequency (RF) voltage sensor for coupling to a power carrying transmission line to sense RF voltage on said transmission line, comprising: a center conductor for coupling serially in-line to an RF driven conductor of said transmission line, said center conductor coupled at each end to said transmission line; a sensor housing surrounding said center conductor to shield said center conductor and to provide a return path for said transmission line; a plate disposed within said housing and having a first side of said plate proximal to and facing said center conductor, in which said center conductor and said plate function as capacitor plates to form a capacitor; a sensing line having a characteristic impedance of a resistive load coupled to terminate on an opposite side of said plate, wherein the resistive load of said sensing line and the capacitor forming a resistive-capacitive circuit; said plate being sufficiently short in length as compared to said center conductor, said center conductor being closer to said plate than said housing at a point on said center conductor where said plate is located and the opposite side of said plate being coupled to said resistive load, which places the opposite side of said plate at a potential near that of said housing, allowing for electric flux linkage from said center conductor to be coupled to both sides of said plate to reduce flux loss at the point where said center conductor is sensed; said sensing line providing a sensing voltage signal which is indicative of transmission line voltage.

Claim 9

The RF voltage sensor of claim 6 wherein said center conductor is axisymmetric in shape and said plate is placed near the center of its axisymmetric-shaped length; and said housing also has an axisymmetric shaped inner wall.

Claim 10

The RF voltage sensor of claim 7 wherein said center conductor is cylindrically-shaped and said plate is placed proximal to a mid-point along said cylindrically-shaped length; and said housing also has a cylindrically-shaped inner wall.

Claim 11

The voltage sensor of claim 8 wherein said actual voltage (Vs) is approximated by an equation ##EQU28## where Vt is a value of said voltage signal, R is a value of said resistance determined by said characteristic impedance, Ci is a value of a capacitance of the capacitor determined by the flux linkage to said plate and ω is frequency.

Claim 12

The voltage sensor of claim 9 wherein said value of said capacitance Ci is approximated by an equation ##EQU29## where d is a longitudinal length of said plate along said cylindrically shaped length of said center conductor, α is a distance from a longitudinal center axis along said center conductor to its cylindrically shaped outer surface near where said plate is located, ρ is a distance from said longitudinal axis of said center conductor to said plate, α is an angle formed by a fraction of a circumference subtended by said plate and ε is a dielectric constant of a medium separating said plate from said center conductor.

Claim 13

The voltage sensor of claim 9 wherein said plate is flat on both sides.

Claim 14

In a processing system in which radio frequency (RF) power is coupled from an RF source to a processing equipment by a transmission line, a method of monitoring RF voltage on said transmission line, comprising the steps of: providing a center conductor which is coupled serially in-line to said transmission line; providing a housing which surrounds said center conductor to shield said center conductor and function as a return path for said transmission line; providing a plate disposed between said center conductor and said housing, having a first side of said plate proximal to and facing said center conductor, in which said center conductor and said plate function as capacitor plates to form a capacitor; providing a sensing line having a characteristic impedance of a resistive load coupled to terminate on an opposite side of said plate, wherein the resistive load of said sensing line and the capacitor forming a resistive-capacitive circuit; said plate being sufficiently short in length as compared to said center conductor, said center conductor being closer to said plate than said housing at a point on said center conductor where said plate is located and the opposite side of said plate being coupled to said resistive load, which places the opposite side of said plate at a potential near that of said housing, allowing for electric flux linkage from said center conductor to be coupled to both sides of said plate to reduce flux loss at the point where said center conductor is sensed; measuring said sensing line which provides a sensing voltage signal indicative of transmission line voltage.

Claim 15

In a processing system in which radio frequency (RF) power is coupled from an RF source to a processing equipment by a transmission line, a method of monitoring RF voltage on said transmission line, comprising the steps of: providing a center conductor which is coupled serially in-line to said transmission line; providing a housing which surrounds said center conductor to shield said center conductor and function as a return path for said transmission line; providing a plate disposed between said center conductor and said housing, having a first side of said plate proximal to and facing said center conductor, in which said center conductor and said plate function as capacitor plates to form a capacitor; providing a sensing line having a characteristic impedance of a resistive load coupled to terminate on an opposite side of said plate, wherein the resistive load of said sensing line and the capacitor forming a resistive-capacitive circuit; said plate being sufficiently short in length as compared to said center conductor, said center conductor being closer to said plate than said housing at a point on said center conductor where said plate is located and the opposite side of said plate being coupled to said resistive load, which places the opposite side of said plate at a potential near that of said housing, allowing for electric flux linkage from said center conductor to be coupled to both sides of said plate to reduce flux loss at the point where said center conductor is sensed; measuring said sensing line which provides a sensing voltage signal indicative of transmission line voltage.

Claim 16

The method of claim 12 wherein said center conductor is axisymmetric in shape and said plate is placed near the center of its axisymmetric-shaped length; and said housing also has an axisymmetric shaped inner wall.

Claim 17

The method of claim 13 wherein said center conductor is cylindrically-shaped and said plate is placed proximal to a mid-point along said cylindrically-shaped length; and said housing also has a cylindrically-shaped inner wall.

Claim 18

The method of claim 14 wherein said actual voltage (Vs) approximated by an equation ##EQU30## where Vt is a value of said voltage signal, R is a value of said resistance determined by said characteristic impedance, Ci is a value of a capacitance of the capacitor determined by the flux linkage to said plate and ω is frequency.

Claim 19

The method of claim 15 wherein said value of said capacitance Ci is approximated by an equation ##EQU31## where d is a longitudinal length of said plate along said cylindrically shaped length of said center conductor, α is a distance from a longitudinal center axis along said center conductor to its cylindrically shaped outer surface near where said plate is located, ρ is a distance from said longitudinal axis of said center conductor to said plate, α is an angle formed by a fraction of a circumference subtended by said plate and ε is a dielectric constant of a medium separating said plate from said center conductor.

Claim 20

The voltage sensor of claim 15 wherein said plate is flat on both sides.